Saes PS22 MGT Spec T

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Automatically Regenerable Clean Dry Air 

Purifier (10-120 Nm3/hr) 

The MegaTorr MGT Series CDA Purifiers are enhanced, optimized 

designs providing sub-ppb performance in small footprints. SAES Pure 

Gas has drawn on years of experience in Ultra-High Purity (UHP) piping 

design, advanced process material analysis and state of the art 

integrated control systems to develop this family of purifiers to meet the 

needs of low capital cost, high reliability and high performance. 

Purifier uses dual adsorption vessels that alternate between purify and 

regeneration modes, providing continuous purification. Adsorber 

regeneration is accomplished by back-flushing with purified process gas 

at an elevated temperature. 

Safety Features 

• Over Pressurization Safety System 

Provides over-pressurization protection for purifier vessels and 

piping. NOTE: This is not a full flow relief system - this is an 

internal relief system to accommodate blocked valve heating. 

• High Temperature Hardware Interlock 

For over-temperature protection independent of the control system 

Standard Features 

• Microprocessor PLC 

• Color Touch Screen Human Machine Interface (HMI) 

• Electric Gas Preheaters 

• Closed-Loop Temperature Controls 

• Alarm and Gas relay customer connections 

• Ground Fault Protection (GFI) 

• Emergency Off Button (EMO) 

Optional Features 

• Inlet and Outlet Isolation Valves for manual purifier isolation. 

• Auto or Manual Bypass allows process gas flow to bypass the 

purifier vessels. 

• Separate Control Power allows purifier control system to be 

powered by an external, customer supplied power source or UPS. 

• Particle Filter provides purified gas filtration. 

• MODBUS Data communication port provides operational data 

output. 

• Purifier Hold Down Brackets for securing purifier to floor. 

• Inlet/Outlet Pressure transducers provide process gas pressure 

indication. 

• Inlet Mass Flow Meter provides process gas flow rate and total 

flow indication. 

• Internal Bypass Column. (For sizes MGT10~30, requires cabinet 

for MGT40~60 if option is ordered.) 

• Optics Applications Package; including SEMI S2 certification, 

Moisture indicator, and Ultra-fine particle filter. 

Applications 

• Semiconductor 

• Flat Panel Display 

• LED / Compound Semiconductor 

• Fiber Optic 

• Research 

• Solar 

Model 

PS22-MGT10- CDA 



Rated Flow 

10 Nm3/hr (~166 slpm) 

20 Nm3/hr (~333 slpm) 

30 Nm3/hr (~500 slpm) 







40 Nm3/hr (~666 slpm) 

50 Nm3/hr (~833 slpm) 

60 Nm3/hr (~1,000 slpm) 

90 Nm3/hr (~1,500 slpm) 

100 Nm3/hr (~1,666 slpm) 

120 Nm3/hr (~2,000 slpm) 

Product Specifications (for all models) 

Gas Purified 

Clean Dry Air (CDA) 

Inlet Requirements (Process Gas) 

CDA: 5.0 N Inlet Purity*, 20 micron max particle size 

0-35ºC (32-95ºF), 3.5-10 barg (50-150 psig) 

Impurities Removed 

H 2 O < 1 ppbV; Volatile Acids, TOC (>58 amu), Refractories < 1 pptV; Volatile Bases < 5 pptV* 

Particle Filtration 

2 micron (standard) 

0.003 micron (optional) 

Pressure Drop 

< 0.7 bard (~10 psid) 

(Without options at maximum flow, 6.9 barg inlet) 

Clean dry air or nitrogen filtered to 10 μm 

Instrument Air 

Min-Max Pressure: 6.6 – 9.7 barg (~95 – 140 psig) 

Applicable Codes & Standards 

ASME Pressure Vessel Standards Section VIII 

US National Electric Code 

CE Marking (Must be specified on order) 

Manufacture License of Pressure Vessels, Peoples Republic of China (Must be specified on order) 

* Consult factory for non‐standard inlet or outlet purity requirements. Analytical specification certified at greater than 10% of the max flow. 

S110‐964_A DCN 4905 2 Specification subject to change 


Facility Specifications 

Purifier Model PS22-MGT10-CDA PS22-MGT20-CDA PS22-MGT30-CDA 

Dimensions 

(If internal bypass column is 

ordered, see MGS40~60 

dimensions.) 

Purifier Clearance 

Height: 1375 mm (~54 in) 

Width: 800 mm (~31 in) 

Depth: 400 mm (~15 in) 

Weight: < 110 Kg (< 242 lbs.) 

1 meter ( ~3 feet) in front; 150 mm (~6 inches) left and right sides 

Mechanical Connections 

Feed Inlet: ½” FVCR 

Purified Outlet: ½” FVCR 

Regeneration/Relief Vent: ½” FVCR 

Cabinet Vent: 4” duct 

Instrument Air Inlet: 3/8” FNPT 

Regeneration Vent Temp. 

Ambient air + 30°C (+ 54°F) 

Purify Time 

Programmable 

CDA Consumed per Regen 135 m 3 135 m 3 135 m 3 

Main Power 

Installed Power: 1150 W 

208 or 230 VAC, 1 Phase, 50/60 Hz 

Power Consumption during Purification: 0.1 kW 

Power Consumption during Regeneration: 0.6 kW 

Separate Control Power 

(Option) 

110 or 230 VAC, 1 Phase, 50/60 Hz 

Power Consumption: 0.1 kW 

Cabinet Ventilation 170 Nm 3 /hr (100 scfm) [@ Facilities Vacuum - 0.2 inches H 2 O] 

Installation 

Indoor, Ambient Temp (min – max) 5° – 35°C (41° – 95°F) 

Dimensions 

PS22-MGT10-CDA (10 Nm3/hr) through PS22-MGT30-CDA (30 Nm3/hr) 





Dimensions 




Purify Time 


Width: 865 mm (~34 in) 

Depth: 610 mm (~24 in) 

Weight: < 180 Kg (< 400 lbs.) 

1 meter ( ~3 feet) in front and back 

Feed Inlet: ½” FVCR 

Purified Outlet: ½” FVCR 





Programmable 


Main Power 


(Option) 

Installed Power: 2.4 kW 

208 or 230 VAC, 1 Phase, 50/60 Hz 


Power Consumption during Regen: 1.21 kW 

110 or 230 VAC, 1 Phase, 50/60 Hz 



Installation 


Dimensions 






Dimensions 


Width: 1000 mm (~40 in) 

Depth: 700 mm (~28 in) 

Weight: < 300 Kg (< 660 lbs.) 


1 meter ( ~3 feet) in front and back 


Feed Inlet: ¾” FVCR 

Purified Outlet: ¾” FVCR 






Purify Time 

Programmable 


Main Power 

Installed Power: 2.9 kW 

208 or 230 VAC, 1 Phase, 50/60 Hz 


Power Consumption during Regen: 1.4 kW 


(Option) 

110 or 230 VAC, 1 Phase, 50/60 Hz 



Installation 


Dimensions 




Piping Diagram 

For all models

Saes PS22 MGT Spec T

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