Optimizing Test Cell Performance Using Probing Process Analysis ...

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Pass1: Probe Wafers • 200mm wafer • 378 Touchdowns • Cantilever probe card (4 X 1) • 700+ probes • Two tiers (different tip lengths) 1 Strom, “Multi-tier Probe Cards and Contact Resistance, SWTW 1998 1 Strom, A Study of Probing Process Analysis, SWTW 1999 1 June 6 to 9, 2010 IEEE SW Test Workshop 6
Pass1: PMI Results Need some raw PMI data here June 6 to 9, 2010 IEEE SW Test Workshop 7
Page 1 and 2: TM Optimizing Test Cell Performance
Page 3 and 4: • Pass1 Design Of Experiment - Me
Page 5: Pass1: Measure/Adjust probe card on
Page 9 and 10: Pass1: Probing Process Performance
Page 11 and 12: Pass1: Probe Card Performance • N
Page 14 and 15: Pass1: Probe Card Scrub Length and
Page 16 and 17: Probe Card Analyzer to Test Cell Co
Page 18 and 19: Pass1: Test Cell vs. VX3 Probe Posi
Page 20 and 21: Pass1: Test Cell to VX3 Correlation
Page 22 and 23: “Predictive Scrub” June 6 to 9,
Page 24 and 25: Pass 2: Measure Probe Card on VX4 B
Page 26 and 27: Pass 2: Probe Card Performance Deta
Page 28 and 29: Summary • We were able to improve

Optimizing Test Cell Performance Using Probing Process Analysis ...

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