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Innovative Probe Needle Cleaning Techniques

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Summary<br />

– Abrasive Scrubbing works, but is destructive.<br />

– Chemicals can work, but are destructive and face<br />

restricted usage in Fab environments.<br />

– Solvents are messy and ineffective.<br />

– High Frequency Acoustic <strong>Cleaning</strong> removes particulates<br />

but increases contact resistance.<br />

– CO 2<br />

Snow removes particulates but did not reduce contact<br />

resistance.<br />

Is MicroCluster Beam Technology<br />

the Solution?<br />

© 1998 Applied Precision, Inc.

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