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Understanding Contact Resistance between

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<strong>Contact</strong> <strong>Resistance</strong> Process<br />

Variables Examined<br />

• Low Forcing Current versus High<br />

• Probe <strong>Contact</strong> Force (overtravel)<br />

• Probe Tip Geometry and Scrub<br />

• <strong>Contact</strong> Surface Material<br />

• Instantaneous Repeatability (Static)<br />

and Multiple Interface<br />

Reproducibility (Dynamic)<br />

5/22/2000<br />

2

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