Sentaurus Structure Editor Device Editor and ... - Synopsys.com

Z
Y
X
Figure 1. Main graphical user interface of Sentaurus Structure Editor.
Figure 2. Visualization of three-dimensional grid with associated doping
distribution.
Two-Dimensional and Three-Dimensional Device Editor
Two-dimensional and three-dimensional device models are created
geometrically using 2D or 3D primitives such as rectangles,
polygons, cuboids, cylinders, and spheres. Three-dimensional
regions can also be created by extruding 2D objects or sweeping
2D objects along a path. Rounded edges are generated by
filleting, 3D edge blending, and chamfering. The way in which
the overlap between new and existing objects is resolved can
be explicitly selected, which allows greater flexibility in structure
generation. Complex shapes are generated by performing Boolean
operations (union, subtract, intersect) between elements.
Parametric Device Structures
The script files of Sentaurus Structure Editor use a LISP-like
programming language called Scheme. Scripting makes it easy
to create parametric structures using simple variables or variables
defined as functions of other variables, conditional constructs such
as ‘if’ or ‘do while’ blocks, and loops.
Model Tessellation
Sentaurus Structure Editor models can contain analytic (circular,
elliptical) curves and spline curves in 2D, and analytic (spherical,
cylindrical, elliptical, toroidal) curves and spline curves or NURBS
surfaces in 3D. These curved edges and faces must be tessellated
to generate DF–ISE boundary output. Global and facewise
refinements can be used to specify the required surface resolution
(surface and normal vector tolerance), and the aspect ratio and
maximal edge length of the elements in the surface tessellation.
Mesh and Doping Visualization
From Sentaurus Structure Editor, the Synopsys meshers can
be accessed conveniently. Mesh and Noffset3D can be fully
configured from Sentaurus Structure Editor. The meshing
strategies (local refinements), constant and analytic dopings, and
submesh inclusion can be defined. The generated grid and data
files can be visualized in Sentaurus Structure Editor.
2