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INTEGRATED TECHNOLOGY CORPORATION

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Providing Leading Edge Technology to Meet Your Future Requirements Today<br />

Alignment Shifts (3 Cards)<br />

• Averages of 6 groups of 5 probes<br />

• 3 groups each side, evenly spaced<br />

• Boxes represent +/- 5 microns movement<br />

• Lines represent direction and magnitude<br />

of movement (25 °C C to 125 °C)<br />

• The “+” is 25 °C C location<br />

• #11-Red, #12-Blue, #14-Green<br />

• Repeatability of multiple runs affected by<br />

stabilization time<br />

4/9/2002 Copyright April 2002 - ITC<br />

www.inttechcorp.com<br />

<strong>INTEGRATED</strong> <strong>TECHNOLOGY</strong> <strong>CORPORATION</strong>

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