Saes PS22 MGT Spec T

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Automatically Regenerable Clean Dry Air Purifier (10-120 Nm3/hr) The MegaTorr MGT Series CDA Purifiers are enhanced, optimized designs providing sub-ppb performance in small footprints. SAES Pure Gas has drawn on years of experience in Ultra-High Purity (UHP) piping design, advanced process material analysis and state of the art integrated control systems to develop this family of purifiers to meet the needs of low capital cost, high reliability and high performance. Purifier uses dual adsorption vessels that alternate between purify and regeneration modes, providing continuous purification. Adsorber regeneration is accomplished by back-flushing with purified process gas at an elevated temperature. Safety Features • Over Pressurization Safety System Provides over-pressurization protection for purifier vessels and piping. NOTE: This is not a full flow relief system - this is an internal relief system to accommodate blocked valve heating. • High Temperature Hardware Interlock For over-temperature protection independent of the control system Standard Features • Microprocessor PLC • Color Touch Screen Human Machine Interface (HMI) • Electric Gas Preheaters • Closed-Loop Temperature Controls • Alarm and Gas relay customer connections • Ground Fault Protection (GFI) • Emergency Off Button (EMO) Optional Features • Inlet and Outlet Isolation Valves for manual purifier isolation. • Auto or Manual Bypass allows process gas flow to bypass the purifier vessels. • Separate Control Power allows purifier control system to be powered by an external, customer supplied power source or UPS. • Particle Filter provides purified gas filtration. • MODBUS Data communication port provides operational data output. • Purifier Hold Down Brackets for securing purifier to floor. • Inlet/Outlet Pressure transducers provide process gas pressure indication. • Inlet Mass Flow Meter provides process gas flow rate and total flow indication. • Internal Bypass Column. (For sizes MGT10~30, requires cabinet for MGT40~60 if option is ordered.) • Optics Applications Package; including SEMI S2 certification, Moisture indicator, and Ultra-fine particle filter. Applications • Semiconductor • Flat Panel Display • LED / Compound Semiconductor • Fiber Optic • Research • Solar Model PS22-MGT10- CDA PS22-MGT20- CDA PS22-MGT30- CDA Rated Flow 10 Nm3/hr (~166 slpm) 20 Nm3/hr (~333 slpm) 30 Nm3/hr (~500 slpm) PS22-MGT40- CDA PS22-MGT50- CDA PS22-MGT60- CDA PS22-MGT90- CDA PS22-MGT100- CDA PS22-MGT120- CDA 40 Nm3/hr (~666 slpm) 50 Nm3/hr (~833 slpm) 60 Nm3/hr (~1,000 slpm) 90 Nm3/hr (~1,500 slpm) 100 Nm3/hr (~1,666 slpm) 120 Nm3/hr (~2,000 slpm) Product Specifications (for all models) Gas Purified Clean Dry Air (CDA) Inlet Requirements (Process Gas) CDA: 5.0 N Inlet Purity*, 20 micron max particle size 0-35ºC (32-95ºF), 3.5-10 barg (50-150 psig) Impurities Removed H 2 O < 1 ppbV; Volatile Acids, TOC (>58 amu), Refractories < 1 pptV; Volatile Bases < 5 pptV* Particle Filtration 2 micron (standard) 0.003 micron (optional) Pressure Drop < 0.7 bard (~10 psid) (Without options at maximum flow, 6.9 barg inlet) Clean dry air or nitrogen filtered to 10 μm Instrument Air Min-Max Pressure: 6.6 – 9.7 barg (~95 – 140 psig) Applicable Codes & Standards ASME Pressure Vessel Standards Section VIII US National Electric Code CE Marking (Must be specified on order) Manufacture License of Pressure Vessels, Peoples Republic of China (Must be specified on order) * Consult factory for non‐standard inlet or outlet purity requirements. Analytical specification certified at greater than 10% of the max flow. S110‐964_A DCN 4905 2 Specification subject to change WWW.TEESING.COM | TEL +31 70 413 07 50
Facility Specifications Purifier Model PS22-MGT10-CDA PS22-MGT20-CDA PS22-MGT30-CDA Dimensions (If internal bypass column is ordered, see MGS40~60 dimensions.) Purifier Clearance Height: 1375 mm (~54 in) Width: 800 mm (~31 in) Depth: 400 mm (~15 in) Weight: < 110 Kg (< 242 lbs.) 1 meter ( ~3 feet) in front; 150 mm (~6 inches) left and right sides Mechanical Connections Feed Inlet: ½” FVCR Purified Outlet: ½” FVCR Regeneration/Relief Vent: ½” FVCR Cabinet Vent: 4” duct Instrument Air Inlet: 3/8” FNPT Regeneration Vent Temp. Ambient air + 30°C (+ 54°F) Purify Time Programmable CDA Consumed per Regen 135 m 3 135 m 3 135 m 3 Main Power Installed Power: 1150 W 208 or 230 VAC, 1 Phase, 50/60 Hz Power Consumption during Purification: 0.1 kW Power Consumption during Regeneration: 0.6 kW Separate Control Power (Option) 110 or 230 VAC, 1 Phase, 50/60 Hz Power Consumption: 0.1 kW Cabinet Ventilation 170 Nm 3 /hr (100 scfm) [@ Facilities Vacuum - 0.2 inches H 2 O] Installation Indoor, Ambient Temp (min – max) 5° – 35°C (41° – 95°F) Dimensions PS22-MGT10-CDA (10 Nm3/hr) through PS22-MGT30-CDA (30 Nm3/hr) S110‐964_A DCN 4905 3 Specification subject to change WWW.TEESING.COM | TEL +31 70 413 07 50
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