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Applied Materials iSYS<br />
Reduces Energy and Utilities Consumption in the Subfab<br />
Monitors tool status to<br />
differentiate process,<br />
clean and idle stages<br />
Adjusts abatement &<br />
pump utilities usage<br />
based on tool status<br />
Provides Energy and Cost Saving<br />
18<br />
APPLIED MATERIALS- EXTERNAL USE