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Sensors & Transducers - International Frequency Sensor Association

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<strong><strong>Sensor</strong>s</strong> & <strong>Transducers</strong>, Vol. 148, Issue 1, January 2013, pp. 1-10circuit is to measure capacitance change usingdifferential structure. It uses TSMC 0.35 μm bulkCMOS process for fabrication. It has very highresolution and high degree of linearity. It is useful forbiomedical sensor applications and used a RC phasedelay concept to measure capacitance change. It usesMOSFET switch to avoid nonlinearity. The output ofthis is stable and linear with very high resolution. Thedesign is simple and requires a small number ofcomponents. Interfacing with a microcontrollermeasures charging and discharging time of unknowncapacitor through known capacitance. It’s simple andlow cost technique. It is mainly used for interfacingcircuits. Used novel oscillator concept to measurecapacitor change, it gives very high resolution, highaccuracy and high stability. It has very less sensitivityto noise. The output has high stability and highaccuracy. It has negligible influence of parasiticcapacitance and a capacitance to phase angleconversion for measurement. It has a high resolutionand linear output. The system has an extremely highstray immunity. It is used to measure very smalldisplacement.Table 1 shows comparing the various parametersof the design for capacitance measurement isprovided. It provides the details regardingmethodology, measurement range, sensitivity, errorand application of the design. The application ofthese Capacitance Measurement techniques could beextended to the MEMS based sensors as well [14].MethodologyTable 1. Comparison summary of various design techniques and their applicationsMinimummeasurementvalueDouble Differential Principle aF 2.5 ppmSensitivity Error Applications0.92 pF for 1 µFcapacitorDifferential Principle fF 1.32 mV/fF -Measure very smallcapacitance changewhere initial can beunknown mainly inindustries andinterfacing circuits.Bio-medical sensorapplicationRC Phase Delay pF 246 mV/fF 2.6 % Micro sensorsCharging and Discharging usingBelow 4 % FSRpF -Interfacing circuitsmicrocontrollerfor 1 pF to 10 pF100 aF for 2 pFOscillator pF -Interfacing circuitscapacitorCapacitance to phase angleconversionA CMOS Integrated Capacitanceto-<strong>Frequency</strong>Converter withDigital Compensation CircuitDesigned for <strong>Sensor</strong> InterfaceApplicationsA 16-channel capacitance-toperiodconverter for capacitivesensor applicationsCapacitance to <strong>Frequency</strong>Converter Suitable for <strong>Sensor</strong>Applications Using TelemetryUniversal Capacitive <strong><strong>Sensor</strong>s</strong> and<strong>Transducers</strong> Interface (USTI)pF 32 ppm Less than 0.5%Very small displacementmeasurements.4-24 pF NA NA <strong>Sensor</strong> interfaceNA NA NA <strong>Sensor</strong> interfaceNA NA NA50 pF to100 µFNA ±0.036 %Suitable design forpassive telemetrysystemsVaried applications.Suitable for wide rangeC/F convertersReferences[1]. D. M. G. Preethichandra, Katsunori Shida,A Simple Interface Circuit to Measure Very SmallCapacitance Changes in Capacitive <strong><strong>Sensor</strong>s</strong>, IEEETrans. Instrum. Meas., Vol. 50, Dec. 2001,pp. 1583-1586.[2]. M. R. Haider+, M. R. Mahfouz, S. K. Islam, S. A.Eliza, W. Qu and E. Pritchard, A Low-powerCapacitance Measurement Circuit with HighResolution and High Degree of Linearity, IEEECircuits and Systems, Sep. 2008, pp. 261-264.[3]. Robert N. Dean and Aditi Rane, An ImprovedCapacitance Measurement Technique Based of RCPhase Delay, in Proceedings of the IEEE Instrum.Meas. Tech. Conf., 2010, pp. 367-370.[4]. F. Reverter, M. Gasulla, and R. Pallàs-Areny,A low-cost microcontroller interface for low-valuecapacitive sensors, in Proceedings of the IEEE IMTC,Como, Italy, May 2004, pp. 1771–1775.[5]. Frank M. L. van der Goes and Gerard C. M. Meijer,A Novel Low-Cost Capacitive-<strong>Sensor</strong> Interface, IEEETrans. Instrum. Meas., Vol. 45, Apr. 1996, pp. 536–540.9

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