Taguchi Gas Sensors (TGS)
Taguchi Gas Sensors (TGS)
Taguchi Gas Sensors (TGS)
You also want an ePaper? Increase the reach of your titles
YUMPU automatically turns print PDFs into web optimized ePapers that Google loves.
Palladium-Based Hydrogen <strong>Sensors</strong><br />
Pd-Gate MOS (Lundström, 1975):<br />
-Palladium gate and thin tin oxide (about 10nm)<br />
Hydrogen atoms diffuse to the Pd/Oxide interface<br />
and act like a dipoles, thus modifiying the Pd workfunction.<br />
[H 2 ] modifies the threshold voltage.<br />
Q<br />
4qN<br />
ss<br />
Aε<br />
0ε<br />
sψ<br />
B<br />
V = ϕ − + 2 ψ +<br />
TH<br />
ms<br />
C<br />
ox<br />
B<br />
C<br />
Basic Measurement Circuit:<br />
ox<br />
I<br />
d<br />
C<br />
W<br />
Vg = V<br />
ox<br />
2<br />
= µ d<br />
( Vgs<br />
−VT<br />
)<br />
L<br />
<br />
TH<br />
µ CoxW<br />
+<br />
I<br />
L<br />
Measured Voltage Shift:<br />
∆V<br />
g<br />
=<br />
∆V<br />
MAX<br />
1+<br />
C<br />
C<br />
PH<br />
PH<br />
2<br />
2<br />
/<br />
/ PO<br />
PO<br />
2<br />
2
Change language