LVPZT Amplifier Module - PI

Motion Controllers, Drivers and Power Amplifiers 

for Piezoelectric NanoPositioning Systems 

PI offers the largest selection of digital and 

analog motion controllers and 

power amplifiers for piezo 

actuators worldwide. 

Electronics play a key role for maximum 

performance of piezoelectic 

NanoAutomation ® systems (such 

as PZT translators) and PZTdriven 

NanoPositioning systems 

(such as Flexure NanoPositioners 

or PZT tip/tilt platforms). 

Ultra-low-noise, high-stability servo-controllers 

and amplifiers are essential 

because even micro-volt changes 

of the control voltage are 

transformed into motion. 

For applications, where maximum throughput 

is crucial, PI's digital feedforward 

techniques and highspeed 

interfaces speed up manufacturing 

processes. 

For dynamic high-power applications, our 

energy-recovery power amplifiers 

provide up to 2000 W of 

peak power. 

Quality control at GSG (PI subsidiary specializing 

in piezo control electronics, power amplifiers and 

motion control). 

Variety of digital and analog motion controllers and power amplifiers 

for piezoelectric positioning systems. 

Why can PI Provide Superior Piezo 

Controller Solutions? 

� More than 30 years experience designing piezoelectric 

positioning systems and control electronics 

� In-house PZT electronics design & manufacture ensure 

consistency and reliable quality 

� Largest variety of controllers (digital, analog, high-speed, 

high-power, OEM...) 

� State-of-the-art metrology lab: thermal, acoustic, seismic 

isolation for repeatable sub-nanometer measurements 

� State-of-the-art equipment for simulation, manufacturing 

and testing 

� Highly motivated team of engineers and physicists 

� In-house capacitive position sensor design & manufacture 

� Patented vibration-killing feedforward techniques for 

maximum throughput 

Patented InputShaping TM feedforward algorithm eliminates 

resonance-driven vibration of parts on and around the 

NanoPositioning system (top: off, bottom: on). 

This PI exclusive algorithm is an option on several of our 

digital controllers. It significantly increases throughput in 

automation processes, where every millisecond counts. 

6-1

6-2 

PZT Motion Controller Experience 

PI PZT Control Electronics Solutions 

� Custom designs 

� Single- and multi-channel, standard & OEM PZT controllers 

for low- & high-voltage PZTs 

� Digital & analog servo-control circuits, compatible 

with capacitive, LVDT & strain gauge position feedback 

sensors 

� Modular PZT controllers with high-speed parallel 

command interface, optionally opto-isolated for 

enhanced EMI Immunity 

� Ultra-fast fiber optic interfaces 

� Modular rackmount controllers with analog and digital 

interfaces 

� Unique multi-axis addressing capabilities for up to 

32 axes 

� Multi-channel, 32-bit digital controllers with highly 

responsive FiberLink, RS-232 & IEEE-488 interfaces 

� Advanced feedforward techniques for throughput 

enhancement 

� Patented vibration-cancelling InputShaping TM 

algorithm for highest throughput 

� 100 V and 1000 V PZT power amplifiers 

� Ultra-high-output power amplifiers featuring energy 

recovery techniques and 2000 W peak power 

Design phase of a new piezo controller. 

http://www.pi.ws 

info@pi.ws 

Group of Digital Controllers featuring the ultra-fast optical 

FiberLink interface and PI‘s exclusive Mach TM vibrationcancelling 

feedforward algorithm. (licensed by Convolve, 

Inc., www.convolve.com). 

Simulation tools help predict the performance of a new 

servo-control circuit even before the first prototype has 

been built. 

Group of standard and custom multi-axis digital 

NanoAutomation ® controllers with different 

interface options.

PZT Motion Controller Experience (cont.) 

Custom 6-channel NanoAutomation ® controller with 

ultra-fast digital parallel-port interface. 

Typical Applications of PI Piezo Controllers 

NanoCapture software for Digital Piezo Controllers features Bode 

plotting function to obtain a precise analysis of the 

NanoMechanisms connected to the controller. 

Digital NanoAutomation ® controller with ultra-fast 

fiber-optical interface 

PZT Actuators 

Custom DSP-based 7-channel capacitive-sensor controller with 

fiber-optic interface for communication with servo-controller. 

PZT Flexure NanoPositioners 

PZT Active Optics / Steering Mirrors 

Tutorial: Piezoelectrics... 

Capacitive Position Sensors 

PZT Control Electronics 

MicroPositioners / Hexapod Systems 

Photonics Alignment & Packaging Systems 

Motor Controllers 

Index 

� Mass storage (optical disk) mastering 

� Beam switching, alignment, steering 

� Photonics alignment & packaging 

� Interferometry (Fabry-Perot filters) 

� Vibration cancellation 

� Image stabilization 

� Image resolution enhancement 

� Laser beam steering and tracking 

� Adaptive optics 

� Scanning microscopy 

� Auto-focus systems 

� Nano-metrology 

� Wafer and mask positioning/alignment 

� Microlithography 

� Critical-dimension measurement 

� Fast tool servos 

� Out-of-roundness finishing 

� Smart structures / structural deformation 


info@pi.ws 

6-3

6-4 

Qualifying a new NanoAutomation ® controller. 

Three-axis NanoCube TM piezo NanoAutomation ® stage and controller 

card with integrated optic metrology and automatic alignment 

functions. (for photonics alignment applications) 

Ultra-high-output power amplifier featuring energy recovery 

techniques and 2000 W peak power. 


info@pi.ws 

Custom PCI-based digital PZT controller with 

high-speed fiber-optic interface and steering 

mirror unit. 

Block diagram showing the principle of the energy recovery concept. 

Custom controller with several compact NanoPositioning stages.

PZT Electronics: Motion Controllers and Amplifiers 

Contents 

Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1 

Motion Controllers and Amplifiers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1 

Control Electronics Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-2 

Why can PI provide superior control electronics solutions? . . . . . . . . . . . . . . . . . . . . . . . . . 6-3 

Table of Contents . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-5 

Selection Guide . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-6 

E-710 High-Speed Digital NanoAutomation PZT Controllers . . . . . . . . . . . . . . . . . . . . . . . 6-8 

NanoCapture Software for E-710 Digital PZT Controllers . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-9 

E-612, E-661 High-Speed NanoAutomation ® Controllers . . . . . . . . . . . . . . . . . . . . . . . . . . 6-10 

E-750 High-Speed Digital PZT Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-12 

E-760 LVPZT Amplifier/Controller Card with Automatic Alignment Functions . . . . . . . . 6-14 

E-664 LVPZT Amplifier & Position Servo-Controller, 3 Channels . . . . . . . . . . . . . . . . . . . 6-15 

E-665 LVPZT Amplifier & Position Servo-Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-16 

E-610 LVPZT Amplifier & Position Servo-Controller Modules, OEM Version . . . . . . . . . . 6-18 

E-500, E-501 Modular PZT Control Systems (HVPZT & LVPZT) . . . . . . . . . . . . . . . . . . . . .6-20 

E-500, E-501 System Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-21 

E-500, E-501 Module Survey & Ordering Examples . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-22 

E-470, E-471, E-472, E-420 High-Power Modular HVPZT Amplifiers/Controllers . . . . . . . 6-24 

E-480 High-Power HVPZT Amplifier/Controller With Energy Recovery . . . . . . . . . . . . . . 6-26 

E-463 HVPZT Amplifier, 3 Channels . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-28 

E-663 LVPZT Amplifier, 3 Channels . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-29 

E-461 HVPZT Amplifier, Standard and OEM Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-30 

E-660 LVPZT Amplifier, Standard and OEM Version . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-31 

E-650 LVPZT Amplifier for Multilayer Bender Actuators, Standard and OEM Version . . 6-32 

E-503 LVPZT Amplifier Module, 3 Channels . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-33 

E-505 LVPZT Amplifier Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-34 

E-507 and E-507.OE HVPZT Amplifier Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-35 

E-509 Sensor & Position Servo-Control Modules for PZTs . . . . . . . . . . . . . . . . . . . . . . . . 6-36 

E-516 Computer Interface & Display Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-37 

E-515 Display Modules . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-38 

E-530 Power Supply for E-500 Systems . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-39 


Typical PI PZT Amplifier & Position Servo-Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-40 

Power Requirements for PZT Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-40 

Position Servo-Controller Calibration Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-41 

Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-42 

E-115 LVDT Position Sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-42 

Cables, Connectors & Adapter for LVPZT Translators . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-43 

Cables, Connectors & Adapter for HVPZT Translators . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-44 

Sensor Extension Cables . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-45 

Recommended Amplifier/Controller Reference List . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-46 

Additional products see page 6-47 ff 


6-5

PZT Electronics Selection Guide 

Models Function Output Peak Output Channels Display Optional Installable Case Page 

Voltage Power (Channels x Computer Modules /(Height/Width 

[V] [W] Digits) Interface Notes Units) 

E-501.10 NanoAutomation ® n/a n/a 1 to 4 n/a see E-612.C0 E-612.C0 9.5” Bench-top 6-10 

Controller Chassis 3H/42T 

E-612.C0 LVPZT High-Speed -20 to 120 8 1 n/a Integrated n/a Euro-board 6-10 

NanoAutomation ® high-speed parallel 

Controller Board port, opto-isolated 

E-661.CP LVPZT High-Speed -20 to 120 8 1 n/a Integrated high-speed n/a Bench-top 6-10 

NanoAutomation parallel port, opto-isolated 

Controller 

E-710 LVPZT Digital -20 to 120 25 3, 4, 6 n/a Integrated RS-232 n/a 19” Rackmount, 6-8 

Piezo Controller and IEEE 488 2H/84T 

E-750.CP LVPZT Digital -20 to 120 10 1 n/a Integrated RS-232, n/a Bench-top 6-12 

Piezo Controller Optional Fiber Link, 

and Parallel Port 

E-610.00 LVPZT Amplifier -20 to 120 14 1 n/a RS-232 n/a Euro-board 6-18 

Module, OEM 

E-610.S0 LVPZT Amplifier/ -20 to 120 14 1 n/a RS-232 n/a Euro-board 6-18 

E-610.L0 Position Controller 

E-610.C0 Module, OEM 

E-662.xx LVPZT Amplifier/ -20 to 120 36 1 2x3 1 / 2 , RS-232 n/a Bench-top 2H/ 6-16 

Position Controller LED 42T 

E-664.00 NanoCube Controller -20 to 120 3 x 14 3 3x3 1 / 2 , LED Integrated servo- n/a Bench-top 2H/42T 6-15 

controller designed for 

NanoCube systems 

E-760 NanoCube -20 to 120 3 x 9 3 PC bus (ISA) Integrated servo-. n/a PC board 6-14 

Controller Card controller designed for 


E-463.00 HVPZT Amplifier 0 to -1500 3 x 5 3 3x3 1 / 2 , LED n/a n/a Bench-top 2H/42T 6-28 

E-663.00 LVPZT Amplifier -20 to 120 3 x 14 3 3x3 1 / 2 , LED n/a n/a Bench-top 2H/42T 6-29 

E-500.00 Chassis for PZT Amplifier/ n/a n/a 1, 2, 3 Optional IEEE 488 & E-503, E-505, 19” Rackmount 6-20 

Position Servo-Controller E-515, RS-232 E-507, E-509, 3H/84T 

E-516 E-515, E-516 

E-501.00 Chassis for PZT Amplifier/ n/a n/a 1, 3 Optional IEEE 488 E-503, E-505, 9.5” Bench-top 6-20 

Position Servo-Controller E-515, & RS-232 E-507, E-509, 3H/42T 

E-516 E-515, E-516 

E-420.00 HVPZT Amplifier Module -3 to -1100 500 1 n/a n/a n/a 9.5” Module 6-24 

& bipolar 

E-470.00 HVPZT Amplifier -3 to -1100 500 1 n/a n/a n/a 9.5” Bench-top 6-24 

& bipolar 3H/42T 

6-6 



info@pi.ws




E-472.00 HVPZT -3 to -1100 500 2 n/a n/a n/a 19” Rackmount 6-24 

Amplifier & bipolar 3H/84T 

E-471.00 HVPZT -3 to -1100 500 1 Optional IEEE 488 E-509, E-515, 19” Rackmount 6-24 

Amplifier & bipolar E-515, E-516 & RS-232 E-516 3H/84T 

E-480.00 HVPZT 0 to -1000 2000 1 Optional IEEE 488 E-509, E-515, 19” Rackmount 6-26 

High-Power & bipolar E-515, E-516 & RS-232 E-516 3H/84T 

Amplifier 

E-503.00 LVPZT -20 to 120 3 x 14 3 n/a n/a n/a 19” Module, 6-33 

Amplifier Module 14T 

E-505.00 LVPZT -20 to 120 200 1 n/a n/a n/a 19” Module, 6-34 


E-507.00 HVPZT -3 to -1100 50 1 n/a n/a n/a 19” Module, 6-35 

Amplifier Module & bipolar 14T 

E-509.xx Position Servo- n/a n/a 1, 2, 3 n/a n/a n/a 19” Module, 6-36 

Controller/ 7T 

Sensor Module 

E-516.i3 D/A Converter / n/a n/a 3 4 1 / 2 , LCD Standard n/a 19” Module, 6-37 

Display / IEEE & IEEE 488 21T 

RS-232 Interface Module & RS-232 

E-515.0x Display Module n/a n/a 1, 3 1 & 3 x 3 1 / 2 LED n/a n/a 19” Module, 21T 6-38 

E-461.00 HVPZT Amplifier -10 to -1000 0.5 1 n/a n/a n/a Bench-top / 6-30 

E-461.OE HVPZT Amplifier, PCB module 

OEM Module 

E-660.00 LVPZT Amplifier 5 to 100 2 1 n/a n/a n/a Bench-top / 6-31 

E-660.OE LVPZT Amplifier, PCB module 


E-650.00 LVPZT Amplifier 0 to 60 18 1 3 1 / 2 , LCD n/a n/a Bench-top / 6-32 

E-650.OE LVPZT Amplifier, 8 n/a PCB module 


E-530.00 Power Supply n/a n/a n/a n/a n/a n/a Module 6-39 

E-531.00 Module 

n/a: not applicable 

Bench-Top & Rackmount Controller Dimensions 

Chassis W H D Units 

2H/42T 235 103 288 mm 

3H/42T 235 158 288 mm 

3H/84T 450 158 288 mm 

2H/84T 450 105 290 mm 

H: Height Units T: Width Units 

Dimensional drawing for bench-top and 

rackmount controllers 

6-7

PZT Electronics: Motion Controllers and Amplifiers 

Contents 

Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1 

Motion Controllers and Amplifiers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1 

Control Electronics Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-2 

Why can PI provide superior control electronics solutions? . . . . . . . . . . . . . . . . . . . . . . . . . 6-3 

Table of Contents . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-5 

Selection Guide . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-6 

E-710 High-Speed Digital NanoAutomation PZT Controllers . . . . . . . . . . . . . . . . . . . . . . . 6-8 

NanoCapture Software for E-710 Digital PZT Controllers . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-9 

E-612, E-661 High-Speed NanoAutomation ® Controllers . . . . . . . . . . . . . . . . . . . . . . . . . . 6-10 

E-750 High-Speed Digital PZT Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-12 

E-760 LVPZT Amplifier/Controller Card with Automatic Alignment Functions . . . . . . . . 6-14 

E-664 LVPZT Amplifier & Position Servo-Controller, 3 Channels . . . . . . . . . . . . . . . . . . . 6-15 

E-662 LVPZT Amplifier & Position Servo-Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-16 

E-610 LVPZT Amplifier & Position Servo-Controller Modules, OEM Version . . . . . . . . . . 6-18 

E-500, E-501 Modular PZT Control Systems (HVPZT & LVPZT) . . . . . . . . . . . . . . . . . . . . .6-20 

E-500, E-501 System Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-21 

E-500, E-501 Module Survey & Ordering Examples . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-22 

E-470, E-471, E-472, E-420 High-Power Modular HVPZT Amplifiers/Controllers . . . . . . . 6-24 

E-480 High-Power HVPZT Amplifier/Controller With Energy Recovery . . . . . . . . . . . . . . 6-26 

E-463 HVPZT Amplifier, 3 Channels . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-28 

E-663 LVPZT Amplifier, 3 Channels . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-29 

E-461 HVPZT Amplifier, Standard and OEM Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-30 

E-660 LVPZT Amplifier, Standard and OEM Version . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-31 

E-650 LVPZT Amplifier for Multilayer Bender Actuators, Standard and OEM Version . . 6-32 

E-503 LVPZT Amplifier Module, 3 Channels . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-33 

E-505 LVPZT Amplifier Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-34 

E-507 and E-507.OE HVPZT Amplifier Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-35 

E-509 Sensor & Position Servo-Control Modules for PZTs . . . . . . . . . . . . . . . . . . . . . . . . 6-36 

E-516 Computer Interface & Display Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-37 

E-515 Display Modules . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-38 



Typical PI PZT Amplifier & Position Servo-Controller . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-40 

Power Requirements for PZT Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-40 

Position Servo-Controller Calibration Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-41 

Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-42 

E-115 LVDT Position Sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-42 

Cables, Connectors & Adapter for LVPZT Translators . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-43 

Cables, Connectors & Adapter for HVPZT Translators . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-44 

Sensor Extension Cables . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-45 

Recommended Amplifier/Controller Reference List . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-46 

6-5

PZT Electronics Selection Guide 




E-501.10 NanoAutomation ® n/a n/a 1 to 4 n/a see E-612.C0 E-612.C0 9.5” Bench-top 6-10 

Controller Chassis 3H/42T 

E-612.C0 LVPZT High-Speed -20 to 120 8 1 n/a Integrated n/a Euro-board 6-10 

NanoAutomation ® high-speed parallel 

Controller Board port, opto-isolated 

E-661.CP LVPZT High-Speed -20 to 120 8 1 n/a Integrated high-speed n/a Bench-top 6-10 

NanoAutomation parallel port, opto-isolated 

Controller 

E-710 LVPZT Digital -20 to 120 25 3, 4, 6 n/a Integrated RS-232 n/a 19” Rackmount, 6-8 

Piezo Controller and IEEE 488 2H/84T 

E-750.CP LVPZT Digital -20 to 120 10 1 n/a Integrated RS-232, n/a Bench-top 6-12 

Piezo Controller Optional Fiber Link, 

and Parallel Port 

E-610.00 LVPZT Amplifier -20 to 120 14 1 n/a RS-232 n/a Euro-board 6-18 

Module, OEM 

E-610.S0 LVPZT Amplifier/ -20 to 120 14 1 n/a RS-232 n/a Euro-board 6-18 

E-610.L0 Position Controller 

E-610.C0 Module, OEM 

E-662.xx LVPZT Amplifier/ -20 to 120 36 1 2x3 1 / 2 , RS-232 n/a Bench-top 2H/ 6-16 

Position Controller LED 42T 

E-664.00 NanoCube Controller -20 to 120 3 x 14 3 3x3 1 / 2 , LED Integrated servo- n/a Bench-top 2H/42T 6-15 

controller designed for 


E-760 NanoCube -20 to 120 3 x 9 3 PC bus (ISA) Integrated servo-. n/a PC board 6-14 

Controller Card controller designed for 


E-463.00 HVPZT Amplifier 0 to -1500 3 x 5 3 3x3 1 / 2 , LED n/a n/a Bench-top 2H/42T 6-28 

E-663.00 LVPZT Amplifier -20 to 120 3 x 14 3 3x3 1 / 2 , LED n/a n/a Bench-top 2H/42T 6-29 

E-500.00 Chassis for PZT Amplifier/ n/a n/a 1, 2, 3 Optional IEEE 488 & E-503, E-505, 19” Rackmount 6-20 

Position Servo-Controller E-515, RS-232 E-507, E-509, 3H/84T 

E-516 E-515, E-516 

E-501.00 Chassis for PZT Amplifier/ n/a n/a 1, 3 Optional IEEE 488 E-503, E-505, 9.5” Bench-top 6-20 

Position Servo-Controller E-515, & RS-232 E-507, E-509, 3H/42T 

E-516 E-515, E-516 

E-420.00 HVPZT Amplifier Module -3 to -1100 500 1 n/a n/a n/a 9.5” Module 6-24 

& bipolar 

E-470.00 HVPZT Amplifier -3 to -1100 500 1 n/a n/a n/a 9.5” Bench-top 6-24 

& bipolar 3H/42T 

6-6 


info@pi.ws




E-472.00 HVPZT -3 to -1100 500 2 n/a n/a n/a 19” Rackmount 6-24 

Amplifier & bipolar 3H/84T 

E-471.00 HVPZT -3 to -1100 500 1 Optional IEEE 488 E-509, E-515, 19” Rackmount 6-24 

Amplifier & bipolar E-515, E-516 & RS-232 E-516 3H/84T 

E-480.00 HVPZT 0 to -1000 2000 1 Optional IEEE 488 E-509, E-515, 19” Rackmount 6-26 

High-Power & bipolar E-515, E-516 & RS-232 E-516 3H/84T 


E-503.00 LVPZT -20 to 120 3 x 14 3 n/a n/a n/a 19” Module, 6-33 


E-505.00 LVPZT -20 to 120 200 1 n/a n/a n/a 19” Module, 6-34 


E-507.00 HVPZT -3 to -1100 50 1 n/a n/a n/a 19” Module, 6-35 

Amplifier Module & bipolar 14T 

E-509.xx Position Servo- n/a n/a 1, 2, 3 n/a n/a n/a 19” Module, 6-36 

Controller/ 7T 

Sensor Module 

E-516.i3 D/A Converter / n/a n/a 3 4 1 / 2 , LCD Standard n/a 19” Module, 6-37 

Display / IEEE & IEEE 488 21T 

RS-232 Interface Module & RS-232 

E-515.0x Display Module n/a n/a 1, 3 1 & 3 x 3 1 / 2 LED n/a n/a 19” Module, 21T 6-38 

E-461.00 HVPZT Amplifier -10 to -1000 0.5 1 n/a n/a n/a Bench-top / 6-30 

E-461.OE HVPZT Amplifier, PCB module 


E-660.00 LVPZT Amplifier 5 to 100 2 1 n/a n/a n/a Bench-top / 6-31 

E-660.OE LVPZT Amplifier, PCB module 


E-650.00 LVPZT Amplifier 0 to 60 18 1 3 1 / 2 , LCD n/a n/a Bench-top / 6-32 

E-650.OE LVPZT Amplifier, 8 n/a PCB module 


E-530.00 Power Supply n/a n/a n/a n/a n/a n/a Module 6-39 

E-531.00 Module 

n/a: not applicable 

Bench-Top & Rackmount Controller Dimensions 

Chassis W H D Units 

2H/42T 235 103 288 mm 

3H/42T 235 158 288 mm 

3H/84T 450 158 288 mm 

2H/84T 450 105 290 mm 

H: Height Units T: Width Units 

Dimensional drawing for bench-top and 

rackmount controllers 

6-7

Ordering 

Information 

6-8 

E-710 

E-710.3CD 

Digital Piezo Controller, 3 Axes, 

Sub-D-Special Connector, RS-232 & 

IEEE-488 Interface 

E-710.4CL 

Digital Piezo Controller, 4 Axes, Lemo 

Connectors, RS-232 & IEEE 488 Interface 

E-710.4CD 

Digital Piezo Controller, 4 Axes, Sub-D 

Connector, RS-232 & IEEE 488 Interface 

E-710.P3D 

Digital Piezo Controller, 3 + 1 Axes, 

Sub-D-Connectors, RS-232, IEEE-488 

& High-Speed PIO Interface 

E-710.P4L 


LEMO Connectors, RS-232, IEEE 488 


E-710.P4D 


Sub-D Connectors, RS-232, IEEE 488 


E-710.6CD 


Sub-D-Special Connectors RS-232 

& IEEE 488 Interface 

Options 

E-710.SCN 

Dynamic Digital Linearization 

Upgrade 

E-710.3x3 

Extension Cable Piezo NanoPositioning 

Stage / E-710.3CD Controller, 3 m 

E-710.3x5 

Extension Cable Piezo NanoPositioning 

Stage / E-710.3CD Controller, 5 m 

E-710.1x3 

Extension Cable 3m, E-750 / E-710 

to Piezo Flexure Stage, 1 Channel Sub-D 

High-Speed Digital NanoAutomation ® 

Piezo Controllers 

E-710.6CD 6-axis digital piezo controller 

shown with custom Super Invar 6-DOF 

piezo flexure NanoPositioning stage. 

� For Piezo NanoPositioners 

with Capacitive Feedback 

Sensors 

� 3-, 4- & 6-Channel Versions 

� 32-Bit Digital Filters 

� Polynomial Linearization 

� Coordinate Transformation 

for Parallel Kinematics / 

Parallel Metrology Systems 

� Optional Dynamic Digital 

Linearization (Firmware 

Option) Improves 

Scanning Linearity 

� AutoCalibrate Function 

for Easy Controller / 

Stage Interchangeability 

� Fast RS-232 and IEEE 488 

Interfaces 

� Optional High-Speed 

Parallel Port Interface 

� Extensive Software 

Support 

E-710 digital piezo controllers/ 

drivers are the most advanced 

and flexible controllers for 

piezo nanopositioning and 

scanning stages on the market. 

Based on powerful 32-bit 

DSPs (digital signal processor) 

they control up to six-degrees 

of freedom with integrated 

power amplifiers for multilayer 

PZT drives (-20 to 110 V) and 


info@pi.ws 

signal conditioning electronics 

for two-plate capacitive position 

sensors. E-710 controllers 

represent a major advance 

over conventional multi-axis 

controllers because the sensor 

and output channels of two or 

more axes can participate in an 

internal coordinate transformation 

for multi-axis parallel-kinematics 

positioning systems with 

parallel-motion metrology, e.g. 

the P-500 series on page 2-32. 

Parallel Motion Metrology 

“Sees” all Controlled 

Degrees of Freedom 

Simultaneously 

Parallel-kinematics nanopositioning 

systems with parallelmetrology 

position feedback 

are superior to stacked or nested 

multi-axis positioning systems. 

They allow active trajectory 

control, automatic crosstalk 

and runout compensation 

and provide direct, non-contacting 

position information, 

measuring motion exactly 

where it matters (rather than 

measuring the strain in the 

drive system, a technique 

common in lower-precision 

positioning systems relying on 

the feedback of piezo resistive 

sensors). 

Integrated Linearization 

Systems 

E-710-controlled nanopositioning 

systems boast outstanding 

linearity, achieved by PI’s proprietary 

ILS (Integrated Linearization 

System) and additional 

digital polynomial linearization. 

The ILS, part of the E-710’s 

capacitive position sensor signal 

conditioning circuitry, compensates 

for influences caused 

by non-parallelism of the sensor 

plates. The digital polynomial 

linearization is calibrated 

for each individual nanopositioning 

system and can 

improve linearity to 0.001% 

over the full travel range. 

Custom Designs 

for Volume Buyers E-710 data acquisition and analysis functions (Bode plots, etc.) help optimize 

performance of NanoPositioning systems.

System Analysis—Advanced 

Software Tools 

The E-710 comes with the 

NanoCapture software featuring 

advanced functions for 

measuring-system response, 

step-and-settle and Bode plots. 

All positioning commands use 

standard units such as micrometers 

or microradians, for easy 

programming. In addition, all 

control parameters are nonvolatile, 

user-accessible and 

can be easily modified and 

optimized. Fully programmable 

low-pass & notch filters round 

out the E-710. 

Integrated Wave 

Generator & Look-up Table 

The implementation of a wave 

generator for all E-710 models 

allows the synchronous driving 

of several axes with a mathematical 

function or with a userdefined 

random signal stored 

in a lookup table containing 

65,535 points. Programmable 

trigger inputs and outputs facilitate 

synchronization with 

external events. 

Communication / Interfaces 

E-710 controllers are equipped 

with fast RS-232 and IEEE 488 

interfaces. The optional parallel 

port I/O (PIO) interface allows 

the fastest possible position 

setting/reading (20,000 positions 

per second bypassing the 

command parser). 


Improves Scanning 

Linearity up to 3 Orders of 

Magnitude 

Control theory predicts that 

conventional PID (proportional 

Extensive 

Software Support 

The E-710 controller comes with a 

variety of software tools as well as 

LabView TM drivers and DLL’s for easy 

setup, system analysis and integration. 


integral derivative) servo motion 

controllers exhibit phase 

lag and tracking errors in 

dynamic operation (due to the 

fact that a PID controller needs 

to see an error first before a 

reaction occurs, and also due 

to the nonlinear nature of PZT 

material). Depending on the 

controller settings and specs 

of the nanopositioning system 

driven, tracking errors (the difference 

between the commanded 

position and actual 

position) can reach double-digit 

percentage values even at 

Triangular scanning signal at 312 Hz. There is a significant 

difference (2.6 µm max.) between target and real position with 

the conventional PID motion controller. 

Elliptical scan in a laser micro-drilling application with XY 

piezo scanning stage, conventional controller, 60 msec/rev. 

The outer curve ellipse describes the target position, the inner 

ellipse shows the actual motion at the stage. 

moderate scanning rates. 

Consequently, scanning stages 

often cannot be driven at the 

desired rates, or the acquired 

data has poor linearity. 

The new E-710.SCN Dynamic 

Digital Linearization upgrade 

(standard for the E-710.6CD 

6-axis controller, optional for 

the 3- and 4-channel versions) 

solves this problem. This PIexclusive 

technology is a 

breakthrough for scanning 

applications, reducing phase 

lag and nonlinearity to indiscernible 

levels, even with high- 

PZT Actuators 









Index 


info@pi.ws 

frequency dynamic actuation 

under load. The effect is an 

improvement in linearity (and 

usable bandwidth) of up to 

three orders of magnitude, 

resulting in significantly increased 

throughput. Dynamic 

Digital Linearization works 

both in single-axis and multiaxis 

applications (see graphs). 

Triangular scanning signal at 312 Hz, with the E-710 with dynamic 

digital linearization. The difference between the target positon 

and the actual motion is indiscernible. The maximum error is 

only 7 nanometers. 

Same scan as before, with dynamic digital linearization. 

Target and actual data can hardly be discerned. 

6-9a

6-9b 

NanoCapture TM Software for E-710 Digital Piezo Controllers 

� Allows Optimization 

of all Servo Parameters 

� Measures System Response, 

Step and Settle, 

Resonant Frequency, 

Bode Plots 

� Increases Throughput 

� Wave Generator: Defines 

and Simulates Waveforms 

and Reports Wave 

Generation Results 

The NanoCapture software 

provided with the E-710 digital 

piezo controller is a versatile tool 

for system response analysis 

and optimization and for the 

definition and generation of 

waveforms. 

Advanced Analysis Tools 

In addition to standard functions 

for the operation of piezo 

NanoPositioning systems, 

NanoCaptureTM features advanced 

measuring and analysis 

functions for resonant frequency, 

overshoot, step-andsettle, 

Bode plots, etc. These 

features are specifically useful 

when the mechanical properties 

of a factory-calibrated system 

are changed at the operating 

site by parameters such as 

an increased or reduced payload, 

a different orientation or 

different damping conditions. 

In this case, parameters such 

as servo-gain, notch-filter frequency, 

or the position sensor’s 

zero point, etc. need to 

be adjusted to maintain optimum 

system response and 

stability. NanoCaptureTM supports 

the operator in determining 

system resonant frequency, 

rise time, and settling 

time by analyzing the dynamic 

position feedback data from 

the NanoPositioning system’s 

integrated capacitance sensors 

(no other metrology or measur- 

ing instruments are required!). 

Based on this data, servo 

parameters are easily adjusted 

for optimized settling under 

any load condition. 

Wave Generator Handling 

In addition to its system analysis 

and optimization functionalities, 

the NanoCaptureTM software 

allows convenient handling 

of the wave generator 

feature of the E-710 controller: 

� Rapidly perform simple 

waveforms as well as 

circular trajectories with 

two axes 

� Design complex waveforms 

� Save defined wave segments 

to the controller 

The NanoCapture TM software 

also permits the user to see 

the effects of the E-710.SCN 


upgrade on the position accuracy 

of repetitive functions 

such as scans. 


info@pi.ws 

Step response of a (poorly damped), open-loop NanoPositioning system. Data acquisition 

with E-710 and NanoCapture TM software. 

Closed-loop response of a NanoPositioning system with optimized servo settings. 

Data acquisition with E-710 and NanoCapture TM software. 

E-710 internal wave generator. Data acquisition with E-710 and NanoCapture TM software.

Technical Data 

Model E-710.3CD E-710.4CD/E-710.4CL/E-710.P3D/ E-710.6CD 

E-710.P4D/E-710.P4L 

Function Digital NanoAutomation ® Digital NanoAutomation ® Digital NanoAutomation ® 

PZT controller and PZT controller and PZT controller and 

power amplifier power amplifier power amplifier 

Axes 3 4 6 

Sensor Capacitive sensors Capacitive sensors Capacitive sensors 

Processor DSP 32-bit floating point, 33 MHz DSP 32-bit floating point, 33 MHz 2 x DSP 32-bit floating point, 33 MHz 

Sampling interval 50 µs (sensor), 50 µs (sensor), 40 µs (sensor), 

200 µs (servo-loop, 4 axes) 200 µs (servo loop, 4 axes) 200 µs (servo-loop, 6 axes) 

Effective Resolution DAC 20-bit 20-bit 20-bit 

Maximum output power 25 W / channel 25 W / channel 25 W / channel 

Average output power 6 W / channel 6 W / channel 6 W / channel 

Peak output current < 20 ms 200 mA / channel 200 mA / channel 200 mA / channel 

Average output current > 20 ms 60 mA / channel 60 mA / channel 60 mA / channel 

Current limitation Short-circuit proof Short-circuit proof Short-circuit proof 

Output voltage -20 to +110 V -20 to +110 V -20 to +110 V 

PZT voltage output sockets 3-channel sub-D special 3-ch. + 1ch. sub-D, special LEMO ERN.00.250.CTL 

(models E-710.P3D only), 4x 1-ch. (E-710.xxL only) 

Sub-D, special (models E-710.4CD 

and E-710.P4D only) 

2x 3-channel sub-D special 

Sensor sockets 3-channel sub-D, special 3-ch. + 1 ch. sub-D, special 

(models E-710.P3D only), 4x 1-ch. 

Sub-D, special (models E-710.4CD 

and E-710.P4D only) 

LEMO PSA.00.250.CTAC22 

(models E-710.xxL only) 

2x 3-channel sub-D, special 

Interfaces RS-232 and IEEE 488 RS-232 and IEEE 488, RS-232 and IEEE 488, all models 

all models (for ASCII 

command structure) 

PIO (models E-710.Pxx only) 

(for ASCII command structure) 

Software PZT Control, NanoCapture, PZT Control, NanoCapture, PZT Control, NanoCapture, 

LabViewTM Drivers, DLLs LabViewTM Drivers, DLLs LabViewTM Drivers, DLLs 

Dimensions 450 x 105 x 390 mm 450 x 105 x 390 mm 450 x 105 x 390 mm 

Weight 7 kg 7 kg 7 kg 

Power consumption (max) 60 W 60 W 60 W 

Operating voltage 90-120 or 220-264 VAC, 50-60 Hz 90-120 or 220-264 VAC,50-60 Hz 90-120 or 220-264 VAC, 50-60 Hz 

Connectors of E-710.4CD and E-710.P4D. PIO interface and status LEDs present on 

the E-710.P4D version only. 

PZT Actuators 









Index 


info@pi.ws 

Connectors of E-710.4CL and E-710.P4L. PIO interface and status LEDs present on 

the E-710.P4L version only. 

Connectors of E-710.3CD and E-710.P3D. PIO interface, status LEDs and 4th-channel 

connector present on the E-710.P3D version only. 

6-9c

Ordering 

Information 

E-612.C0 

High-Speed NanoAutomation ® 

Controller, Parallel Port, OEM Board 

E-661.CP 

High-Speed NanoAutomation ® 

Controller, Parallel Port, Bench -Top 

E-501.10 

Bench-Top Chassis and Power Supply 

for 1 to 4 E-612.C0 Modules 


for Volume Buyers 

Notes 

Important Calibration Information: 

Please read details on page 6-41. 

E-661.CP high-speed bench-top 

NanoAutomation ® controller 

6-10 

E-612.C0 

E-661.CP 

High-Speed NanoAutomation ® Controllers 

E-501.10 chassis with four E-612.C0 modules 

� OEM Modules and 

Bench-Top Versions 

� Controls LVPZT 

NanoPositioners with 

Capacitive Sensors 

� Opto-Isolation for EMI 

Immunity 

� 10 µs Parallel Command 

Port 

� Integrated PZT Power 



info@pi.ws 

The E-612.C0 is a high-speed, 

parallel-command-port amplifier 

and position servo-controller 

module for closed-loop 

LVPZT NanoPositioners and 

Actuators with integrated 

capacitive displacement sensors. 

Standard versions come with a 

10 µs/command, 16-bit, electrically 

isolated input port for 

enhanced EMI immunity. 

An additional high-bandwidth 

0 to 10 V control input is available 

for analog control. 

The E-612.C0 controller module 

is also equipped with a PZT 

voltage amplifier, providing -20 

to 120 V with 80 mA sink and 

source capability. 

The E-661.CP module is the 

compact, bench-top, standalone 

version of the E-612.C0. 

It comes with a metal case for 

EMI protection and an external 

power supply. 

Technical Data (Chassis & Power Supply) 

Models E-501.10 

Function Chassis for 1 - 4, E-612.C0, high speed NanoAutomation ® 

controller modules 

Operating voltage 90-120 VAC, 50-60 Hz 

220-264 VAC, 50-60 Hz 

Power supply linear regulated power supply, integrated 

P/S Output voltages +130 V, 0.2 A; -27 V, 0.2 A 

+24 V, 1 A; ±15 V, 0.5 A 

+5V, 1 A 

Max. power consumption 50 W 

Primary fuse 0.63 A slow 

Dimensions W: 235, H: 158; D: 288

E-612 high-speed 

NanoAutomation ® controller board 

Technical Data (Controller) 

Models E-612.C0 E-661.CP 

Function high-speed NanoAutomation ® bench-top high-speed 

controller module NanoAutomation ® controller 

Channels 

Capacitive Sensor Circuit 

1 1 

Clock frequency 1.6 MHz 1.6 MHz 

Bandwidth 


1.5 kHz 1.5 kHz 

Output voltage range -20 to +120 V -20 to +120 V 

Output power 8 W 8 W 

Output current 80 mA (avg. & peak) 80 mA (avg. & peak) 

Current limitation Short-circuit proof (5 minutes, shut-down) Short-circuit proof (5 minutes, shut-down) 

Bandwidth (no load) 

Digital Circuit 

> 500 Hz > 500 Hz 

Data 16-bit 16-bit 

Input level TTL TTL 

Timing THmin 10 µs; TLmin 10 µs THmin 10 µs; TLmin 10 µs 

Input current 10 mA 10 mA 

On-target indication On: target position ± �0.025% On: target position ± �0.025% 

to 0.2%, jumper selectable to 0.2%, jumper selectable 

Analog Input / Output 

Control voltage range 0 to 10 V 0 to 10 V 

Input impedance 10 k�, 1 nF 10 k�, 1 nF 

Sensor Monitor Output 

Voltage range -10 to +10 V (jumper selectable) -10 to +10 V (jumper selectable) 

Output resistance 10 k� 10 k� 

Bandwidth 1.5 kHz 1.5 kHz 

Connectors 

Digital interface 25-pin-sub-D 25-pin-sub-D 

Piezo LEMO ERA.00.250 LEMO ERA.00.250 

Sensor LEMO EPL.00.250 LEMO EPL.00.250 

Sensor monitor SMB SMB 

PZT Actuators 









Analog input SMB SMB 

Power Requirements +5 V, 0.12 A 15 V, 2 A 

+/- 15 V, 0.16 A 

+130 V, 80 mA max. 

�27 V, 80 mA max 

(external power supply included) 

Dimensions Euroboard (64-pin rear connector. 

Mating extender card: Mod. P-896.00) 

125 x 50 x 262 mm 

Index 


info@pi.ws 

6-11

E-750.CP controller with 

P-752 NanoPositioning stage 

Application 

Examples 

� Head / media test 

� Track profiling 

� Scanning-probe microscopy 

� Micro-ablation and active optics. 

Ordering 

Information 

E-750.CP 

Digital NanoAutomation ® Controller 

E-751.PCI 

PCI Card with FiberLink Interface for 

three E-750 

E-751.PIO 

Parallel-Port-to-Fiber Converter 

Options 

E-751.F05 

5 m FiberLink Cable 



Notes 



6-12 6-12 

E-750.CP 

High-Speed Digital 

NanoAutomation ® Controller 

� Ultra-Fast Servo Loop: 

90 µsec 

� Optical FiberLink Interface 

(Optional): 1 Mbit/s 

� DSP-Based Real-Time 

Operating System 

� Additional High-Speed 

Analog Input 

� Optional InputShaping 

� AutoCalibration Function 

for NanoPositioning 

Systems with ID Chip 

� All Servo-Parameters 

Stored in Flash ROM 

The new E-750.CP digital PZT 

controller offers unmatched 

responsiveness and precision 

for the most demanding OEM 

applications. Driving the ultrafast 

P-752 and P-753 series 

NanoStages, the E-750 provides 

sub-millisecond settling 

and sub-angstrom (0.1 nm) 

resolution. 


info@pi.ws 

Optional InputShaping 

The E-750 complements ultralow-noise 

PZT power amplifier, 

capacitive position sensing circuitry 

and sophisticated digital 

signal processing with fast 

servo-control algorithms. It is 

also the first system on the 

market offering PI’s exclusive 

Mach Throughput Coprocessor 

technology (InputShaping), 

which achieves the 

fastest possible overall system 

throughput by eliminating the 

effect of mechanical resonances 

(optional).{bk xtx6044} 

FiberLink Interface 

In addition, the E-750 is 

equipped with an ultra-fast 

(1 Mbit/sec) FiberLink Interface 

(distance up to 50 m) featuring 

complete electrical isolation 

to eliminate coupled EMI 

as a source of low-level position 

modulation. A high-bandwidth 

analog input (-10 to 10 V) 

is also standard. 

AutoCalibration 

OEM customers will appreciate 

the AutoCalibration function, 

allowing random combination 

(and easy interchange) 

of controllers and NanoPositioning 

systems with factory 

default configuration. Calibration 

data, linearization data and 

optimized servo-control parameters 

are stored in each 

NanoPositioning system and 

read by the controller upon 

power-up. 

Digital Linearization 

A digital linearization algorithm 

and the exclusive use of precision 

components in the controller 

guarantee excellent linearity 

and position accuracy. 

The controller is equipped with 

a wide-range power supply for 

use throughout the world. 

E-750.PIO parallel-port-to-fiber converter allows operation of the E-750 from a 

24-bit, high-speed parallel-port interface

E-751.PCI, PCI card with FiberLink 

interface for operation of up to 3 E-750 controllers 

E-750 software tool allows step-and-settle analysis and optimization of connected 

NanoPositioning system. 


Models E-750.CP 

Function Digital NanoAutomation ® Controller 

Channels 1 

Processor 32-bit floating point DSP, 50 MHz 

Sampling rates 30 µs (Sensor), 90 µs (Servo Loop) 

Effective resolution DAC 20 bits 

Sensor types Capacitive, two-plate sensors 

RS-232 interface 115 kBit/s, BiSync protocol, ISO 1745-1975 (E) 

Fiber-Link interface (optional) 1 MBit/s 

Max. output power 10 W (see page 6-40) 

Current limitation Short-circuit proof 

Output voltage range -20 to +120 V 

PZT and sensor connector Combo sub-D; size DB, layout 7W2, 137W2SC30N40x (CONEC) 

Dimensions 125 x 50 x 262 mm 

Weight 2 kg 

Operating voltage range 90-264 VAC, 50-60 Hz, 30 VA 

PZT Actuators 









Index 


info@pi.ws 

6-13

E-760 

E-760 controller card with P-611.3SF 

NanoCube ® XYZ NanoPositioning 

system 

Ordering 

Information 

E-760.3SV 

NanoCube ® Controller Card with 

Automatic Alignment Functions, 

Vis. Detector 

E-760.3Si 


Automatic Alignment Functions, 

IR Detector 




Automatic Alignment Functions 

� Specially Designed for 

P-611 NanoCube ® and 

F-206 HexAlign 6D 

Alignment System 

� Built-in Optical Metrology 

for Automatic Alignment 

� 3 x 9 W Peak Power 

� Position Servo-Control 

The E-760 is a PZT amplifier 

and position servo-controller 

card that was especially 

designed for the P-611 

NanoCube ® XYZ NanoAlignment 

system (see pages 2-36 

and 8-16). In addition to three 

low-noise amplifiers and position 

servo-controller circuits, it 

is equipped with optical 

metrology and I/O for auto- 


PZT Actuators 









Index 


info@pi.ws 

matic alignment of photonics 

components. All functions are 

accessible via the PC-bus interface. 

In addition, there is an 

analog input for position control 

and an FC connector for 

the optical metrology. 

Models E-760.3SV, E-760.3Si 

Function Power amplifier & sensor / position servo-control of 

P-611 NanoCube ® systems with additional optical 

metrology and I/O for automated alignment 

Channels 


3 

Maximum output power 9 W per channel (see page 6-40) 

Average output power 1 W per channel 

Peak output current < 5 ms 90 mA 

Average output current > 5 ms 30 mA 


Voltage gain 10 ±0.1 

Polarity Positive 

Control input voltage -2 to +12 V 

Output voltage -20 to 120 V 

PZT voltage output socket 25 pin sub-D on rear 

Analog in/out socket 8 pin network connector on rear 

Dimensions 

Position Servo-Control 

PC Card (ISA) 

Sensor Type Strain Gauge 

Servo Characteristics P-I (analog) + notch filter 

Sensor socket 25 pin sub-D on rear (same as PZT voltage) 

Optical Metrology IR detector (E-760.3Si), Vis detector (E-760.3SV), 

input via FC connector 

6-14 

E760/E/04/10/18.0

E-664.S3 

Ordering 

Information 

E-664.S3 

NanoCube Controller, Benchtop 



NanoCube Controller 

E-664 controller for P-611 NanoCube 

XYZ NanoPositioning system 



� For P-611 NanoCube 

NanoPositioning Systems 

The E-664 is a bench-top 

amplifier & position servo-controller 

that was especially 

designed for the P-611 Nano- 

Cube XYZ NanoAlignment 

system (see pages 2-36 and 

8-16). Each of the three 

integrated low-noise amplifiers 

can output and sink a peak 

current of 140 mA and an 

average current of 60 mA. The 

position servo-controllers work 

with strain gauge sensors. The 

E-664 can be operated in the 

following four ways: 

I. Open-Loop Manual Operation: 

Output voltage can 

be set by a 10-turn, DC-offset 

potentiometer in the 

range of 0 to 100 V. 

II. Open-Loop External Operation 

(amplifier mode): 

Output voltage is controlled 

by an analog signal applied 

to the BNC input ranging 

from -2 to +12 V. Multi- 

plying by the gain factor of 

10, an output voltage range 

of -20 to +120 V results. 

The DC-offset potentiometer 

adds a DC bias to the 

input, allowing continuous 

shifting of the input voltage 

range between -2 V to 

+12 V and -12 V to +2 V 

(see page 6-40). 

III. Closed-Loop Manual 

Operation (position control 

mode): Displacement 

of the PZTs can be set by a 

10-turn, DC-offset potentiometer 

in the range of zero 

to nominal displacement. 

IV. Closed-Loop External 

Operation: Displacement 

of the PZT is controlled by 

an analog signal in the 

range of 0 to +10 V applied 

to the BNC input. 


The controller is calibrated 

in such a way that 10 V corresponds 

to maximum 

nominal displacement and 

0 V corresponds to 0 displacement. 

The DC-offset 

potentiometer can be used 

to add an offset voltage of 

0 to 10 V to the input signal. 

On-Target and Overflow 

status for each channel 

are displayed by 6 LEDs 

and can be accessed 

through a 14-pin, rearmount 

I/O connector that 

also provides analog control 

input and sensor monitor 

output lines. 

Models E-664.S3 

Function Power amplifier & sensor/position servo-control of 

P-611 NanoCube NanoPositioning systems 

Channels 


3 

Maximum output power 14 W (see page 6-40) 

Average output power 6 W 








DC offset setting 0 to 100 V with 10-turn pot. 

Input impedance 100 k� 

Display 3 x 3 1 / 2 -digit, LED 

Control input sockets: BNC (rear) 

PZT voltage output socket 25 pin sub-D on rear 


Weight 3.0 kg 

Operating voltage 90-120 / 220-240 VAC, 50-60 Hz (linear P/S) 


Sensor type Strain Gauge 

PZT Actuators 

Servo characteristics P-I (analog) + notch filter 









Index 

Sensor socket 25 pin sub-D on rear (same as PZT voltage) 


info@pi.ws 

Sensor monitor output socket BNC 

Additional I/O 14 pin connector on rear for On-Target and 

Overflow status and control in and sensor monitor out 

6-15 6-15

E-665.SR 

Ordering 

Information 

E-665.SR 

LVPZT Amplifier & Position Controller, 

Strain Gauge Sensors, RS-232 Interface 

E-665.LR 


LVDT Sensors, RS-232 Interface 

E-665.CR 


Capacitive Sensors, RS-232 Interface 

Custom Designs for Volume Buyers 

6-16 

E-665 

LVPZT Amplifier & Position Servo-Controller 

with High-Speed RS-232 Interface 

� Integrated 20-Bit High- 

Speed RS-232 Interface 

� Network Capability with 

up to 12 Channels 

� 36 W Peak Power 


� For Strain Gauge, LVDT 

and Capacitive Sensors 

The E-665 is a bench-top, lowvoltage 

PZT amplifier and position 

servo-controller with integrated 

high-speed RS-232 

computer interface and a 20bit 

D/A converter. The E-665 

supports all position sensors 

offered with PI piezo translators 

and NanoPositioning stages: 

strain gauge sensors, LVDT 

sensors and capacitive sensors. 

It is ideal for use with single-axis 

translators such as 

� P-841 stack actuators with 

strain gauge sensors 

� P-721 PIFOC ® microscope 

objective positioners with 

LVDT or capacitive sensors 

� P-620 PIHera series singleaxis 

stages with travel up to 

500µmandcapacitive sensors 

� P-753 LISA/P-752 series 

NanoAutomation ® stages 

with capacitive sensors 


info@pi.ws 

New and Fast 

Communications Interface 

The RS-232 interface handles 

communications with the outside 

world. It performs up to 

300 bidirectional read or write 

operations per second and 

incorporates precision 20-bit 

D/A and A/D converters for 

exceptional positional stability 

and resolution. 

Multi-Axis Network 

Up to 12 E-665s can be networked 

and controlled over a 

single RS-232 interface. 

PI General Command Set 

The E-665 is to a large extent 

freely programmable and its 

command structure conforms 

to the PI General Command 

Set. This command set is common 

to the E-516 Computer 

Control and Display Module 

and an increasing number of PI 

controllers, and is designed for 

multi-axis operation. It is PI’s 

goal to make all of its controllers 

“understand” these 

commands, either directly or 

via command libraries. This will 

greatly reduce the effort 

required to produce custom 

programs, especially in environments 

which include a 

number of different controllers. 

Included with the E-665 is 

user-interface software as well 

LabView and other driver 

sets. 

Screenshot of PZT-Control software for E-665. The commands listed in the editor are 

part of the PI General Command Set.

E-665, open-loop frequency with various PZT loads. Capacitance values are in µF, 

measured in actual PZT. 


PZT Actuators 









Index 


info@pi.ws 

Models E-665.SR E-665.LR E-665.CR 

Function Power amplifier & sensor/ Power amplifier & sensor/ Power amplifier & sensor/ 

position servo-control of LVPZTs position servo-control of LVPZTs position servo-control of LVPZTs 

Channels 


1 1 1 

Maximum output power 36 W 36 W 36 W 

Average output power 12 W 12 W 12 W 

Peak output current < 5 ms 360 mA 360 mA 360 mA 

Average output current > 5 ms 120 mA 120 mA 120 mA 

Current limitation short-circuit proof short-circuit proof short-circuit proof 

Voltage gain 10 ± 0.1 10 ± 0.1 10 ± 0.1 

Polarity Positive Positive Positive 

Control input voltage -2 to +12 V -2 to +12 V -2 to +12 V 

Output voltage -20 to 120 V -20 to 120 V -20 to 120 V 

DC offset setting 0 to 100 V with 10-turn pot. 0 to 100 V with 10-turn pot. 0 to 100 V with 10-turn pot. 

Input impedance 100 k� 100 k� 100 k� 

Display 2 x 4 1/2-digit, LED 2 x 4 1/2-digit, LED 2 x 4 1/2-digit, LED 

Control input socket: BNC BNC BNC 

PZT voltage output socket LEMO ERA.00.250.CTL LEMO ERA.00.250.CTL Combo sub-D; size DB 

Dimensions 235 x 103 x 288 mm 235 x 103 x 288 mm 235 x 103 x 288 mm 

Weight 2.5 kg 2.5 kg 2.5 kg 

Operating voltage 90 –120 / 220–240 VAC, 90–120 / 220–240 VAC, 90 –120 / 220–240 VAC, 

RS-232 Interface 

50 –60 Hz (linear P/S) 50–60 Hz (linear P/S) 50–60 Hz (linear P/S) 

D/A Converter 20-bit resolution 20-bit resolution 20-bit resolution 

Baudrate 9.6 kBaud –115.2 kBaud 9.6 kBaud –115.2 kBaud 9.6 kBaud – 115.2 kBaud 

(default 115.2 kBaud) (default 115.2 kBaud) (default 115.2 kBaud) 

Wave Table 64 data points, 100 Hz, 64 data points, 100 Hz, 64 data points, 100 Hz, 


externally triggered externally triggered externally triggered 

Sensor Type SGS LVDT capacitive 

Servo Characteristics P-I (analog) + notch filter P-I (analog) + notch filter P-I (analog) + notch filter 

Sensor socket LEMO ERA.0S.304.CLL LEMO ERA.0S.304.CLL Combo sub-D; size DB 

Sensor monitor output socket BNC BNC BNC 

6-17

E-610 

Notes 



6-18 6-18 6-18 6-18 

E-610 

LVPZT Amplifier & Position 

Servo-Controller Modules, OEM Version 

� Open-Loop and Closed- 

Loop Versions 

� Optional RS-232 Interface 

� For Capacitive, Strain 

Gauge and LVDT Sensors 


� Runs on Single Stabilized 

Voltage (12 to 30 VDC) 

The E-610 is an OEM, standalone, 

amplifier & position 

servo-control board for lowvoltage 

PZTs. Four versions are 

available: E-610.00 (open-loop, 

amplifier only) and the closedloop 

versions E-610.S0, 

E-610.L0 and E-610.C0 (with 

additional circuitry for position 

sensing and servo-control). 

Version E-610.S0 controls 

strain-gauge-sensor-equipped 

PZTs, version E-610.L0 controls 

LVDT-sensor-equipped 

PZTs and version E-610.C0 

controls capacitive-sensorequipped 

PZTs. The open-loop 

version (E-610.00) can be operated 

in two ways, the closedloop 

versions in four ways: 


info@pi.ws 

I. Open-Loop External Operation 

(amplifier mode): 


by an analog signal ranging 

from -2 to +12 V. Multiplying 

by the gain factor of 

10, an output voltage range 

of -20 to +120 V results. If 

an external offset potentiometer 

(not included) is 

connected, it allows for continuous 

shifting of the input 

range between -2 V to +12 V 

and -12 V to +2 V (see page 

6-40). 

II. Open-Loop Manual Operation 

(power supply 

mode): With 0 V input signal, 

output voltage can be 

set by an external, DC-offset 

potentiometer (not 

included) in the range of 

0 to 100 V. 

III. Closed-Loop (positioncontrol 

mode) External 

Operation: Displacement 

of the PZT is controlled by 

an analog signal in the range 

of 0 to +10 V. The controller 

is calibrated in such a way 

that 10 V corresponds to 

maximum nominal displacement 

and 0 V corresponds 

to zero displacement. If an 

external offset potentiometer 

(not included) is connected, 

it can be used to 

add an offset voltage of 0 to 

10 V to the input signal. 

IV. Closed-Loop Manual Operation: 

With 0 V input signal, 

displacement of the 

PZTs can be set by a DCoffset 


included) in the range of zero 

to nominal displacement. 

Only one unipolar stabilized 

voltage in the range of 12 to 

30 VDC is required to operate 

the E-610. An integrated 

DC/DC converter generates 

the PZT operating voltage and 

all other voltages used internally. 

All inputs and outputs 

are via the male 32-pin rear 

connector. A matching female 

32-pin connector, a LEMO 

ERA.00.250.CTL PZT operating 

voltage connector, and a 

LEMO ERA.0S.304.CLL sensor 

connector are included to 

interface with standard PI 

LVPZTs. 

Computer Controlled Mode: 

See E-621 modules, page 6-47.

E-610, open-loop frequency response with various PZT loads. Values shown are capacitance in µF, measured in actual PZT. 

Ordering 

Information 

E-610.00 

LVPZT Amplifier Module, OEM 

E-610.C0 

LVPZT Amplifier/ Controller Module, 

Capacitive Sensor, OEM 

E-610.L0 

LVPZT Amplifier/Controller Module, 

LVDT Sensor, OEM 

E-610.S0 

LVPZT Amplifier/Controller Module, 

Strain Gauge Sensor, OEM 

Computer Controlled Models: 

See E-621, page 6-47 




Models E-610.00, E-610.CO, E-610.LO, E-610.SO 

Function power amplifier & sensor/position servo-control of PZTs 

Channels 1 






Current limitation short-circuit proof 


Polarity positive 



DC-offset setting 0 to 100 V at output, with external potentiometer 

(not included) 


Input/output connector 32-pin (male) on rear panel (DIN 41612/D) 

Dimensions one 7T slot wide, 3H high 

Weight 0.35 kg (E-610.00: 0.3 kg) 

Operating voltage 12 to 30 VDC, stabilized 

Operating current 2 A 

Position Servo-Control (except E-610.00) 

Sensor Types strain gauge (E-610.S0); LVDT (E-610.L0), 

capacitive (E-610.C0) 

Servo Characteristics P-I (analog) + notch filter 

Sensor Socket LEMO ERA.0S.304.CLL (included) 

PZT Actuators 









Index 


info@pi.ws 

6-19

Ordering 

Information 

E-500.00 

PZT-Amplifier & Position-Servo- 

Controller, Up to 3 Channels, Basic 

Chassis, 19” 

E-501.00 

PZT-Amplifier & Position-Servo- 

Controller, Up to 3 Channels, Basic 

Chassis, 9.5” 



6-20 6-20 6-20 6-20 

E-500 

E-501 

Configuration example: E-501 chassis with optional E-503 LVPZT amplifier, 

E-509.C3A PZT servo-controller for capacitive sensors and E-516.i3 20-bit DAC 

Interface/Display. 

Modular PZT Control Systems 

(HVPZT & LVPZT) 



info@pi.ws 

� For High- and Low- 

Voltage PZTs 

� 19- and 9.5-Inch Chassis 

� Optional Position Servo- 

Control Modules 

� Optional Display and RS- 

232 & IEEE 488 Interface 

Module 

The E-500 is a modular, 19” 

rackmount chassis for PZT 

amplifiers and position servocontrollers. 

An integrated 

multi-function power supply 

(E-530.00) provides operating 

voltages for all available modules. 

E-500 chassis are assembled 

to order and tested with 

all ordered modules installed. 

A maximum of 3 amplifier/controller 

channels can be 

installed in one E-500 chassis. 

The E-501.00 is the 9.5” version 

of the E-500 chassis. 

Note: only one amplifier module 

(1 or 3 channels) and only 

one sensor/servo-controller 

module (1 or 3 channels) can 

be installed in the E-501. A 

modified E-500 chassis for up 

to 6 channels is available on 

request. 

Configuration example: E-500 chassis with three optional E-507 HVPZT Amplifiers, 

E-509.L3 PZT Servo-Controller for LVDT sensors and E-516.i3 20-bit DAC face/Display. 

Models E-500.00 E-501.00 

Function 19” chassis for PZT electronics: amplifier modules, 9.5” chassis for PZT electronics: amplifier modules, 

sensor modules, position servo-control modules, sensor modules, position servo-control modules, 

display/interface modules display/interface modules 

Channels 1, 2, 3 1, 3 

Dimensions 450 x 158 x 288 mm (see p. 6-7) 235 x 158 x 288 mm (see p. 6-7) 

Integrated power supply E-530.00 E-531.00 

Operating voltage 90-264 VAC, 50-60 Hz, E-530.00 primary switching P/S; 90-120 / 220-264 VAC, 50-60 Hz, E-531.00 linear P/S

E-500 

E-501 

Ordering 

Information 

For Ordering Examples and 

Module Survey see page 6-22. 

System Configuration 

Configuration Example: 

E-500 chassis with optional E-503 LVPZT amplifier, 

3 channels, 3 x E-509 PZT servo-controller (E-509.S1: 

strain gauges, E-509.L1: LVDTs, E-509.C1A: capacitive sensors) 

and E-516.i3 20-bit DAC interface/display. 

E-500, E-501 System Configuration 

Installable Amplifier Modules 

E-503.00 (LV, 3 ch) 

E-505.00 (LV, 1 ch) 

E-507.00 (HV, 1 ch) 

E-500, 19” Chassis Models 

E-501, 9.5” Chassis 

Contr. Amplifier Contr. Amplifier Contr. Amplifier Display/Interface Slot 

Slot 3 Slot 3 Slot 2 Slot 2 Slot 1 Slot 1 

Installable Sensor & Position Servo-Control Modules 

E-509.C1A (Cap., 1 ch) 

E-509.L1 (LVDT, 1 ch) 

E-509.S1 (SGS, 1 ch) 

E-509.C2A (Cap., 2 ch) 

E-509.C3A (Cap., 3 ch) 

E-509.L3 (LVDT, 3 ch) 

E-509.S3 (SGS, 3 ch) 

Installable Display/Interface Modules 

E-515.01 (1 ch) 

E-515.03 (3 ch) 

E-516.i3 (3 ch) 

Minimal Configuration, PZT Amplifier Function only 

Extended Configuration, PZT Amplifier with additional Position Servo-Controller 

Extended Configuration, PZT Amplifier with additional Display (and Interface, no Servo-Controller) 

Extended Configuration, PZT Amplifier with additional Position Servo-Controller and Display (and Interface) 

Can be installed in E-500 Can be installed in E-501 or E-500 

HV: High Voltage LV: Low Voltage 

6-21 6-21 6-21 6-21

6-22 6-22 6-22 6-22 6-22 

E-500 

E-501 

The following modules can 

be installed in E-500 / E-501 

chassis: 

Module Survey & Ordering Examples 

� Amplifier modules 

(see page 6-33 ff.) 

E-503.00 

LVPZT Amplifier Module, 

3 Channels, -20 to +120 V, 

3 x 6 W 

E-505.00 


-20 to +120 V, 30 W, 

1 Channel 

E-507.00 

HVPZT Amplifier Module, 

-3 to -1100 V, 13 W, 

1 Channel 


info@pi.ws 

� Display & DAC-Interface 

Modules (see page 6-37) 

E-516.i3 

20-bit DAC Interface/ 

Display Module, IEEE 

488/RS-232, 3 Channels 

E-515.01 

Display Module for PZT 

Voltage/Displacement 

E-515.03 


Voltage/Displacement, 

3 Channels 

� Sensor & Controller 

Modules (see page 6-36) 

E-509.C1A 

PZT Sensor/Controller 

Module, 

Capacitive Sensor 

E-509.L1 


Module, LVDT Sensor 

E-509.S1 


Module, Strain Gauge 

Sensor 

E-509.C2A 


Module, Capacitive Sensor, 

2 Channels 

E-509.C3A 


Module, Capacitive Sensor, 

3 Channels 

E-509.L3 


Module, LVDT Sensor, 

3 Channels 

E-509.S3 



Sensor, 3 Channels

Configuration Examples 

� LVPZT Amplifier, 

3 Channels, (6 W) 

without Display: 

1 x E-500.00 (E-501.00) 

Modular PZT Control 

System, 19” Basic 

Chassis 

1 x E-503.00 



3 x 6 W 

� HVPZT Amplifier, 

3 Channels, with DAC 

Interface & Display: 

1 x E-500.00 



Chassis 

3 x E-507.00{bk 

xtx6149} 


-3 to -1100 V, 13 W 

1 x E-516.i3 

DAC Interface/Display 

Module, IEEE 488/RS-232, 

3 Channels 

� HVPZT Amplifier & 

Position Servo-Controller 

(LVDT Sensors), 

3 Channels, with Display 

& DAC Interface: 

1 x E-500.00 



Chassis 

3 x E-507.00 


-3 to -1100 V, 13 W 

1 x E-509.L3 



3 Channels 

1 x E-516.i3 

DAC Interface/Display 

Module, IEEE 488/RS-232, 

3 Channels 

� Closed-loop operation 

of P-733.2CL XY PZT 

stage (capacitive 

sensors) shortest 

possible step response, 

computer control: 

1 x E-500.00 



Chassis 

2 x E-505.00 


-20 to +120 V, 30 W 

1 x E-509.C2A 


Module, Capacitive 

Sensor, 2 Channels 

1 x E-516.i3 





of the P-733.2CL XY PZT 

stage (capacitive 

sensors) and P-721.20 

PIFOC objective 

positioner (capacitive 

sensor), static and slow 

operation, computer 

control, 9.5” chassis: 

1 x E-501.00 


System, 9.5” Basic 

Chassis 

1 x E-503.00 



3 x 6 W 

1 x E-509.C3A 


Module, Capacitive 


1 x E-516.i3 




� Closed-loop operation of 

S-340 tip/tilt platform 

(LVDT sensors), shortest 


external analog control: 

1 x E-500.00 



Chassis 

3 x E-505.00 


-20 to +120 V, 30 W 

1 x E-509.L3 



3 Channels 

� Closed-loop operation of 

P-733.2CL XY stage 

(capacitive sensors) and 

P-721.10 PIFOC objective 

positioner (LVDT 

sensor), shortest 


computer control: 

1 x E-500.00 



Chassis 

3 x E-505.00 


-20 to +120 V, 30 W 

2 x E-509.C1A 


Module, Capacitive Sensor 

1 x E-509.L1 


Module, LVDT Sensor 

1 x E-516.i3 





of 3 P-841.10 LVPZT 

translators (strain gauge 

sensors) static and slow 

operation, external 

analog control, future 

upgrade for faster 

operation possible: 

1 x E-500.00 



Chassis (can 

accommodate 

3 x E-505, 30 W 

amplifiers) 

1 x E-503.00 


3 Channels, 

-20 to +120 V, 3 x 6 W 

1 x E-509.S3 




Optional: 

1 x E-515.03 


Voltage / Displacement, 

3 Channels 

6-23 6-23

Ordering 

Information 

E-470.00 

HVPZT Amplifier, 500 W, 

-3 to -1100 V, Bench-Top 

E-471.00 

HVPZT Amplifier, Controller & 

Interface/Display Upgrade Possible, 

500 W, -3 to -1100 V, 19” 

E-472.00 

HVPZT Amplifier, 2 Channels, 500 W, 

-3 to -1100 V, Bench-Top, 19” 

E-420.00 

HVPZT Amplifier Module, 500 W, 

-3 to -1100 V 

Upgrades 

E-509.C1A 

PZT Sensor-Controller module 

(capacitive sensor) 

E-509.L1 

PZT Sensor/Controller module 

(LVDT sensor) 

E-509.S1 

PZT Sensor/Controller module 

(strain gauge sensor) 

Computer Interface and Display 

Module (see page 6-37) 

E-516.i3 

20-bit DAC Interface/Display module, 

IEEE 488 / RS-232 

Voltage & Position Display 


E-515.01 

Display Module for PZT Voltage and 

Displacement 

Sensor & Servo-Controller 

Modules for Closed-Loop PZT 

Operation (see page 6-36) 



Notes 



6-24 

E-470 

E-471 

E-472 

E-420 

High-Power, Modular HVPZT 

Amplifier/Controllers 

E-471.00 Configuration example: E-471.00 HVPZT amplifier, with optional E-509.S1 

PZT servo-controller (strain gauges) and E-516.i3 20-bit DAC interface/display. 


� Output Voltage -3 to 

-1100 V & Bipolar 

� 1 and 2 Channel Versions 



� Optional RS-232 & IEEE 

488 Interface Module & 

Display 

The E-470 series high-power 

amplifier/controllers are specifically 

designed to drive highcapacitance 

PZT actuators. 

They are based on the E-420 

amplifier module, which can 

output and sink a peak current 

of 500 mA and an average current 

of 100 mA in a voltage 

range of -3 to -1100 V (positive 

or bipolar range, jumper selectable). 

OEM, 19” rackmount, 

bench-top, and two-channel 

versions are available, some 

with servo-control module and 

display (see Ordering Information 

for standard combinations). 


info@pi.ws 

Standard versions can be operated 

in two ways: 

I. Manual operation: The 

output voltage can be set by 

a 10-turn, DC-offset potentiometer 

in the range of 

-3 to -1000 Volts 

II. External operation: Output 

voltage is controlled by an 

analog signal applied to the 

BNC input, ranging from 0 

to 11 Volts. Multiplying by 

the gain factor of -100, an 

output voltage range of -3 to 

-1100 Volts results. The DCoffset 

potentiometer adds a 

DC bias to the input, allowing 

continuous shifting of 

the input range between 

0 V to +10 V and -10 V to 

0 V (see page 6.31). 

See graph for frequency 

response with selected HVPZTs. 

Upgrades 

The E-471.00 version allows 

installation several upgrade 

options for enhanced versatility 

(see Ordering Information). 

Two additional modes are possible 

with versions having the 

E-509 Sensor & Servo-Controller 

Module upgrade: 

I. Manual Closed-Loop Operation 

Displacement of the PZTs 

can be set by a 10-turn DCoffset 


range of zero to nominal displacement. 

II. External Closed-Loop Operation 

Displacement of the PZT is 

controlled by an analog signal 

in the range of 0 to 

+10 V, applied to the BNC 

input. The controller is calibrated 

in such a way that 

10 V corresponds to maximum 

nominal displacement 

and 0 V corresponds to 0 

displacement. The DC-offset 

potentiometer can be 

used to add an offset voltage 

of 0 to 10 V to the input 

signal. 

E-420.00 HVPZT amplifier module

E-420, E-470, E-471, E-472, frequency response with various PZT 

loads. Values shown are capacitance in nF, measured in actual PZT. 


Models E-470.00, E-471.00, E-472.00, E-420.00 

Function power amplifier (servo-controller option for E-471) 

Channels 1 (E-472: 2) 



Peak output current < 50 ms: 500 mA 


Current limitation short-circuit proof 

Voltage gain -100 ±1, +100 ±1 (selectable) 

Polarity Negative/positive/bipolar (jumper selectable) 

Control input voltage 0 to +11 V, 0 to �11 V (jumper selectable) 

Output voltage -3 to -1100 V (-780 to +260, -550 to +550, -260 to +780, +3 to +1100V, jumper selectable) 

DC-offset setting -3 to -1100 V at output with 10-turn pot. 

Input impedance 1 M� 

Control input sockets BNC 

E-472.00 HVPZT amplifier 

PZT Actuators 









PZT voltage output sockets LEMO ERA.0A.250.CTL 

Dimensions 235 x 158 x 288 mm (E-470); 450 x 158 x 288 mm (E-471, E-472); 215 x 123 x 185 mm (E-420) 

(s. page 6-7) 

Weight 5.2 kg (E-470); 7.6 kg (E-471); 10.1 kg (E-472); 2.5 kg (E-420) 

Operating voltage 90-120 / 220-264 VAC, 50-60 Hz 

Index 


info@pi.ws 

6-25 6-25

Notes 



6-26 6-26 6-26 6-26 6-26 6-26 6-26 

E-480 

E-480.00 with optional E-509.S1 PZT servo-controller (strain gauges) 

and E-515.03 Display 

Ordering 

Information 

E-480.00 High-Power HVPZT 

Amplifier with Energy Recovery, 

2000 W, 19” Rackmount 

Upgrades 

Sensor & Servo-Controller 

Modules for Closed-Loop PZT 

Operation (see page 6-36) 

E-509.C1A 

PZT sensor/controller module 

(capacitive sensor) 

E-509.L1 


(LVDT sensor) 

E-509.S1 


(strain gauge sensor) 

Voltage & Position Display 


E-515.01 

Display module for PZT Voltage and 

Displacement 

Computer Interface and Display 


E-516.i3 

20-bit DAC interface/display module, 

IEEE 488/RS-232 



High-Power HVPZT Amplifier/ 

Controller With Energy Recovery 


� Output Voltage 0 to 

-1000 V & Bipolar 



� Optional Display and 

Computer Interface 

Module 

The E-480 high-power amplifier/controller 

is specifically 

designed to drive high-capacitance 

PZT actuators. E-480 is 

based on a novel design 

employing energy-recovery 

technology and PWM (pulse 

width modulation). Instead of 

dissipating the reactive power 

in the heat sinks, it is recovered 

so that only the active 

power used by the piezo actuator 

has to be supplied. During 

discharge of the actuator, the 

energy not used is returned 

and reused to supply the 

amplifier. 


info@pi.ws 

� The E-480 can output and 

sink a peak current of 2000 mA 

in a voltage range of 0 to 

-1000 V (depending on connector 

configuration) and features 

a temperature sensor input 

and controller circuit to shut 

down the amplifier if the PZT 

exceeds a maximum temperature 

threshold. 

� Because of its high output 

current, the E-480 can not be 

used to operate standard PZT 

translators. It is equipped with 

a special 8-pin connector. One 

of the pins is connected to the 

amplifier output (feed voltage, 

variable between -500 and 

500 V) the other pins are connected 

to fixed voltages (-500, 

-250, 0, 250, 500). This design 

also allows operation of two 

PZT actuators in a bridge. 

Standard versions can be operated 

in two ways: 

I. Manual Open-Loop Operation: 

The output voltage 


potentiometer. 

II. External Open-Loop Operation: 

The output voltage 

is controlled by an analog 

signal applied to the BNC 

input ranging from 0 to 

10 Volts. Multiplying by the 

gain factor of -100, an output 

voltage range of 0 to 


potentiometer allows 

continuous shifting of the 

input range between 0 V to 

+10 V and -10 V to 0 V (see 

page 6.31). 

Upgrades 

The E-480.00 allows installation 

of several upgrade options 

for enhanced versatility (see 

Ordering Information). 

Two additional modes are possible 

with versions having the 

E-509 Sensor & Servo-Controller 

Module upgrade: 

I. Manual Closed-Loop Operation 

Displacement of the PZTs 



range of zero to nominal displacement. 

II. External Closed-Loop Operation 

Displacement of the PZT is 

controlled by an analog signal 


+10 V, applied to the BNC 



10 V corresponds to maximum 

nominal displacement 

and 0 V corresponds to 0 

displacement. The DC-offset 

potentiometer can be 

used to add an offset voltage 

of 0 to 10 V to the input 

signal.

E-480, frequency response with various PZT loads. Values shown are 

capacitance in nF, measured in actual PZT. 



Function Power amplifier (servo-controller option) 

Channels 1 


Average output power Equivalent to 630 W reactive power 



Small-signal bandwidth 5 kHz (660 nF); 1 kHz (3.4 µF) 

Large-signal bandwidth 1.4 kHz (660 nF); 350 Hz (3.4 µF) 


Voltage gain -100 ±1, +100 ±1 (selectable) 

Polarity Negative/positive/bipolar (depending on connector configuration) 

Control input voltage 0 to +10 V, 0 to �10 V (jumper selectable) 

Output voltage -0 to �1000 V (-750 to +250, -500 to +500, -250 to +750, 0 to +1000 V, 

depending on connector configuration) 

Ripple Up to 0.3% (depends on voltage range and capacitance of PZT) 

DC-offset setting 0 to 100% of output voltage range, set with 10-turn pot. 

Input impedance 1M� 


PZT voltage output sockets LEMO special connector 

Dimensions 450 x 158 x 288 mm (s. page 6-7) 

Weight 8.6 kg 

Block diagram of amplifier with power recovery 

Operating voltage 90-120 / 210-250 VAC, 50-60 Hz 

PZT Actuators 









Index 


info@pi.ws 

6-27 6-27

Ordering 

Information 

E-463.00 

HVPZT Amplifier, 3 Channels, 

Bench-Top 



6-28 6-28 6-28 6-28 6-28 6-28 6-28 6-28 

E-463 

E-463.00 

E-463, frequency response with various PZT loads. Values shown are capacitance in nF, 

measured in actual PZT. 

HVPZT Amplifier, 3 Channels 


info@pi.ws 

� 3 Independent Channels 


� 3 LED Voltage Displays 

� Output Voltage Range 

0 to -1500 V 

The E-463.00 is a bench-top 

amplifier for high-voltage PZTs. 

It contains three independent 

amplifiers that can output and 


and an average current of 

3 mA each. The E-463.00 can 

be operated in two ways: 

I. Manual operation: Output 

voltage for each channel can 

be set by a 10-turn DC-offset 

potentiometer in the range of 

0 to -1000 V. 


voltage is controlled by an analog 


inputs, ranging from 0 to 10 V. 

Multiplying by the gain factor 

of -150, an output voltage 

range of 0 to -1500 V results. 

The DC-offset potentiometer 

adds a DC bias to the input, 

allowing continuous shifting of 

the input range between 0 V to 

+10 V and -6.66 V to 3.33 V 


Three 31 / -digit LED displays 

2 

show the output voltage of 

each individual channel. For 

frequency response with 

selected HVPZTs, see graph 

below. 

For computer-controlled 

closed-loop positioning electronics, 

refer to the E-500 

system starting on page 6-20. 



Function Power amplifier 

Channels 3 

Maximum 5 W per channel 

output power (s. page 6-40) 

Peak output 

current < 5 ms 

4 mA per channel 

Average output 

current > 5 ms 



Voltage gain -150 ±1 

Polarity Negative 

Control input 

voltage 

0 to +10 V 

Output voltage 0 to -1500 V 

DC-offset setting 

with 10-turn pot. 

0 to -1000 V at output 

Input impedance 1 M� 

Display 3 x 31 / -digits, LED 

2 

Control input 

sockets 

3 x BNC 

PZT voltage 3 x LEMO 

output sockets ERA.0A.250.CTL 


(s. page 6-7) 

Weight 4.3 kg 

Operating voltage 90-120 / 220-240 VAC, 

50-60 Hz (linear P/S)

E-663 

Ordering 

Information 

E-663.00 

LVPZT Amplifier, 3 Channels, 

Bench-Top 



LVPZT Amplifier, 3 Channels 

� 3 Independent Channels 


� 3 LED Voltage Displays 


-20 to 120 V 

The E-663.00 is a bench-top 

amplifier for low-voltage PZTs. 

It contains three independent 






E-663.00 

E-663, frequency response with various PZT loads. 

Values shown are capacitance values are in µF, measured in actual PZT. 


voltage for each channel 

can be set by a 10-turn, DCoffset 


range of 0 to 100 V. 

II. External Operation: 



to the BNC inputs, ranging 

from -2 to 12 V. Multiplying 

by the gain factor of 10, an 

output voltage range of -20 

to 120 V results. The DCoffset 




the input voltage range 

between -2 V to +12 V and 

-12Vto+2V(see page 6-40). 

Three 31 / -digit LED displays 

2 

show the output voltage of 

each individual channel. For 

frequency response with 

selected LVPZTs see graph 

below. 

PZT Actuators 









Index 


info@pi.ws 

For computer-controlled 

closed-loop positioning electronics 

refer to the E-500 

system starting on page 6-20 or 

the E-662 on page 6-16. 



Function power amplifier 

Channels 3 

Maximum 14 W per channel 

output power (s. page 6-40) 

Average 

output power 

6 W per channel 

Peak output 

current < 5 ms 


Average output 

current > 5 ms 



Control input 

voltage 

-2 to +12 V 



DC offset setting 0 to 100 V 

with / 10-turn pot. 


Input impedance: 100 k� 

Display 3 x 31 / -digit, LED 

2 

Control input BNC 

socket 

PZT voltage LEMO ERA.00.250.CTL 

output socket 


(s. page 6-7) 

Weight 4.6 kg 

Operating voltage 90-120 / 220-240 VAC, 

50-60 Hz (linear P/S) 

6-29 6-29 6-29 6-29 6-29 6-29 6-29 6-29

E-461.00 

Ordering Information 

E-461.00 

HVPZT Amplifier 

E-461.OE HVPZT Amplifier Module, 

OEM Version 



6-30 6-30 6-30 6-30 6-30 6-30 6-30 6-30 

E-461 

HVPZT Amplifiers 

� Single Channel PZT Driver 

� 12 V Battery or P/S 

Operation 


-10 to -1000 V 

The E-461.00 is a low-cost 

amplifier for high-voltage PZTs. 

It can output a peak current of 

0.5 mA and an average current 

of 0.3 mA. Because the unit 

requires an operating current 

of only 80 mA @ 12 V, battery 

operation is possible. 

The E-461.OE is the OEM version 

of the E-461.00 amplifier. 

The OEM module does not 

provide manual controls. All 

input connections are via 

6 header pins located on the 

bottom. The HV output is via a 

coaxial cable with LEMO 

connector (ERA.0A.250.CTL). 

The module is designed for 

mounting on circuit boards. 


info@pi.ws 

The electronics are fully enclosed 

in a metal case. The 

E-461.00 and E-461.OE can be 

operated in 2 ways: 

I. Manual Operation: Output 

voltage can be set by a DCoffset 


supplied with E-461.OE) in 

the range of -10 to -1000 V. 



analog signal in the range of 

0 to 10 V, applied to the 

BNC input. Multiplying by 


output voltage range of -10 

to -1000 V results. The DCoffset 





0 V to +10 V and -10 V to 

0 V (see page 6-40). 


The E-461.00 and E-461.OE 

are not equipped with active 

discharge circuitry but a 5 M�/ 

3.9 nF RC network. Therefore, 

PZT discharge times will differ 

from charge times. If dynamic 

(> 1 Hz) PZT operation is required, 

please consider the 

E-463 or E-507 amplifiers (see 

p. 6-28 and p. 6-35). 

E-461.OE 

Models E-461.00 E-461.OE 

Function Power amplifier Power amplifier 

Channels 1 1 

Maximum output power 0.5 W 0.5 W 

Average output power 0.3 W 0.3 W 

Peak output current < 5 ms 0.5 mA 0.5 mA 

Average output current > 5 ms 0.3 mA 0.3 mA 

Current limitation Short-circuit proof Short-circuit proof 

Voltage gain -100 ±1 -100 ±1 

Polarity negative negative 

Control input voltage 0 to +10 V 0 to +5 V 

Output voltage -10 to -1000 V -10 to -1000 V 

DC-offset setting -10 to -1000 V at output 

with 1-turn pot. 

- 

Input impedance 10 k� 10 k� 

Frequency response Static and quasi static Static and quasi-static 

applications only applications only 

Control input socket BNC (E-461.00 only) Header pins 

PZT voltage output socket LEMO ERA.0A.250.CTL LEMO ERA.0A.250.CTL 

Dimensions 160 x 90 x 60 mm 67 x 41 x 20 mm 

Weight 0.5 kg 0.25 kg 

Operating voltage 10 to 15 VDC, stabilized 10 to 15 VDC, stabilized 

Max. operating current 80 mA 80 mA 

Operating temperature range 0 to +60°C 0 to +60°C 

Power supply Not included 

(3.5 mm jack socket) 

Not included

Ordering 

Information 

E-660.00 

LVPZT Amplifier 

E-660.OE 

LVPZT Amplifier Module, OEM Version 



E-660.00 

E-660 

See also E-831, p. 6-49 

E-660.OE 

LVPZT Amplifiers 

� Single-Channel PZT Driver 

� 12 V Battery or P/S 

Operation 


5 to 100 V 

The E-660.00 is a low-cost 

amplifier for low-voltage PZTs. 

It can output and sink a peak 

current of 20 mA and an average 

current of 10 mA. The 

E-660 is designed for static 

and low-level dynamic PZT 

applications. Because an operating 

current of only 150 mA @ 

12 V is required, battery operation 

is possible. 



E-660.OE is the OEM version 

of the E-660.00 amplifier. The 

OEM module does not provide 

manual controls. All inputs and 

outputs are via 8 header pins 

located on the bottom of the 

E-660.OE. The module is 

designed to be mounted on circuit 

boards. The electronics 

are fully enclosed in a metal 

case. The E-660.00 and 

E-660.OE can be operated in 

two ways: 

I. Manual Operation: Output 

voltage can be set by a DCoffset 


supplied with E-660.OE) in 

the range of 5 to 100 V. 


PZT Actuators 









Index 


info@pi.ws 



analog signal in the range of 

0 to 10 V, applied to the 

BNC input (E-660.00). 


of 10, an output voltage 

range of +5 to +100 V 

results. The DC-offset potentiometer 

adds a DC bias 

to the input, allowing continuous 

shifting of the input 

voltage range between 0 V 

to +10 V and -10 V to 0 V 


See also E-831, p. 6-49 



Channels 1 1 

Maximum output power 2 W (s. page 6-40) 2 W (s. page 6-40) 

Average output power 1 W 1 W 

Peak output current < 5 ms 20 mA 20 mA 

Average output current > 5 ms 10 mA 10 mA 


Voltage gain 10 ±0.1 10 ±0.1 

Polarity Positive Positive 


Output voltage 5 to 100 V 5 to 100 V 

DC offset setting 5 to 100 V with 1-turn pot - 


Control input socket BNC header pins 

PZT voltage output socket LEMO ERA.00.250.CTL header pins 



Operating voltage 12 to 15 VDC, stabilized 12 to 15 VDC, stabilized 

Max. Operating current 150 mA 150 mA 

Operating temperature range 0 to +50°C 0 to +50°C 

Power supply Not included (3.5 mm 

jack socket) 

Not included 

6-31 6-31 6-31 6-31 6-31 6-31 6-31 6-31

Ordering 

Information 

E-650.00 

LVPZT Amplifier for Multilayer 

Bender Actuators, Bench-Top 

E-650.OE 

LVPZT Amplifier Module for 

Multilayer Bender Actuators, 

OEM Version 



E-650.OE LVPZT Amplifier Module 

for Multilayer Bender Actuators, 

OEM Version 

E-650.00 LVPZT Amplifier for Multilayer 

Bender Actuators 

6-32a 6-32 6-32 6-32 6-32 6-32 6-32 6-32 

E-650 

LVPZT Amplifiers for 

Multilayer Bender Actuators 

� Specifically Designed to 

Drive Multilayer 

“Bimorph” Actuators 

� Bench-Top and OEM 

Versions 

� Up to 18 W Peak Power 

� LCD Voltage Display 


0 to 60 V and Separate 

Fixed Voltage 

E-650.00 is a bench-top piezo 

driver, especially designed for 

low-voltage, multilayer PZT 

bender actuators (“bimorphs”) 

such as the PL122 to PL140. 

It is equipped with a special circuit 

that can provide one fixed 

voltage and a variable voltage 

in the range of 0 to 60 V. The 

driver can output and sink a 

peak current of 300 mA.. The 

E-650.00 can be operated in 

two ways: 


info@pi.ws 


voltage can be set by a 10turn 

DC-offset potentiometer 

in the range of 0 to 60 V. 



analog signal applied to the 

BNC input, ranging from 0 

to 10 V. Multiplying by the 

gain factor of 6, an output 

voltage range of 0 to 60 V 

results. The DC-offset 

potentiometer can be used 

to bias the control input 

voltage. 

A 31 / -digit LCD display shows 

2 

the output voltage. 

The E-650.OE is the OEM version 

of the E-650.00. It provides 

peak output power of 

8 W. All inputs and outputs are 

via 8 header pins located on 


the bottom of the module. The 

E-650.OE is designed to be 

mounted on a circuit board. 

The electronics are fully 

enclosed in a metal case. 



Channels 1 1 

Maximum output power 18 W 8 W 

Average output power 6 W 4 W 

Peak output current < 5 ms 300 mA 140 mA 

Avg. output current > 5 ms 100 mA 60 mA 


Voltage gain 6 ±0.1 6 ±0.1 

Polarity positive positive 


Display 3 1 / -digit LCD 2 – 

Output voltage 0 to 60 V, one additional 0 to 60 V, one additional 

fixed voltage of 60 V fixed voltage of 60 V 

DC-offset setting 0 to 60 V at output, 0 to 60 V at output, 

with 10-turn pot with 10-turn pot 

(E-650.00 only) (E-650.00 only) 


Frequency response 600 Hz @ 1000 nF load 200 Hz @ 1000 nF load 

6 kHz @ no load 3 kHz @ no load 

Control input socket BNC header pins 

PZT voltage output socket 9-pin Sub-D header pins 


Weight 0.7 kg (w/o P/S) 0.15 kg 

Operating voltage 90-240 VAC, 50-60 Hz +/- 15 V, 315 mA max., 

(external switching P/S, 

included) 

stabilized 

Operating temperature range 0 to +50°C 0 to +50°C

E-651 dual- and single-channel controllers 

with PICMA ® P-871 bender actuators 

Ordering 

Information 

E-651.1S 

Piezo Amplifier and Controller for 

Bender Actuators with SGS, 1 Channel 

E-651.2S 

Piezo Amplifier and Controller 

for Bender Actuators with SGS, 

2 Channels 

E-614.2BS 

Piezo Amplifier and Controller Board 

for Bender Actuators with SGS, 

2 Channels 

E-614.2BS 2-channel OEM controller 

board 

PICMA ® P-871 closed-loop piezo bender 

actuators provide displacement up 

to 2 mm with high linearity. 

E-651 

E-614 

LVPZT Controller for Closed-Loop Multilayer 

Piezo Bender Actuators 

� Controller for Closed- 

Loop Multilayer 

“Bimorph” Actuators 

� 1- and 2-Channel Versions 

� Bench-Top & OEM-Board 

Versions 

E-651 is a bench-top piezo controller, 

especially designed for 

low-voltage, multilayer piezo 

bender actuators equipped 

with strain gauge sensors 

such as the P-871. One and 

two channel versions are 

available. A wide range power 

supply is included. 

The E-614.2BS OEM board 

provides the same function- 



info@pi.ws 

ality as the E-651.2S 2-channel 

controller in a smaller package. 

All controllers can be operated 

in two ways: 

I. Open-Loop Mode: 

The output voltage is controlled 


to the BNC input, ranging 

from -5 to +5 V. Multiplying by 

the gain factor of 6, an output 

voltage range of 0 to 60 V 

results. 

II. Closed-Loop Mode 

(Servo-Controller): 

The displacement of the 

bender is controlled by an 

analog signal in the range of -5 

to +5 V, applied to the BNC 



+/-5 V input corresponds to +/maximum 

nominal deflection 

and 0 V input corresponds to 0 

deflection. 

Models E-651.1S E-651.2S E-614.2BS 

Function Power amplifier & sensor / Power amplifier & sensor / Power amplifier & sensor / 

position servo-control of position servo-control of position servo-control of 

multilayer bender actuators, multilayer bender actuators, multilayer bender actuators, 

bench-top controller bench-top controller OEM board 

Channels 

AMPLIFIER 

1 2 2 

Maximum output power 1 W 1 W / channel 1 W / channel 

Average output power 0.5 W 0.5 W / channel 0.5 W / channel 

Peak output current 5 ms 36 mA 36 mA 36 mA 

Average output current 18 mA 18 mA 18 mA 

Voltage gain 6 6 6 

Polarity Positive Positive Positive 

Control input voltage -5 to +5 V -5 to +5 V -5 to +5 V 

Output voltage 0 to +60 V 0 to+ 60 V 0 to+ 60 V 


Control input socket: BNC BNC On-board connector 

PZT voltage and sensor output socket LEMO EPG.0B.307.HLN LEMO EPG.0B.307.HLN On-board connector 

Dimensions 125 x 90 x 265 mm 125 x 90 x 265 mm Open frame board 

100 x 40 x 200 mm 

Weight 1.36 kg 1.45 kg 0.30 kg 

Operating voltage 14 to 16 V DC (power supply 14 to 16 V DC (power supply 14 to 16 V DC 

POSITION SERVO CONTROL 

C-890.PS included) C-890.PS included) 

Sensor Type SGS SGS SGS 

Sensor excitation 5 V DC, adjustable 5 V DC, adjustable 5 V DC, adjustable 

Low pass cut-off frequency 100 Hz / 5 kHz selectable 100 Hz / 5 kHz selectable 100 Hz / 5 kHz selectable 

Monitor output 0 to +10 V for nominal 0 to +10 V for nominal 0 to +10 V for nominal 

displacement displacement displacement 

Sensor monitor output socket BNC BNC On-board connector 

E651/E/04/10/18.0

E-503.00 

E-503 

Ordering 

Information 

E-503.00 

LVPZT Amplifier Module, -20 to +120 V, 

3 Channels 



LVPZT Amplifier Module, 3 Channels 



-20 to +120 V 

The E-503.00 is an amplifier 

module for low-voltage PZTs. It 

contains three independent 






I. Manual Operation: Each 

amplifier output voltage can be 

set in the range of 0 to 100 

Volts by a 10-turn, DC-offset 





voltage is controlled by an analog 


inputs, ranging from -2 to 12 V. 


of 10, an output voltage range 

of -20 to 120 V results. The 

DC-offset potentiometer adds 

a DC bias to the input, allowing 

continuous shifting of the input 

range between -2 V to +12 V 

and -12 V to +2 V (see page 

,kein Ziel). 

For computer-controlled operation, 

an E-516.i3, 20-bit DAC 

interface/display module can 

be used (requires E-500/E-501 

chassis). 

See graph for frequency 

response with selected 





Channels 3 

Maximum output power 14 W per channel (s. page 6-40) 

Average output power 6 W per channel 

Peak output current < 5 ms 140 mA per channel 

Average output current > 5 ms 60 mA per channel 





Output voltage -20 to +120 V 

DC-offset setting 0 to 100 V at output with 10-turn pot. 



PZT Actuators 

Notes 

PZT voltage output socket LEMO ERA.00.250.CTL 







Dimensions One 14T slot wide, 3H high 



Index 

The E-503.00 amplifier is not 

a stand-alone device. It is 

designed to work in the E-500/ 

E-501 chassis (p. 6-20) with 

integrated power supply. 

A 32-pin connector is used 

to interface with the E-500/E-501 

chassis. 

Weight 0.9 kg 

Operating voltage Requires E-530/E-531 power supply 

(E-500/E-501 system) 


info@pi.ws 

6-33 6-33 6-33 6-33 6-33 6-33 6-33 6-33

Ordering 

Information 

E-505.00 


-20 to +120 V 



E-505.00 

6-34 6-34 6-34 6-34 6-34 6-34 6-34 6-34 

E-505 


Values shown are capacitance in µF, measured in actual PZT. 

LVPZT Amplifier Module 



-20 to +120 V 


module for low-voltage PZTs. It 

can output and sink a peak current 

of 2000 mA and an average 



two ways: 

I. Manual Operation: The 




100 Volts. 

II. External Operation: 



to the BNC input ranging 

from -2 to +12 Volts. 


of 10, an output voltage 

range of -20 to +120 Volts 

results. The DC-offset 

potentiometer adds a DC 

bias to the input, allowing 

continuous shifting of the 


info@pi.ws 

input range between -2 V to 

+12 V and -12 V to +2 V 



an E-516.I3, 20-bit DAC 


be used (requires E-500/ E-501 

chassis). See graph for frequency 






Channels 1 

Maximum output power 200 W (s. page 6-40) 








Output voltage -20 to +120 V 

DC-offset setting 0 to 100 V at output with 10-turn pot. 



Notes 

PZT voltage output socket: LEMO ERA.00.250.CTL 

E-505.00 amplifier is not a 

stand-alone device. It is 

designed to work in the 

E-500/E-501 chassis (p. 6-20) 

with integrated power 

supply. A 32-pin connector 

is used to interface with the 

E-500/E-501 chassis. 


Weight 0.9 kg 

Operating voltage Requires E-530/E-531 power supply 

(E-500/E-501 system)

E-507.00 

6-35 

E-507 

E-507.00, frequency response with various PZT loads. 

Values shown are capacitance in nF measured in actual PZT. 

Ordering 

Information 

E-507.00 


-3 to -1100 V 

E-507.OE 

HVPZT Amplifier Module, OEM, 

400 mA Peak Current 

E-507.36 

HVPZT Amplifier Module, -250 to +250 V 

Custom Designs for Volume Buyers 

Notes 

E-507.00 is not a stand-alone device. 

It is designed to work in the E-500/ 

E-501 chassis (p. 6-20) with 

integrated power supply. A 32-pin 

connector is used to interface with 

the E-500/E-501 chassis. 

HVPZT Amplifier Module 

� Up to 400 W Peak Power 


-3 to -1100 V & Bipolar or 

+250 V to -250 V 


module for high-voltage PZTs. 

It can output and sink a peak 

current of 50 mA and an average 



two ways: 



info@pi.ws 

I. Manual Operation: The 



in the range of -3 

to -1000 Volts. 

II. External Operation: Output 

voltage is controlled by 

an analog signal applied to 

the BNC input ranging from 

0 to 11 Volts. Multiplying by 


output voltage range of -3 to 






0V to +10 V and -10 V to 

0V (see page 6-40). 


an E-516.i3 20-bit DAC 


be used (requires E-500/E-501 

chassis). See graph for frequency 


HVPZTs. 

E-507.OE is the high current 

OEM version of E-507.00, 

especially designed for switching 

applications. It can output a 

peak-current of 400 mA for 

1 msec. The E-507.OE is not 

equipped with a DC-offset 


E-507.36 is designed for systems 

or actuators requiring an 

operation voltage range of 

-250 V to +250 V, such as the 

P-363 PicoCube ® (see page XX) 

or the P-111 – P-151 Pica- 

Shear actuators (see p. 

1-XX) 

Models E-507.00 E-507.OE E-507.36 

Function Power amplifier Power amplifier Power amplifier 

Channels 1 1 1 

Maximum output power 50 W (s. page 6-40) 400 W (s. page 6-40) 50 W (s. page 6-40) 

Average output power 13 W 13 W 13 W 

Peak output current < 5 ms 50 mA 400 mA 100 mA 

Average output current > 5 ms 12 mA 12 mA 24 mA 

Current limitation Short-circuit proof Short-circuit proof Short-circuit proof 

Voltage gain -100 ±1, +100 ±1 (selectable) -100 ±1 -50+/-1 

Polarity Negative/positive/bipolar 

(jumper selectable) 

Negative Bipolar 

Control input voltage 0 to +11 V, 0 to -11 V (jumper selectable) 0 to +11 V -5 to +5 V 

Output voltage -3 to -1100 V (-780 to +260, -550 to +550, 

-260 to +780, +3 to +1100 V, jumper selectable) 

-3 to -1100 V -250 to -250 V 

DC-offset setting -3 to -1100 V at output with 10-turn pot. - 500 V range at output 

with 10 turn pot. 


Control input sockets BNC DIN 41612, 32 pin, rear; SMB, front BNC 

PZT voltage output sockets LEMO ERA.0A.250.CTL LEMO ERA.0A.250.CTL LEMO ERA.0A.250.CTL 

Dimensions One 14T slot wide, 3H high One 14T slot wide, 3H high One 14T slot wide, 3H high 

Weight 0.75 kg 0.75 kg 0.75 kg 

Operating voltage Requires E-530/E-531 power supply Requires E-530/E-531 power supply Requires E-530/E-531 power 

(E-500/E-501 system) (E-500/E-501 system) supply (E-500/E-501 system) 

E507/E/04/10/13.0

Ordering Information 

E-509.C1A 

PZT Sensor & Controller Module, 

Capacitive Sensor, 1 Channel 

E-509.L1 


LVDT Sensor, 1 Channel 

E-509.S1 


Strain Gauge Sensor, 1 Channel 

E-509.C2A 


Capacitive Sensor, 2 Channels 

E-509.C3A 


Capacitive Sensor, 3 Channels 

E-509.L3 


LVDT Sensor, 3 Channels 

E-509.S3 


Strain Gauge Sensor, 3 Channels 



6-36 6-36 6-36 6-36 6-36 6-36 6-36 6-36 

E-509 

E-509.L3 

Sensor & Position Servo-Control 

Modules for PZTs 



info@pi.ws 


� Increases PZT Stiffness 

� Eliminates Drift & 

Hysteresis 

� For Capacitive Sensors, 

Strain Gauge Sensors & 

LVDT Sensors 

The E-509 is a displacement 

sensor module with an integrated 

position servo-controller 

for closed-loop PZT positioning 

systems. Versions for three 

different sensor types are 

available: strain gauge sensors, 

LVDT (linear variable 

differential transformers) and 

capacitive sensors. For strain 

gauge and LVDT sensors, 1and 

3-channel modules are 

available. The capacitive sensor 

module is available in a 1-, 

2-, or 3- channel version. 

The position servo-control portion 

of the E-509 is identical for 

all versions, consisting of an 

analog P-I (proportional, integral) 

controller. Proportional 

and integral gain can be set 

internally with trimmers. 

Sensor bandwidth and control 

Notes 

E-509 PZT servo-controller is 

not a stand-alone device. 

It is designed to work in the 

E-500/E-501 chassis (p. 6-20), 

the E-471 or E-480 amplifier 

(p. 6-24, 6-26) with integrated 

power supply. 

Important Calibration 

Information: Please read 

details on page 6-41. 

bandwidth can also be set. A 

notch filter allows operation of 

the piezo positioning system 

closer to its mechanical resonant 

frequency. 

The E-509 compensates for 

the drift and hysteresis of PZT 

actuators. It also increases the 

virtual stiffness of a PZT by 

quickly adjusting the operating 

voltage on the PZT as soon as 

a change in force or load 

occurs. 

Models E-509.C1A, E-509.C2A, E-509.C3A, E-509.L1, E-509.L3, E-509.S1, E-509.S3 

Function Displacement sensor electronics and position servo-controller for PZTs 

Channels 1 (E-509.x1), 2 (E-509.C2A), 3 (E-509.x3) 

Sensor types Strain gauges (E-509.Sx), LVDTs (E-509.Lx), capacitive sensors (E-509.CxA) 

Servo characteristics P-I (analog) + notch filter 

Rear connector 32-pin connector 

Sensor socket LEMO ERA.0S.304.CLL (E-509.CxA: LEMO EPL.00.250.NTD) 

Sensor monitor output socket LEMO 6 pin FGG.0B.306.CLAD56 (E-509.C3A); BNC (1- & 2-channel versions) 

ERA.05.303.CLL (E-509.S3, E-509.L3) 


Weight 0.35 kg (E-509.x3); 0.25 kg (E-509.x2); 0.2 kg (E-509.x1) 

Operating voltage Requires E-530/E-531 power supply (E-500/E-501 system, etc.)

Ordering 

Information 

E-516.i3 

20-bit DAC Interface/Display Module, 

IEEE 488/RS-232, 3 Channels 

E-516.i1 

20-bit DAC Interface/Display Module, 

IEEE 488/RS-232, 1 Channel 



6-37a 

E-516 

Computer Interface & Display Module 

� 6-digit LCD Display for 

Voltage & Displacement 

Data 

� Low-Noise, 20-Bit D/A 

Converters 

� IEEE 488 & RS-232 

Computer Interface 

� 1 or 3 Output Channels 

The E-516 is a microprocessorcontrolled 

interface and display 

module with integrated 20-bit 

D/A converters and IEEE 488 & 

RS-232-ports. 

The E-516 can be computercontrolled 

with more than 20 

ASCII commands that are 

interpreted and executed by 

the internal DSP. Each of the 

output channels can be addressed 

individually. The E-516 

provides an effective output 

resolution of 20-bits. Additional 

20-bit A/D converters read the 

PZT voltage and position. 

Communication/ 

Command Set 

For computer communication, 

both RS-232 and IEEE 488 

interfaces are installed. The 

E-516 support the PI General 

Command Set. To reduce your 

programming effort in the face 

of complex multi-axis positioning 

tasks, PI has introduced 

the PI General Command Set. 

All new controllers for motors 

and actuators will understand 

the commands of this set, either 

directly or through the use 

of command libraries which 

translate the standardized commands 

to low-level instructions 

to save communications 

time and/or bandwidth. The PI 

General Command Set is valid 

for different devices, and multiple 

devices can be controlled 

from one host PC with one or 

more interfaces. 


info@pi.ws 

E-516.i3 

Operation 

The E-516 can be used for both 

static and dynamic operation. 

Any desired functions can be 

uploaded to the internal data 

tables and executed per software 

command. Windows 

operating software, DLLs and 

LabView drivers are included. 


Notes 

The E-516 is not a stand-alone 

device. It is designed to work 

in the E-500/E-501 chassis, 

the E-471 or E-480 amplifier 

with integrated power supply. 

Models E-516.i3 E-516.i1 

Function 20-bit D/A converter interface/display module, IEEE 488/RS-232 

Channels 3 1 

Output voltage range -1 to +11 V -1 to +11 V 

Resolution 20-bit 20-bit 

Stability Better than 0.2 mV Better than 0.2 mV 

Linearity 0.01% 0.01% 

Computer interfaces RS-232, IEEE 488 RS-232, IEEE 488 

D/Aconverters 20-bit, ±12 V 20-bit, ±12 V 

A/D converters 20-bit, -1 to +11 V 20-bit, -1 to +11 V 

LCD Display 4x20 characters 4x20 characters 

Dimensions One 21T slot wide, 3H high One 21T slot wide, 3H high 


Operating voltage Requires E-530/E-531 power supply (E-500/E-501 system, etc.)

WaveEditor-Function Generator 

WaveEditor 

with sample wave. 

The E-516 has a built-in wave 

generator which can store up 

to 8192 data points for each 

channel. These values can 

then be output output at a rate 

of 20 kHz. Alternatively, the 

output can also be controlled 

by an external signal and programmed 

for point-by-point, 

line-by-line or full-scan triggering. 

The wave point values can be 

calculated with the included 

function generator. With the 

WaveEditor's graphic interface 

software, you need only 

PZT Actuators 









Index 


info@pi.ws 

choose the desired function 

and set the parameters to the 

values you need. Your wave is 

displayed on the screen as you 

edit it, before being output. 

The WaveEditor is also availble 

as a DLL and can be called up 

from all the E-516 driver sets 

(LabView TM ), COM server, DLL) 

and from the PZTControl user 

interface software. Selected 

and edited parameters may be 

saved for later use. 

66-37b

Ordering 

Information 

E-515.01 


Voltage/Displacement 

E-515.03 


Voltage/Displacement, 3 Channels 



6-38 6-38 6-38 6-38 6-38 6-38 6-38 6-38 

E-515 

Display Modules 

� 31 / -digit LED Display 

2 

� For Voltage & 

Displacement Data 

� 1 & 3 Channel Versions 

The E-515.01 and E-515.03 are 

one and three channel display 

modules for PZT voltage and 

displacement data. Toggle 

switches for each channel 

select voltage or displacement 

mode. The voltage/displacement 

range for each channel is 

internally set by jumpers and 

trimmers. 


Models E-515.01 E-515.03 

Function Display for voltage & displacement Display for voltage & displacement 

Channels 1 3 

Linearity 0.1% 0.1% 

Display 1 x 31 / -digits 2 3 x 31 / -digits 

2 

Dimensions One 21T slot wide, 3H high One 21T slot wide, 3H high 


Operating voltage Requires E-530/E-531 power supply Requires E-530/E-531 power supply 

(E-500/E-501 system, etc.) (E-500/E-501 system, etc.) 


info@pi.ws 

E-515.03 

Notes 

E-515 is not a stand-alone device. 

It is designed to work in the E-500/ 

E-501 chassis (p. 6-20), the E-471 or 

the E-480 amplifier (p. 6-24, 6-26) 

with integrated power supply.

E-530.00 

E-530 

Ordering 

Information 

E-530.00 

Multi-Function Power Supply Module 

for E-500 



Ordering 

Information 

E-531.00 

Multi-Function Power Supply Module 

for E-501 



E-531.00 

E-531.00 

Power Supply for E-500 Systems 

� Included in E-500 Chassis 

� Provides Power for all 

E-500-Installable Modules 

� 90-264 VAC Operating 

Range 

The E-530.00 multi-function 

power supply module is part of 

the E-500 chassis (for PZT 

amplifier & position-servo-controller 

systems for high- and 

low-voltage PZTs). It delivers 

the required operating voltages 

for all available plug-in 

modules. 

Power Supply for E-501 Systems 

� Included in E-501 Chassis 

� Provides Power for all 

E-501-Installable Modules 

� 90-120 / 220-264 VAC 

Operating Range 

The E-531.00 multi-function 

power supply module is part of 

the E-501 chassis (for PZT 

amplifier & position-servo-controller 

systems for high- and 

low-voltage PZTs). It delivers 

the required operating voltages 

for all available plug-in 

modules. 



PZT Actuators 









Index 


Function: Linear regulated power supply 

Output voltages: +130 V, 0.2 A, -27 V, 0.2 A 

+24 V, 1 A, +/- 15 V, 0.5 A 

+5 V, 1 A 

Dimensions: 205 x 105 x 75 mm 

Weight: 1 kg 

Operating voltage: 90-120 VAC, 50-60 Hz 

220-264 VAC, 50-60 Hz 

Max. power consumption: 150 W 

Primary fuse: 0.63 A, slow 


info@pi.ws 


Function: Primary switching power supply 

Output voltages: +127 V, 0.6 A 

-33 V, 0.6 A 

+27 V, 4 A 

+/- 15 V, 1 A 

+5 V, 3 A 

Dimensions: 205 x 105 x 75 mm 

Weight: 1.1 kg 

Operating voltage: 90-264 VAC, 50-60 Hz (primary switching 

wide-range P/S) 

Max. power consumption: 150 W 

Primary fuse: 1.6 A, slow 

6-39 6-39 6-39 6-39 6-39 6-39 6-39 6-39

PZT amplifiers without position servo-control work according to the top branch of the diagram. 

The slew rate adjustment, servo ON/OFF switch and overflow indicator are only found on position 

servo-controllers. 

Note that the DC offset is added to the input voltage before it is amplified. 

6-40 6-40 6-40 6-40 6-40 6-40 6-40 6-40 

Typical PI PZT Amplifier & Position Servo-Controllers 

The diagram shows how the LVPZT amplifier input range can be varied with the DC-offset 

potentiometer. This principle is also valid for HVPZT amplifiers, where the typical input 

range is 0 to +10 V and the output range is 0 to -1000 V. The DC-offset potentiometer 

allows for continuous shifting of the input range between 0 V to +10 V and -10 V to 0 V. 


info@pi.ws 

Power Requirements for 

PZT Operation 

The frequency response of a 

given amplifier depends on the 

amplifier power, the amplifier 

design, and of course, the PZT 

capacitance. For dynamic 

applications, PZTs require high 

charge and discharge currents. 

Those requirements are best 

met by power amplifiers that 

can source and sink high peak 

currents. The average current 

is of secondary importance. 

For exact information 

on maximum operating frequency 

with a given PZT load 

refer to the individual frequency 

response graphs. 

Open-loop frequency response 

data for all PI PZT 

power amplifiers in this catalog 

were taken after 15 minutes 

of continuous operation 

(PZT and amplifier) at room 

temperature. At power up, 

(cold conditions) maximum 

operating frequency is higher. 

The indicated capacitance values 

are small-signal values for 

actual piezo actuators 

(measured at 1 V, 1000 Hz, 

20°C, no load). The capacitance 

of piezo ceramics 

changes significantly with 

amplitude, temperature, and 

load, up to approximately 

200% of the unloaded smallsignal 

capacitance at room 

temperature. See “Tutorial”, 

p. 4-30 for more information. 

Therefore the frequency 

response graphs actually 

reflect a much higher load to 

the amplifier than a standard 

capacitor of the same value 

would represent. 

Notes 

In order to achieve minimum distortion 

of the output waveform, it is 

important to ensure that the control 

input amplitude is reduced in proportion 

to the fall-off of the output 

voltage at higher frequencies. 

Example: The E-503 (E-663) amplifier 

can drive a 23 µF load at 100 V peakto-peak 

(sinewave) up to approximately 

15 Hz. At higher frequencies 

the output voltage drops off, e.g. to 

80 V at 20 Hz. Therefore it would be 

important to reduce the input voltage 

amplitude to 8 V (gain = 10) at 

this frequency. Otherwise the amplifier 

will output a clipped distorted 

sinewave.

When PI servo-controllers are 

ordered together with external 

sensors (E-115 LVDT sensors 

or D-015, D-050 or D-100 

capacitive sensors), PI offers a 

special precalibration service 

free of charge. The controller 

will be prepared for the 

required travel range and the 

dynamic control circuit will be 

pre-adjusted for the expected 

resonant frequency of the system. 

Notes 

Actuator/Sensor Configurations 

For more information on Position 

Servo-Control, please refer to “Tutorial: 

Piezoelectrics in Positioning” section. 

Rules of thumb: 

� Reducing the mass allows for 

increased bandwidth. 

� Better resolution (reduced noise) 

can be achieved by reducing the 

bandwidth and vice versa. 

� Open-loop operation is faster than 

closed-loop operation. 

Calibration Information 

When ordering external sensors, 

please provide the following 

information: 

� Travel range of the PZT 

positioning system to be 

controlled by the sensor 

� Expected first resonant 

frequency of the system 

� Sensor direction: Will the 

sensor be “compressed” 

or will it “expand” when 

the PZT Actuator expands 

(see sketch) 

To achieve optimum performance 

each position servo-controller 

must be calibrated for 

displacement range, frequency 

response, settling time and 

optimum match with the position 

sensor. This calibration is 

done at the factory and is free 

of charge. 

To optimize calibration, 

additional information about 

the application of the piezo 

is needed (see details 

below). Except for some digital 

controller setups, a calibrated 

controller can only be 

used with the PZT and sensor 

it was calibrated with. 

The controller must be recalibrated 

if either the PZT or 

the sensor is replaced. 

The position servo-control portion 

of all analog PI servo-controllers 

is identical, employing 

a proportional integral (P-I) controller. 

The proportional-integral 

gain is set internally with 

trimmers. Sensor bandwidth 

and control bandwidth can also 

be adjusted. If necessary a 

notch filter can be installed to 

PZT Servo-Control Requirements 

PZT Actuators 










info@pi.ws 

allow operation of the piezo 

positioning system closer to 

its mechanical resonant frequency. 

Please see block diagram 

on page 6-40 for further 

information on amplifier/servocontroller 

function. 

To optimize closed-loop calibration 

for your individual application, 

please provide us with 

the desired operating bandwidth, 

the mass to be moved 

by the piezo and, for force generation 

applications, the spring 

constant of the material the 

PZT pushes against. Without 

this information we will 

optimize your system for 

quasi-static operation! 

For a more detailed explanation, 

please refer to the 

“Tutorial: Piezoelectrics in 

Positioning” section 

Desired operating bandwidth: 

■ 0-10 Hz ■ 0-50 Hz ■ 0-100 Hz ■ 0-250 Hz ■ other: (______) Hz 

Maximum acceptable settling time (for step operation): 

■ 100 ms ■ 50 ms ■ 10 ms ■ 5 ms ■ other: (______) ms 

Mass to be moved by the piezo: 

■ 10 g ■ 50 g ■ 100 g ■ 500 g ■ 1kg ■ 5kg 

■ 10 kg ■ 50 kg ■ 100 kg ■ 500 kg ■ 1000 kg ■ other: (______) kg 

Cable between PZT and control electronics: 

■ 1 m ■ 2 m ■ 3 m ■ 5 m ■ 10 m ■ other: (______) m 

Spring constant: 

(Force generation applications in which the PZT pushes against an elastic load, e.g. a spring): 

■ 0.1 N/µm ■ 1 N/µm ■ 10 N/µm ■ 100 N/µm ■ 1000 N/µm ■ other: (______) N/µm 

Index 

6-41

E-115.21 dimensions (in mm) 

E-115.11 (l) and E-115.21 (r) 

LVDT position sensors 

P-895.00 

6-42 

Accessories 

E-115 LVDT Position Sensors 

E-115.11 and E-115.21 LVDT 

(linear variable differential 

transformer) position sensors 

can be used with E-509.L1, 

E-509.L3, E-610.L0 and 

E-662.LR PZT position servocontrollers 

for quasi-static, 

closed-loop operation of piezo 

E-115.11 dimensions (in mm) 


P-895.00 Extension Board 

The board is used for the 

extension of the 32 pin connector 

of all PI E-500 and 

E-501 electronics (except 

E-516.i3). It is required for 

calibration and maintenance 


info@pi.ws 

actuators and piezo Nano- 

Positioning systems. When 

ordering, please specify the 

required positioning range 

and operating direction 

(increasing displacement = tip 

moving inwards or outwards, 

see drawing on page 6-41), 

Models E-115.11 E-115.21 

Function LVDT Position Sensor LVDT Position 

Sensor 

Measuring range Max. ±1 mm Max. ±0.5 mm 

Bandwidth 5 Hz 5 Hz 

Measurement force at zero position 0.63 N 0.63 N 

work. To allow the measurements 

of electrical current, 

all traces on the board are 

jumpered. 

since the sensor circuit on the 

servo-controller has to be 

adjusted accordingly. Resolution 

is on the order of 10 -4 of 

the selected measuring range. 

For operating principle, see 

“Tutorial: Piezoelectrics in 

Positioning” section.

Notes 

Unless stated otherwise, PI LVPZT 

translators and NanoPositioners are 

equipped with LEMO connectors and 

1 m cables. The voltage connector is 

an FFS.00.250.CTCE24 as shown on the 

P-890.10 cable. The sensor connector is 

an FFA.0S.304.CLAC32 as shown on 

the P-892 cable (p. 6-45), at the right. 

Insulation materials are Teflon for the 

voltage cable and PUR for the sensor 

cable. 

P-891.xx LVPZT extension cable 

P-890 LVPZT cable LEMO/ solderable end 

P-891.xx LVPZT Extension 

Cable 

Plug (left): LEMO 

FFS.00.250.CTCE31 

Coupling (right): LEMO 

PCS.00.250.CTL.CTME31 

Cable: RG 174 (PVC) 

P-891.01 1 m 

P-891.02 2 m 

P-891.03 3 m 

P-891.05 5 m 

P-891.10 10 m 

P-890 LVPZT Cable LEMO/ 

Solderable End 

Plug: FFS.00.250.CTCE24 

(fits LVPZT amplifiers, e.g. 

E-505.00) 

Cable: RG 178 (Teflon) 

This cable can be soldered to 

PZTs with pigtails 

P-890.10 1 m 

P-890.20 5 m 

P-210.20 BNC Cable 

BNC plug / solderable end. 

Cable: RG 174 (PVC), 1m. This 

cable can be soldered to PZTs 

with pigtails 

P-894.10 LVPZT P-894.30 BNC 

adapter adapter 

P-893.10 BNC adapter cable 

Cables, Connectors & Adapters for 

LVPZT Translators 

P-894.30 BNC/LVPZT 

Adapter 

LEMO receptacle / BNC female, 

adapter 

Type: ABA.00.250.NTL 

Allows a cable with LEMO 

FFS.00.250 male plug to be 

attached to a device with BNC 

socket (e.g. direct operation of 

an LVPZT from a signal generator). 

P-894.10 LVPZT Adapter 

LEMO plug / 2 x LEMO receptacle, 

adapter 

Type: FTL.00.250.CTF. 1 x plug 

(right), 2 x coupling (left, center) 

Allows two cables with LEMO 

FFS.00.250 male plugs to be 

connected to a device with 

LEMO 00.250 socket (e.g. 

E-505.00 amplifier module) or 

P-891 extension cable. 

PZT Actuators 









Index 


info@pi.ws 

P-893.10 LVPZT/BNC Adapter 

Cable 

LEMO Plug / BNC female, 

adapter cable 

Cable: RG 174 (PVC), 1 m 

Plug:LEMO 

FFS.00.250.CTCE31 (male) 

and BNC.ST.250.NTAE31. 

Allows LVPZT amplifier output 

voltage (e.g. E-663) to be connected 

to an oscilloscope, etc. 

Continued on next page 

6-43

Notes 

Unless stated otherwise, PI HVPZT 

translators and NanoPositioners are 

equipped with LEMO connectors and 

1 m PVC cables. The voltage connector 

is an FFS.0A.250.CTAE31 as 

shown on the P-209 cable, left. 

With integrated P-177.10 strain gauge, 

an additional sensor cable is installed. 

The length of the sensor cable is 1 m, 

the material PUR and the connector a 

LEMO FFA.0S.304.CLAC32 as shown 

on the P-892 cable (p. 6-45) at right. 

P-209.xx extension cable for HVPZTs 

P-210.10 HVPZT cable 

6-44 

Accessories (cont.) 

P-209.xx HVPZT Extension 

Cable 

Plug (left): 

FFA.0A.250.CTAE31 

Coupling (right): 

PCA.0A.250.FTLE31 


P-209.01 1 m 

P-209.02 2 m 

P-209.03 3 m 

P-209.05 5 m 

P-209.10 10 m 

P-204.30 HVPZT / BNC 

Adapter 

BNC male / LEMO plug, adapter 

Allows cable with BNC plug to 

be attached to device with 

LEMO 0A.250 socket (e.g. 

E-507.00 amplifier module) or 

to P-209 extension cable. 

P-204.10 BNC adapter P-204.30 HVPZT adapter 

Cables, Connectors & Adapters for HVPZT Translators 


info@pi.ws 

P-210.10 HVPZT Cable LEMO/ 

Solderable End 

LEMO plug / solderable end, 1 m 

Plug: FFS.0A.250.CTAE31 

(fits HVPZT amplifiers, e.g. 

E-507.00) 


This cable can be soldered to 

PZTs with pigtails 

P-204.10 BNC / HVPZT 

Adapter 

LEMO receptacle / BNC female, 

adapter 

Type ABA.0A.250.NTL 

Allows a cable with LEMO 

0A.250 male plug (e.g. P-209) 

to be connected to device with 

BNC socket (e.g., for direct 

operation of an HVPZT from a 

signal generator).

P-892.xx Sensor extension cables for LVDTs and strain gauges 

D-892.xx capacitve sensor extension cables 

Sensor Extension Cables 

P-892.xx Sensor Extension 

Cable 

For strain gauge sensors or 

LVDTs. 

Plug (right): 

FFA.0S.304.CLAC32 

Coupling (left): 

PCA.0S.304.CLLC32 

Cable: 4 wires; #32 AWG 

(American) � #35 SWG 

(British) � � 0.20 mm; PVC 

insulation 

P-892.01 1 m 

P-892.02 2 m 

P-892.03 3 m 

P-892.05 5 m 

P-892.10 10 m 

PZT Actuators 









Index 


info@pi.ws 

D-892 Sensor Extension 

Cable Set 

For capacitive sensors. Set of 

two. 

Plug (e.g., far left) 

FFA.00.250.CTLC20 

Coupling (e.g., far right) 

PCA.00.250.CTAC22 

Cable: LSM 75 (Teflon) 

D-892.01 1 m 

D-892.02 2 m 

D-892.03 3 m 

6-45

6-46 

Recommended Amplifier/Controller 

Reference List 

The list below is referred to by 

technical data tables of the 

these sections of this catalog: 

“PZT Actuators”, 

“PZT Flexure NanoPositioners”, 

“PZT Active Optics” and 

“MicroPositioners”. 

For most PI PZT Actuators and 

PZT Nano-Positioning systems 

more than one amplifier/controller 

combination is available. 

The best choice depends on 

the application and personal 

preference. A low-level dynamic 

application does not 

require a high-power amplifier. 

In OEM applications, there 

may not be enough space 

for rackmount amplifiers/ 

controllers. The information 

below is a general guide; 

please refer to the technical 

data for each amplifier/controller 

for details, and call your 

local PI representative if you 

need further assistance. 

A: Quasi-Static Applications: 

* E-660.00 (bench-top) or 

* E-660.OE (OEM module) 

B: Low-Power Applications: 

E-463 (3-channel bench-top 

amplifier) 

B: Quasi-Static Applications: 

* E-461.00 (bench-top) or 

E-461.OE* (OEM module) 

C: E-610.00* OEM amplifier 

module 

D: E-610.S0* OEM amplifier/ 

controller module or 

E-662.SR* bench-top amplifier/controller 

E: E-610.L0* OEM amplifier/ 

controller module or 

E-662.LR* bench-top amplifier/controller 


info@pi.ws 

F: E-610.C0* OEM amplifier/ 

controller module 

G: Low- & Medium-Power 

Applications: E-500 (E-501) 

chassis + E-503 (threechannel 

amp.) + optional 

E-515/E-516 display/interface. 

Alternatively, E-663 (3channel 

bench-top amplifier) 

G: High-Power Applications: 

E-500 chassis + E-505* 

(1-channel amp.) + optional 

E-515/E-516 display/interface 

H: Low- & Medium-Power 

Applications: E-500 (E-501) 

chassis + E-503 (3-channel 

amp.) + E-509.ab controller 

(a: sensor type; b: # axis 

(see E-509 description) 

+ optional E-515/E-516 display/interface 

H: High-Power Applications: 

E-500 chassis + E-505 

(1-channel amp.) + E-509.ab 

controller (a: sensor type; 

b: # axes, see E-509 

description) + optional 


I: Low- & Medium-Power 

Applications: E-500 chassis 

+ * E-507 (1-channel amp.) 

+ optional E-515/E-516 display/interface. 

I: High-Power Applications: 

E-420 (OEM amplifier module) 

or E-470 (bench-top 

amplifier) or E-472 (2-channel, 

19“ rack). 

J: Low- & Medium-Level Dynamic 

Applications: E-500 

chassis + * E-507 (1-channel 

amp.) + E-509.ab (a: sensor 

type; b: # axis (see E-509 



J: High-Level Dynamic Applications: 

E-471 + E-509.a1 

(a: sensor type, see E-509 



K: E-710.3CD digital controller. 

Sub-D special connector for 

operation voltage and sensors. 

L: E-710.4CL digital controller. 

LEMO connectors for operating 

voltage and sensors. 

(See E-710 description for 

details). 

L: E-501.10/E-612.C0 or 

E-661.CP high-speed parallel 

port NanoAutomation ® controller. 

(See E-612.C0 description 

for details). 

M: E-750.CP digital controller. 

special sub-D connector for 

operating voltage and sensor 

signal. (See E-750 

description for details). 

N: E-760 NanoCube controller 

card. (See E-760 description 

for details). 

N: E-764.00 NanoCube controller. 

(See E-664.00 descruption 

for details). 

* Depending on the number 

of axes (channels) to be 

driven, more than one module 

may be required.

Ordering 

Information 

6-47 

E-621 

E-621.SR 

LVPZT Amplifier & Servo-Controller 

Module, Strain Gauge Sensor, 


E-621.LR 


Module, LVDT Sensor, RS-232 Interface 

E-500.621 

Basic Chassis, 19”, for up to 

12 Modules, Including Power Supply 

E-501.621 

Basic Chassis, 9.5”, for up to 

4 Modules, Including Power Suppy 



Module with High-Speed RS-232 Interface 

� Integrated 20-Bit High- 

Speed RS-232 Interface 

� Network Capability 

with up to 12 Channels 

� For LVDT and Strain 

Gauge Position Sensors 

The E-621 is a newly developed 

improvement on the 

E-610-series modular controller/amplifier 

for low-voltage 

PZTs and offers the full functionality 

of that line. In addition, 

the E-621 is equipped with an 

RS-232 interface and command 

interpreter, the submodule. 

New and Fast 

Communications Interface 

The RS-232 interface handles 

the communications with the 

outside world. It performs up 

to 300 read or write operations 

per second and incorporates 

Models E-621.SR, E-621.LR 

Function Power amplifier & position servo-control of LVPZTs 

Channels 


1 

Maximum output power 14 W 



Average output current 60 mA 


Voltage gain 10 +/- 0.1 


DC-offset setting 0 to +100 V 

Input Impedance 100 k� 

Dimensions 7T wide, 3H high 

Operating voltage 13 to 30 VDC, stabilized 

Operating current 


2 A 

D/A converter 20-bit resolution 

A/D converter (sensor) 20-bit resolution 

Baudrate 9.6 kBaud – 115.2 kBaud (default 115.2) 

Wave table 


64 values, 100 Hz, externally triggered (in preparation) 

Sensor types Strain gauge (E-621.SR), LVDT (E-621.LR) 

Servo characteristics 

Connectors 

P-I analog, notch filter 

PZT connector LEMO ERA.00.250.CTL 

Sensor connector LEMO EPL.0S.304.HLN 

Analog input SMB 

Monitor output SMB 

RS-232 9-pin sub-D (male) 


info@pi.ws 

E-621 Module 

precision 20-bit D/A and A/D 

converters for exceptional 

positional stability and resolution. 

The sub-module assumes 

all communications tasks with 

the host PC and/or with other 

networked modules in the 

system. 

Multi-Axis Network 

Communications between 

several E-621s with any combination 

of SGS and LVDT sensors, 

is also handled by the 

interface sub-module. Up to 

12 modules can be networked 

and controlled over a single 

RS-232 interface. The different 

modules are connected in parallel 

(not daisy-chained) over 

the link. A special chassis 

(E-500.621) is available for up to 

12 E-612 modules. It automatically 

provides the power and 

network connections to the 

individual E-621 modules, so 

no additional wiring is required. 

Only an additional 10 ms internal 

bus communications time 

is required to reach any of the 

units behind the one actually 

connected to the host PC. 

PI General Command Set 

The E-621 is to a large extent 

freely programmable and its 

command structure conforms 

to the PI General Command 

Set. This command set is common 

to the E-516 Piezo 

Interface and Display Module 

(see p. 6-58) and an increasing 

number of PI controllers. All 

new controllers for motors and 

actuators will understand these 

commands, either directly or 

via command libraries. This will 

greatly reduce the effort required 

to produce custom programs, 

especially in environments 

which include a number 

of different controllers. Included 

with the E-621 is userinterface 

software as well 

LabView and other driver 

sets.

E-621 open-loop frequency response with various PZT loads. Values shown are capacitance in µF, measured in actual PZT. 

4 x E-621 in an E-501.621 chassis 

PZT Actuators 









Index 


info@pi.ws 

6-48

E-831.02 amplifier module. 

Ordering 

Information 

E-831.02 

Single-Channel Amplifier Module 

for LVPZTs 

E-841.05 

Power Supply Module for E-831, 

Input 10 to 30 V 

E-842.05 

Power Supply Module for E-831, 

Input 30 to 72 V 

E-841.05 power supply module 

6-49 

E-831 

E-841 

E-842 

OEM Piezo Amplifier and 

Power Supply Modules 

� Cost Effective 

� Small Size 

� Low Noise, High Stability 

� Easy-to-Use 

� Full Overcurrent, Short- 

Circuit and Temperature 

Protection 

� Power-up/down Without 

Voltage Spikes 

The E-831.02 OEM piezo 

amplifier module is a very 

compact, cost-effective, single-channel 

power amplifier for 

low-voltage piezoelectric actuators 

(LVPZTs). 

It provides a peak output 

power of 12 W and average 

power of 2 W (expandable to 

5 W with external heat sink). 

The E-831.02 is a high-precision 

amplifier with a fixed gain 

of 10.0 and outputs voltages in 

the range of -20 to 120 V for 

control input signals ranging 

from of -2 to 12 V. The output 

is fully compensated for the 

capacitive loads of up to 10 µF 

typical of PI’s low-voltage PZTs 

such as PICMA ® piezo actuators. 

For monitoring purposes, 

the output voltage is internally 

divided by 100 and provided at 

a special monitor pin. 

Because piezo actuators require 

virtually no power in ste- 


info@pi.ws 

adystate operation and the 

power consumption depends 

on the operating frequency, 

high-powered amplifiers are 

not required for many applications. 

With a peak output current 

of 100 mA (sink/source) 

the E-831 is well-suited for 

switching applications and fast 

transitions where the capacitive 

load (the piezo actuator) 

needs to be charged as quickly 

as possible. The small-signal 

bandwidth is about 3kHz. 

Power Supplies for E-831.02 

The E-841.05 (input voltage 

range 10 to 30V) and E-842.05 

(input voltage range 30 V to 

72 V) switched power supply 

modules provide all the operating 

voltages (+/-15 V, -26 V 

and +127 V DC) required by 

the E-831.02 amplifier module. 

Both models supply enough 

power for up to three E-831.02 

amplifiers with a total output 

power of 5 W. 

A sync. input on the power 

supply allows synchronization 

of the internal switching frequency 

with an external clock 

(185 to 220 kHz) for elimination 

of interference in ACdriven 

position sensors or 

DACs. 

Easy Implementation 

E-831 and E-841/E-842 modules 

are enclosed in metal 

cases with solderable pins for 

PCB mounting. They are designed 

to work together without 

additional components. 

Triple Safety 

The E-831 amplifier is shortcircuit 

proof with both a lowspeed 

current limiter of 50 mA 

and a high-speed (8 msec) current 

limiter of 100 mA. When 

the case temperature rises 

above 70°C (can be reached 

after a few minutes with maximum 

current) an internal temperature 

sensor shuts down 

the output stage until the temperature 

drops below 60°C. 

This operation mode is indicated 

by the active-high 

TEMP-OFL TTL status line. 

Scheme for a three-channel amplifier consisting of an E-841 power supply 

and three E-831 amplifiers.

Tiny: E-841.05/E-842.05 dimensions in mm. 

Tiny: E-831.02 dimensions in mm, decimal places 

separated by commas in drawings. 

Technical Data E-831.02 

Model: E-831.02 

PZT Actuators 









Index 


info@pi.ws 

Function: Single-channel piezo amplifier module 

Operating voltages: +15 V / 20 mA (14 to16 V) 

(all currents without dynamic load) -15 V / 20 mA (-14 th -16 V) 

+127 V / 1.8 mA (+125 to 135 V) 

-26 V / 1.8 mA (-24 to -30 V) 

Output voltage range: from U+ - 6 V (121 V for U+ = 127 V) 

to U- + 8 V (-20 V for U- = 28 V) 

Gain 10 +/-0.1 

Max. output current: 100 mA for 8 ms (sink/source) 

Max. average current: 50 mA for 3 min without heatsink 

Output protection: short-circuit protected, the module is overload 

protected to 70°C case temperature 

Max. output power: 2 W without ext. heatsink 

5 W with ext. heatsink or forced airflow 

Control input range: -2 to +12 V 

Input impedance: 100 kohm 

Dynamic current requirements: depend on load, amplitude and slew rate 

Cut off frequency: 3.5 kHz, no load 

Operating temperature range: +5° to +50° Celsius 

Case Metal shielded case, size: 50x30x14 mm 

Soldering pins 1 mm diameter, 4 mm length 

Technical Data E-84x.05 

Models: E-841.05, E-842.05 

Function: Power Supply Module for E-831 

Output voltages: +127 V, 30 mA 

-26 V, 30 mA 

+15 V, 50 mA 

-15 V, 50 mA 

Max. output Power: 8 W 

Max. average Power 8 W with forced air flow (5W without) 

Output protection: short-circuit protected (1 min.) 

Input voltage: 10 - 30 V (E-841.05) 

30 - 72 V (E-842.05) 

Quiescent current: 70 mA @15 V 

35 mA @30 V 

15 mA @72 V 

Max. input current: 1000 mA (E-841.05 @ 10V) 

200 mA (E-842.05 @ 72V) 

Power-on, peak current: 1500 mA 

Switching frequency 100 kHz typical 

External clock frequency: 200 kHz (185 - 220 kHz possible) 

Synchronization signal: preferred TTL-level with duty cycle 50%; operating 

from 1.8 Vpp and offsets within ±7 V 

Output ripple: < 100 mVpp 

Operating temperature range: 5° to +50° Celsius (with power derating above 40 °C) 

Case Metal shielded case, size: 50x44x14 mm 

Soldering pins 1 mm diameter, 4 mm length 

6-50

LVPZT Amplifier Module - PI

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