Taguchi Gas Sensors (TGS)

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ISFET (Ion-Sensitive FET)

Adsorbed Species modify the effective Gate-Voltage.

ISFET pH sensors can reach sensitivities of 0.001pH

unit.

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ISFET (Ion-Sensitive FET) Adsorbed Species modify the effective Gate-Voltage. ISFET pH sensors can reach sensitivities of 0.001pH unit.

Selective ISFETS Ion-selective membranes can be added above the gate to filter specific ions. The membrane can include biological molecules (e.g. enzymes) to detect biological compounds ”BioSensors”

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Page 5: Pd-MOS Response Curves This kind of

Taguchi Gas Sensors (TGS)

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