Understanding Contact Resistance between
Understanding Contact Resistance between
Understanding Contact Resistance between
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Test Apparatus and Setup<br />
(continued)<br />
• Probe Cards<br />
– Membrane<br />
– Vertical<br />
– Radius-Tip<br />
– Tungsten-Rhenium<br />
• <strong>Contact</strong> Surfaces<br />
– Tungsten-Carbide Checkplate<br />
– Gold Plate<br />
– Wafer<br />
5/22/2000<br />
4