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Applied Materials iSYS<br />

Reduces Energy and Utilities Consumption in the Subfab<br />

Monitors tool status to<br />

differentiate process,<br />

clean and idle stages<br />

Adjusts abatement &<br />

pump utilities usage<br />

based on tool status<br />

Provides Energy and Cost Saving<br />

18<br />

APPLIED MATERIALS- EXTERNAL USE

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