15.11.2012 Views

Inosolv 400 Fotopur - BASF.com

Inosolv 400 Fotopur - BASF.com

Inosolv 400 Fotopur - BASF.com

SHOW MORE
SHOW LESS

Create successful ePaper yourself

Turn your PDF publications into a flip-book with our unique Google optimized e-Paper software.

System Boundaries:<br />

Products A&B<br />

Water<br />

Remover<br />

<strong>com</strong>position<br />

Production<br />

Wafer with<br />

post plasma<br />

etch residues<br />

Iso-Propanol<br />

Electricity<br />

Sodium hydroxide<br />

Use<br />

Cleaning<br />

Solvent<br />

Cleaning Step 1<br />

Cleaning Step 2<br />

Remove of solvent<br />

Washing<br />

Drying<br />

Recycling<br />

Used Cleaning<br />

solvent reservoir<br />

Filtration<br />

Air emissions<br />

Water emissions<br />

Incineration/<br />

Wastes<br />

Dr. P. Saling, GUP/CE, Electronic Chemicals, Systems-CR, 31/03/2006 10

Hooray! Your file is uploaded and ready to be published.

Saved successfully!

Ooh no, something went wrong!