Robust Optimization: Design in MEMS - University of California ...

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47respective uncertainty models and were shown to be far more robust to uncertaintywhen compared with 1000 random designs which met the constraints and nailed thetarget frequency.
48Bibliography[1] What is MEMS Technology? MEMSnet. November 27, 2002.[2] Petersen, Kurt E. “Silicon as a Mechanical Material.” Proceedings of theIEEE vol. 70 no. 5 (May 1982): pp. 420-457.[3] Tang, W.C. PhD Thesis, University of California, Berkeley, CA (1990).[4] Maluf, Nadim. An Introduction to Microelectromechanical Systems Engineering.Boston: Artech House, 2000.[5] Pister, Kris. Introduction to MEMS Design and Fabrication. EECS 245Reader University of California, Berkeley, CA (Fall 2001). pp. 9-45.[6] Sharpe, W. N., K.T. Turner, and R.L. Edwards. “Tensile Testing of Polysilicon.”Experimental Mechanics vol. 39 no. 3 (September 1999): pp. 162-170.[7] Nocedal, Jorge, and Stephen J. Wright. Numerical Optimization. New York:Springer-Verlag, 1999.[8] Strang, Gilbert. Linear Algebra and its Applications. Orlando: HarcourtBrace Jovanovich College Publishers, 1988.[9] Rao, Singiresu S. Engineering Optimization. New York: John Wiley & Sons,Inc., 1996.
Page 1 and 2: Robust Optimization:Design in MEMSb
Page 4 and 5: 36 Conclusion 46Bibliography 48A Al
Page 6 and 7: 5List of Tables3.1 Probabilities wi
Page 8 and 9: 7Chapter 1IntroductionMicro-electro
Page 11 and 12: 10performance, f(x, 0), is equal to
Page 13 and 14: 12function f(x), there are several
Page 15 and 16: 14Chapter 3Optimization AlgorithmIn
Page 17 and 18: 16paribus. This can be very effecti
Page 19 and 20: 18to the active linear constraints
Page 21 and 22: 20can all the constraints be satisf
Page 23 and 24: 22Chapter 4Optimization ExamplesWe
Page 25 and 26: 2475007300220200t 1t2t 37100180Cost
Page 27 and 28: 26design variables, other than the
Page 29 and 30: 28Chapter 5Robust Design Examples5.
Page 31 and 32: 30where ¯f is the w 2 design , Σ
Page 33 and 34: 32design along the line c 2 (x) = 0
Page 35 and 36: 34550500450(5)global solutionPath 1
Page 37 and 38: 36Figure 5.6: Diagram of Six Variab
Page 39 and 40: 38problem is well-defined. Before a
Page 41 and 42: 405.2.3 Robust DesignWe will use th
Page 43 and 44: 42evident by noting that the c 2 (x
Page 45 and 46: 44Robust Uncorrelated DesignAverage
Page 47: 46Chapter 6ConclusionIn this report
Page 51: 50Appendix AAlkylation Constantsi c

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