FEATURES BENEFITS - Ferrotec
FEATURES BENEFITS - Ferrotec
FEATURES BENEFITS - Ferrotec
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The AP&T Electron Beam Multihearth<br />
Source EV M-5 II was<br />
specifically designed for applications<br />
requiring high deposition<br />
rates and effective material<br />
utilization. Typical applica-<br />
<strong>FEATURES</strong><br />
•<br />
•<br />
•<br />
•<br />
•<br />
•<br />
•<br />
Small beam spot regardless<br />
of position in pocket<br />
Low inductance x- and y-coils<br />
with dynamic defocusing<br />
capability<br />
No dynamic water-vacuum<br />
interface<br />
Long filament lifetime<br />
Reproducible & quick filament fixture<br />
Hearth positioning by optical<br />
encoding<br />
Plug-in connector for magnet leads<br />
tions are production coatings<br />
or laboratory-scale evaporations<br />
with a variety of different<br />
materials or with materials<br />
which require continuous<br />
pocket rotation.<br />
<strong>BENEFITS</strong><br />
•<br />
•<br />
•<br />
•<br />
•<br />
•<br />
•<br />
The sources offer unique technical<br />
features to enhance the<br />
reliability and repeatability<br />
needed for professional evaporation.<br />
Homogeneous material<br />
depletion<br />
Stable beam sweep at<br />
high frequency beam deflection<br />
Eliminates water leakage<br />
into vacuum system<br />
Reduced maintenance and down-time<br />
Enhanced run-to-run repeatability<br />
Built-in hearth rotation<br />
non-interchangeable connections
Specifications<br />
Model EV M-5 II<br />
Max. power 5 kW<br />
Acceleration voltage 4-10 kV<br />
Max. filament current 50A @10VAC<br />
Primary beam deflection 270° by permanent magnet<br />
Magnet current x-deflection ± 3A (150 Hz)<br />
Magnet current y-deflection ± 3A (150 Hz)<br />
Spot size diameter 3mm<br />
Max. bakeout temperature 150°C<br />
Max. evaporation rate * 7.000 Å/min<br />
Hearth rotation integrated servo motor with<br />
optical positioning<br />
Operating pressure 1 x 10<br />
* For aluminum with source-to-substrate distance of 250 mm<br />
-8 mbar < p < 5 x 10-3 mbar<br />
Cooling water requirement 6 l/min (1,6 gpm); 3 bar (45 psi)<br />
2x VCO fittings, 8mm hose<br />
Mounting flange 32 mm base plate hole<br />
Weight 12 kg<br />
Dimensions see drawings<br />
Directly Cooled Hearths<br />
Hearth Configuration 4 x 8cc 6 x 4cc<br />
Max. Power 5 kW 3 kW<br />
Part-No. EV M-5 II 1-63 50 00 1-63 70 00<br />
Dimensions in mm<br />
typ.<br />
competition<br />
EV M-5 II<br />
EV M-5 II<br />
MAGNET DEFLECTION<br />
primary beam positioning by permanent magnet � �<br />
270° beam deflection � �<br />
high frequency beam deflection (150 Hz) – �<br />
non-interchangeable plug-in connector – �<br />
minimized beam spot distortion – �<br />
WATER COOLING<br />
cooling for hearth and magnet housing � �<br />
no dynamic water-vacuum sealing – �<br />
HEARTH ROTATION<br />
built-in motor drive with optical positioning – �<br />
GERMANY<br />
<strong>Ferrotec</strong> GmbH<br />
Hohes Gestade 14<br />
D-72622 Nürtingen<br />
Phone: +49 7022-92 70-0<br />
Fax: +49 7022-92 70-10<br />
Email: ebgun@ferrotec.com<br />
http://www.ferrotec.com<br />
UNITED KINGDOM<br />
<strong>Ferrotec</strong> (UK) Limited<br />
Unit 11A, Talisman Business Center<br />
GB-Bicester, Oxon OX26 6H2<br />
Phone: +44 1869-363 200<br />
Fax: +44 1869-363 201<br />
USA<br />
<strong>Ferrotec</strong> (USA) Corporation<br />
40 Simon Street<br />
USA-Nashua, NH 03061<br />
Phone: +1 603 883 9800<br />
Fax: +1 603 883 2308<br />
103<br />
194 39<br />
106<br />
32mm<br />
28<br />
base plate<br />
103,4 151,5<br />
Your nearest representative:<br />
136<br />
EV M-5 II 11/00; subject to change without prior notice
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