Surface Metrology

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wli white light source Beam-splitter reference mirror interference objective piezo electric stage ccd camera
confocal Typical Scan area: 200 mm X 200 mm X Resolution: 30 nm to 3 um Z Range: 300 um to 30 mm Disadvantages – limited z resolution. Advantages – High vertical scan depth, fast measurement speed.
Page 1 and 2: Presented for CMA Analytical Worksh
Page 3 and 4: techniques Tactile Stylus Atomic
Page 5 and 6: piezo electric actuators the linea
Page 7 and 8: stylus Diamond probe contacts samp
Page 9 and 10: Disadvantages - limited sampling ar
Page 11: wli White light source Resolutiuo
Page 15 and 16: Light source Polarizer (Optional co
Page 17 and 18: summary of optical techniques
Page 19 and 20: Isotropic vs. anisotropic Isotropy
Page 21 and 22: oughness Describes the texture of
Page 23 and 24: oughness standards ASME B46 ISO 4
Page 25 and 26: surface hybrid Symbol Name 2D Unit
Page 27 and 28: Spatial parameters Symbol Name 2D U
Page 29 and 30: White light interferometry
Page 31 and 32: Scanning wli
Page 33 and 34: Profile through origin Profile roug
Page 35 and 36: surface filtering Primary surface w
Page 40 and 41: step height
Page 42: film thickness
Page 45 and 46: vickers indent profile vickers inde
Page 47: phase mode
Page 50: 2d sem image of shot peened steel
Page 53 and 54: Nettle leaf Nettle leaf - reconstru

Surface Metrology

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