Inosolv 400 Fotopur - BASF.com
Inosolv 400 Fotopur - BASF.com
Inosolv 400 Fotopur - BASF.com
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System Boundaries:<br />
Products A&B<br />
Water<br />
Remover<br />
<strong>com</strong>position<br />
Production<br />
Wafer with<br />
post plasma<br />
etch residues<br />
Iso-Propanol<br />
Electricity<br />
Sodium hydroxide<br />
Use<br />
Cleaning<br />
Solvent<br />
Cleaning Step 1<br />
Cleaning Step 2<br />
Remove of solvent<br />
Washing<br />
Drying<br />
Recycling<br />
Used Cleaning<br />
solvent reservoir<br />
Filtration<br />
Air emissions<br />
Water emissions<br />
Incineration/<br />
Wastes<br />
Dr. P. Saling, GUP/CE, Electronic Chemicals, Systems-CR, 31/03/2006 10