Sentaurus Structure Editor Device Editor and ... - Synopsys.com

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Z Y X Figure 1. Main graphical user interface of Sentaurus Structure Editor. Figure 2. Visualization of three-dimensional grid with associated doping distribution. Two-Dimensional and Three-Dimensional Device Editor Two-dimensional and three-dimensional device models are created geometrically using 2D or 3D primitives such as rectangles, polygons, cuboids, cylinders, and spheres. Three-dimensional regions can also be created by extruding 2D objects or sweeping 2D objects along a path. Rounded edges are generated by filleting, 3D edge blending, and chamfering. The way in which the overlap between new and existing objects is resolved can be explicitly selected, which allows greater flexibility in structure generation. Complex shapes are generated by performing Boolean operations (union, subtract, intersect) between elements. Parametric Device Structures The script files of Sentaurus Structure Editor use a LISP-like programming language called Scheme. Scripting makes it easy to create parametric structures using simple variables or variables defined as functions of other variables, conditional constructs such as ‘if’ or ‘do while’ blocks, and loops. Model Tessellation Sentaurus Structure Editor models can contain analytic (circular, elliptical) curves and spline curves in 2D, and analytic (spherical, cylindrical, elliptical, toroidal) curves and spline curves or NURBS surfaces in 3D. These curved edges and faces must be tessellated to generate DF–ISE boundary output. Global and facewise refinements can be used to specify the required surface resolution (surface and normal vector tolerance), and the aspect ratio and maximal edge length of the elements in the surface tessellation. Mesh and Doping Visualization From Sentaurus Structure Editor, the Synopsys meshers can be accessed conveniently. Mesh and Noffset3D can be fully configured from Sentaurus Structure Editor. The meshing strategies (local refinements), constant and analytic dopings, and submesh inclusion can be defined. The generated grid and data files can be visualized in Sentaurus Structure Editor. 2
Figure 3. Selected steps from a process emulation sequence that Procem typically performs. The final structure is a FinFET. Three-Dimensional Process Emulator In process emulation mode (Procem), Sentaurus Structure Editor translates processing steps, such as etching and deposition, patterning, fill and polish, into geometric operations. Procem supports various options such as isotropic and anisotropic etching and deposition, rounding, and blending to account for specific processing effects. Procem is fully integrated into Ligament, which is part of Sentaurus Workbench. Process emulation flows can be created easily and conveniently using the Ligament Flow Editor. External layout files in CIF or GDSII format can be imported into the Ligament Layout Editor. Implantation Doping profile distributions, including shadowing effects and nonplanar surfaces, can be defined using imp3d – an implantation engine – thereby emulating in 3D the final distribution of an implant operation that can include diffusion. Sentaurus Structure Editor can use imp3d to create a doping profile in the device, emulating the final profile of doping implantation and diffusion steps. The result is a distribution described by a Pearson function whose moment parameters are defined by the user: standard deviation, skewness, and kurtosis. An additional exponential tail parameter is available. Mix-and-Match The (2D and 3D) device editor modes and three-dimensional process emulation mode can be mixed freely in a script or interactively by entering Procem Scheme commands at the command-line window. For example, a geometrically generated trench can be coated with a thin oxide layer by using a single deposition step. 3
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Sentaurus Structure Editor Device Editor and ... - Synopsys.com

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