Inosolv 400 Fotopur - BASF.com
Inosolv 400 Fotopur - BASF.com
Inosolv 400 Fotopur - BASF.com
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Definition of Alternatives, Definition of the “User benefit”<br />
as reference to all following graphs where UB is mentioned<br />
as an abbreviation.<br />
User benefit<br />
Removal of post<br />
plasma etch<br />
residues of<br />
10.000 wafers in<br />
a batch process<br />
(8 inch<br />
equivalents) per<br />
month<br />
Alternative in focus<br />
• <strong>Inosolv</strong> <strong>400</strong><br />
<strong>Fotopur</strong>®<br />
Alternatives<br />
• Products A&B<br />
• Product C<br />
Dr. P. Saling, GUP/CE, Electronic Chemicals, Systems-CR, 31/03/2006<br />
8
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