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J.W. Deng et al. / Micron 43 (2012) 827–831 831<br />

statistical feature <strong>of</strong> variance (Treacy, 2007; Treacy et al., 2005;<br />

Voyles and Abelson, 2003).<br />

Small objective apertures, which bring the nominal resolution R<br />

to the MRO length scale (0.5–3 nm), were suggested for FEM experiments<br />

to obtain reliable results (Treacy, 2007; Treacy et al., 2005).<br />

In this work, the correlation length is between 0.69 and 0.88 nm,<br />

while the characteristic width W is between 2.2 and 2.8 nm. This<br />

indicates that the maximum variance is obtained when the nominal<br />

resolution R approaches the correlation length rather than<br />

the characteristic width <strong>of</strong> MRO. This consists with recent <strong>variable</strong><br />

resolution FEM experiment on Cu–Zr <strong>metallic</strong> glass in the STEM<br />

nanodiffraction mode (Hwang and Voyles, 2011). By changing the<br />

probe size, FEM resolution was adjusted in STEM. Their results show<br />

that the maximum variance values increase monotonically as the<br />

resolution goes down to 0.8 nm, which is significantly smaller than<br />

the MRO length usually accepted but close to the correlation length<br />

<strong>of</strong> their samples (0.68–0.89 nm). Unfortunately, since there is<br />

no experiment results for even smaller probe size, the downward<br />

trend <strong>of</strong> variance V(k) is not available for further decrease <strong>of</strong> the<br />

resolution in STEM.<br />

Compared with previous FEM works on a-Si, a-Ge, etc., much<br />

smaller resolutions have been used for the BMG and a-Si 3 N 4 samples<br />

in this study and these resolutions work adequately for the<br />

samples. Nevertheless, since different amorphous materials may<br />

have different MRO length scales, the appropriate resolution for<br />

samples in this work might not be the optimum condition for other<br />

materials. Hence, it is necessary to resolve the appropriate resolution<br />

for studied materials prior to conducting FEM experiments in<br />

TEM as suggested <strong>by</strong> Treacy (2007). This is in fact also a motivation<br />

for us to conduct the <strong>variable</strong> resolution FEM study here.<br />

4.3. Comparison between MROs <strong>of</strong> <strong>metallic</strong> and covalent bond<br />

amorphous materials<br />

Although quantitative comparison <strong>of</strong> FEM results between different<br />

materials is hard due to influences from such as sample<br />

thickness, imaging conditions (Daulton et al., 2010; Yi and Voyles,<br />

2011), a preliminary comparison <strong>of</strong> MRO lengths and magnitudes<br />

between covalent bond a-Si 3 N 4 and <strong>metallic</strong> bond BMGs is still<br />

possible especially when experiment configuration was kept consistent.<br />

Firstly, the variance peaks <strong>of</strong> BMGs are greater than that <strong>of</strong><br />

a-Si 3 N 4 as shown in Fig. 5. Since the variance value corresponds<br />

to the extent <strong>of</strong> structural <strong>order</strong>ing, the greater variance indicates<br />

a higher <strong>order</strong>ing or an inhomogeneity in the BMG samples. Secondly,<br />

the correlation lengths <strong>of</strong> BMGs (0.81–0.88 nm) are larger<br />

than that <strong>of</strong> a-Si 3 N 4 (0.69 nm). However, in <strong>order</strong> to compare the<br />

MRO length in a relative scale, each correlation length was<br />

divided <strong>by</strong> the mean atomic radius r <strong>of</strong> the amorphous material<br />

(Table 2). Here, the mean atomic radius was calculated from Goldschmidt<br />

atomic radii <strong>of</strong> elements and chemical composition <strong>of</strong> each<br />

material (Gale and Totemeier, 2004). Although a-Si 3 N 4 has a much<br />

smaller correlation length, its /r value is in fact similar to or even<br />

slightly larger than that <strong>of</strong> BMGs.<br />

The spatial heterogeneity/homogeneity <strong>of</strong> BMGs on the nanoscale<br />

is also an interesting research topic. Researchers have<br />

suggested that the heterogeneity in BMG can play an important role<br />

during the initiation <strong>of</strong> shear bands and the subsequently plastic<br />

deformation process (Murali et al., 2011; Wang et al., 2012). However,<br />

the main focus <strong>of</strong> present work is to determine the length scale<br />

<strong>of</strong> medium <strong>range</strong> <strong>order</strong> in different amorphous materials. In <strong>order</strong><br />

to reveal the structure character <strong>of</strong> heterogeneity in BMGs, which<br />

is beyond the scope <strong>of</strong> this work, more experiments and analysis<br />

would be needed.<br />

5. Conclusions<br />

Variable resolution FEM has been successfully performed in<br />

TEM <strong>by</strong> varying the objective aperture size in a hollow-cone darkfield<br />

imaging mode on <strong>metallic</strong> and covalent bond amorphous<br />

materials. Correlation lengths <strong>of</strong> = 0.69 nm for covalently bonded<br />

a-Si 3 N 4 and = 0.81–0.88 nm for BMGs were extracted <strong>by</strong> fitting<br />

the variance values at different resolution situations. The experiment<br />

reveals that maximum intensity variance was obtained when<br />

the nominal resolution <strong>of</strong> FEM images approaches the correlation<br />

length <strong>of</strong> the studied amorphous materials.<br />

Acknowledgments<br />

The authors thank B. Wu for technical supports and F.F. Wu,<br />

Q.P. Cao and J.Z. Jiang for sample preparation. The authors would<br />

also like to thank the Hundred Talents Project <strong>of</strong> Chinese Academy<br />

<strong>of</strong> Sciences, the Cheung Kong Scholars Programme <strong>of</strong> China, the<br />

Natural Sciences Foundation <strong>of</strong> China (Grant Nos. 50671104 and<br />

50921004) and the Special Funds for the Major State Basic Research<br />

Projects <strong>of</strong> China (Grant No. 2009CB623705) for the financial support.<br />

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