A 90 nm Communication Technology Featuring SiGe HBT ...
A 90 nm Communication Technology Featuring SiGe HBT ...
A 90 nm Communication Technology Featuring SiGe HBT ...
Create successful ePaper yourself
Turn your PDF publications into a flip-book with our unique Google optimized e-Paper software.
Hi-Q Q Inductors and substrates<br />
PEAK Q<br />
30<br />
25<br />
20<br />
15<br />
10<br />
5<br />
0<br />
50 ohm-cm<br />
w/o parasitic<br />
control<br />
P+epi<br />
w/o parasitic<br />
control<br />
50 ohm-cm<br />
with parasitic<br />
control<br />
P+ epi<br />
with parasitic<br />
control<br />
0.1 1 10 100<br />
FREQUENCY (GHz)<br />
IEDM 2002 34