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830 J.W. Deng et al. / Micron 43 (2012) 827–831<br />

Fig. 5. Summary <strong>of</strong> the peak variance V(k) values obtained using different nominal<br />

resolutions R for all tested amorphous materials.<br />

Table 2<br />

Correlation lengths and characteristic widths W <strong>of</strong> the amorphous materials. The<br />

mean atomic radii, r, <strong>of</strong> the materials are listed, as well as ratios /r between the<br />

correlation lengths and the mean atomic radii.<br />

(nm) W (nm) r (nm) /r<br />

a-Si 3N 4 0.69 ± 0.055 2.2 0.096 7.2<br />

Zr-S2 0.81 ± 0.35 2.6 0.15 5.4<br />

Zr-Vit105 0.85 ± 0.34 2.7 0.15 5.7<br />

Fe-BMG 0.88 ± 0.11 2.8 0.13 6.8<br />

amorphous materials, and the greatest V(k) were obtained with the<br />

0.6 nm resolution.<br />

4. Discussion<br />

4.1. MRO length <strong>of</strong> the amorphous materials<br />

The major advantage <strong>of</strong> <strong>variable</strong> resolution FEM is that it semiquantitatively<br />

determines MRO length <strong>of</strong> amorphous materials<br />

with no needs <strong>of</strong> prior knowledge on the material structure. By the<br />

use <strong>of</strong> pair persistence model (Gibson et al., 2000), the correlation<br />

lengths <strong>of</strong> the amorphous materials can be <strong>determined</strong> from the<br />

<strong>variable</strong> resolution FEM results. By assuming that the four-body<br />

atom correlation function g 4 has a Gaussian decay envelope, the<br />

variance V(k,Q) is transformed into following expression,<br />

(<br />

Q 2<br />

V(k, Q ) =<br />

1<br />

3 P(k)<br />

)<br />

+<br />

( 4 2<br />

P(k)<br />

)<br />

Q 2 . (2)<br />

is correlation decay length, which is closely related with the MRO<br />

length. The structure information independent on MRO length is<br />

separated into P(k), which is a pair persistence function. Accordingly,<br />

a linear correlation can be derived between Q 2 /V(k,Q) and<br />

Q 2 in low resolution (i.e. comparable to the MRO length scale <strong>of</strong><br />

amorphous materials), and the correlation length is obtained as<br />

= 1 √ m<br />

2 c , (3)<br />

where m = 4 2 /P(k) and c = 1/ 3 P(k) are the slope and intercept <strong>of</strong><br />

the linear fitting <strong>of</strong> Q 2 /V(k,Q) against Q 2 (Fig. 6). Correlation lengths<br />

<strong>of</strong> the amorphous materials are presented in Table 2, where<br />

correlation lengths <strong>of</strong> BMGs are between 0.81 nm and 0.88 nm,<br />

which are considerably larger than that <strong>of</strong> a-Si 3 N 4 (∼0.69 nm).<br />

The measured correlation lengths are commonly significant<br />

smaller than the acknowledged MRO lengths in amorphous materials.<br />

A characteristic width W for MRO was proposed as W = √ 10<br />

Fig. 6. Plot <strong>of</strong> the calculated Q 2 /V(k) against Q 2 values for all the amorphous materials<br />

according to the <strong>variable</strong> resolution FEM results. Here the V(k) values were chosen<br />

from Fig. 5. The corresponding Q values were listed in Table 1. Straight lines in different<br />

colors represent linear fitting to the data points. Using the slope and intercept<br />

<strong>of</strong> each fitting line, the correlation lengths <strong>of</strong> tested amorphous materials were<br />

extracted.<br />

<strong>by</strong> assuming as a radius <strong>of</strong> gyration for the correlated spheroidal<br />

<strong>order</strong>ed region (Gibson et al., 2000). In this work, W would be<br />

between 2.6 and 2.8 nm for BMGs, and ∼2.2 nm for a-Si 3 N 4 , which<br />

lies in the reported MRO <strong>range</strong> (0.5–3 nm) (Table 2).<br />

It is noteworthy that the pair persistence model predicts a<br />

monotonically decreasing V with the increase <strong>of</strong> R, which is inconsistent<br />

with our experimental results. Nevertheless, in <strong>order</strong> to<br />

compare with previous reported FEM results, we still used this<br />

method for the calculation <strong>of</strong> correlation lengths in this work.<br />

The obtained correlation lengths <strong>of</strong> a-Si 3 N 4 (0.69 nm) and BMGs<br />

(0.81–0.88 nm) are consistent with correlation lengths <strong>of</strong> amorphous<br />

materials <strong>determined</strong> in previous researches (e.g. 0.3–0.6 nm<br />

for a-Si (Bogle et al., 2010), 0.6–0.9 for CuZr (Hwang and Voyles,<br />

2011)). Therefore, the calculation is reliable, although better understanding<br />

<strong>of</strong> the experimental results would need more advanced<br />

computation models as suggested <strong>by</strong> Stratton and Voyles (2008).<br />

4.2. Size effect <strong>of</strong> objective aperture on the normalized intensity<br />

variance <strong>of</strong> FEM images<br />

As presented in Fig. 5, the highest variance V(k) peaks were all<br />

obtained when 0.6 nm resolution was employed (corresponding<br />

to 10 m objective aperture) for the amorphous samples in this<br />

work. This is probably due to the following reasons. In dark-field<br />

TEM imaging, the bright speckles arise from local <strong>order</strong>ed regions<br />

where coherent diffractions take place between structurally correlated<br />

atoms. In <strong>variable</strong> resolution FEM, the size <strong>of</strong> objective<br />

aperture determines the microscopy resolution in real space (proportional<br />

to 1/Q), which sets a lateral limit that the structurally<br />

<strong>order</strong>ed atoms can interfere coherently within. In this way, the size<br />

<strong>of</strong> objective aperture changes the sampling volume <strong>of</strong> dark-field<br />

imaging (Treacy and Gibson, 1996; Treacy et al., 2005). When the<br />

aperture size is appropriate, the obtained intensity variance value<br />

will reach a maximum because the sampling volume is comparable<br />

to the size <strong>of</strong> <strong>order</strong>ed region so that all structurally correlated<br />

atoms are contained in the sampling volume. A larger sampling<br />

volume (corresponding to smaller aperture) will include atoms outside<br />

an <strong>order</strong>ed region, thus decrease the obtained variance due<br />

to their incoherent interference. In contrast, a smaller sampling<br />

volume (larger aperture) will probe each <strong>order</strong>ed region multiple<br />

times, which also diminishes the variance value according to the

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