MikroMasch Brochure (1.8 MB) - Schaefer Technology

test structuresTGXYZ SeriesCalibration gratings from the TGXYZ series are arrays of different structures comprisingrectangular silicon dioxide steps on a silicon wafer. The small square in the center withdimensions 500 µm by 500 µm includes circular pillars and holes, as well as lines in the X- and Y-direction with a pitch of 5 µm. The large square with dimensions 1 mm by 1 mm contains squarepillars and holes with a pitch of 10 µm.10 µmSEM image of a TGXYZ02gratingActive area . . . . . . . . . . . . . . . . . . . . 1 x 1 mmChip dimensions . . . . . . . . . . . . . . .5 x 5 x 0.3 mmPart number Step Height Pitch Pitchheight* accuracy accuracyTGXYZ01 20 nm 2% 5 and 10 µm 0.1 µmstep height*TGXYZ02 100 nm 3% 5 and 10 µm 0 .1 µmTGXYZ03 500 nm 3% 5 and 10 µm 0.1 µmpitch*The dimensions marked * are given for reference only. The actualstep height, shown on the label of the individual grating box may differslightly from the nominal value.applicationTGX SeriesThe TGXYZ calibration gratings are intended for vertical and lateral calibration of SPM scanners.The vertical non-linearity can be compensated for by using several calibration gratings withdifferent nominal step heights.The silicon calibration grating TGX is an array of square holes with sharp undercut edges formedby the (110) crystallographic planes of silicon. The typical radius of the edges is less than 5 nm.Part number . . . . . . . . . . . . . . . . . . . . . . TGX1 µmSEM image of a TGX01 gratingActive area . . . . . . . . . . . . . . . . . . . . 1 x 1 mmChip dimensions . . . . . . . . . . . . . . 5 x 5 x 0.3 mmEdge radii . . . . . . . . . . . . . . . . . . . . . . < 5 nmPitch . . . . . . . . . . . . . . . . . . . . . . . . . . 3 µmPitch accuracy . . . . . . . . . . . . . . . . . . . 0.1 µmStep height* . . . . . . . . . . . . . . . . . . . . . 1 µmheightedgepitchThe dimensions marked * are given for reference only.applicationTGX calibration gratings are intended for determination of the tip aspect ratio and for lateralcalibration of SPM scanners. The gratings can also be used for detection of lateral non-linearity,hysteresis, creep, and cross-coupling effects.16