SINGULUS & STANGL - Singulus Technologies AG

SINGULUS & STANGL 

Smart Solutions for 

Crystalline Silicon & Thin-Film Photovoltaics 

Smart Solutions to Drive the Future.

02 

SINGULUS PHOTOVOLTAICS 

SINGULUS TECHNOLOGIES Headquarters, Kahl/Main, Germany SINGULUS STANGL SOLAR, Fürstenfeldbruck, Germany 

SINGULUS TECHNOLOGIES – Transition from Machine Supplier to System Provider 

SINGULUS TECHNOLOGIES is the 

world market leader in manufacturing mass 

production equipment for Optical Discs 

CD/DVD/Blu-ray. With the acquisition of 

the solar company STANGL, the foundation 

was laid to establish SINGULUS in the 

photovoltaics market. Since 2007 STANGL 

is part of the SINGULUS TECHNOLOGIES 

Group and has become a 100 % subsidiary 

of SINGULUS on December 7, 2009. The 

international network supports customers 

by working closely with them as partners. 

The reliable, efficient and cost-saving 

function of the systems takes priority here. 

Numerous new products were developed 

and made marketable at SINGULUS and 

SINGULUS STANGL SOLAR. 

The company’s target is to position itself 

at the forefront for the introduction of new 

technologies with respect to silicon and 

thin film solar technology. SINGULUS 

will offer a broad product range of new 

machines for the photovoltaics industry, 

which will offer manufacturers of silicon 

cells new production technologies and 

therefore particular cost advantages. 

Especially during times of cost pressures 

in the photovoltaics market the interest 

regarding new cost efficient concepts 

increases. 

SINGULUS and SINGULUS STANGL 

SOLAR are cooperating with leading cell 

manufacturers in the development of new 

technologies and new machine designs 

for improved cell concepts with higher 

efficiency and manufacturing technologies 

with decreasing production costs. The 

company’s target is to position itself at 

the forefront for the introduction of new 

technologies with respect to silicon as 

well as thin film solar technology. 

SINGULUS and SINGULUS STANGL 

SOLAR will systematically expand 

the solar activities. Both companies 

complement each other ideally in being 

able to offer a broad product range of 

equipment and advanced production 

solutions for the photovoltaics industry 

in the coming years.

SINGULUS APPROACH 

Design of Dedicated PV Equipment 

Improvement of Productivity Improvement of Cell Efficiency 

High Yield High Uptime 

Small 

Footprint 

Fast 

Ramp-up 

Time 

SINGULUS offers single products 

and integrated systems for Si-Cell 

Manufacturing 

Today´s dominating solar cell concept 

bases on cells made from crystalline 

silicon. STANGL provides completely 

automated solutions for poly silicon 

SINGULUS enables cost-effective 

CIS/CIGS & CdTe Thin Film Cell 

Manufacturing 

New 

Processes 

Thin film solar panels offer specific 

advantages compared to the silicon solar 

technology. Amongst them is the fact that 

the efficiency is retained during periods of 

weak sun intensity and that they are very 

Low Number 

of Handling 

Steps 

Layer 

Stacks 

03 

Crystalline Silicon Solar Technology 

etching as well as treatment for Si 

wafers & cells in standard and highefficiency 

production lines. SINGULUS 

e.g. has developed the SINGULAR 

machine, a PECVD coating system 

which meets the demands for both 

current and future PV cell production. 

Thin Film Solar Technology 

easily integrated into architectural design 

elements. SINGULUS is the market leader 

for the wet-chemical cleaning applying 

CIS and CdTe processes. 

SINGULUS TECHNOLOGIES develops 

and assembles new machine concepts 

for the vacuum coating, selenisation, 

diffusion and other "dry processes".

04 

CRYSTALLINE SILICON SOLAR 

Wafer Inspection 

System 

Business 

SINGULUS System Business: From Wafer to Si-Solar Cells 

SINGULUS & SINGULUS STANGL SOLAR 

provide completely automated solutions for 

poly silicon etching as well as treatment 

for Si wafers & cells in standard and highefficiency 

production lines as well AR 

coating systems for both current and 

future PV cell production. 

SINGULUS entered strategic partnerships 

to offer front-end technology for 

the production of silicon solar cells as a 

one-stop supplier as well as complete, 

integrated production systems. Such 

complete systems cover all individual 

production steps from the first cleaning 

process of the silicon wafer to the 

finished silicon solar cell. In the future 

SINGULUS will focus rigorously on the 

Saw Damage Edge 

Texturisation 

SILEX/LINEA 1 

Phosphorus 

Diffusion 

Partner 

Cell Sorting 

Partner 

Contact Firing 

Partner 

system activities with production 

equipment for solar cells and leverage 

the know-how of coating and automation 

technology, the wet-chemical processes 

as well as system concepts. 

SINGULUS and STANGL already 

possess the necessary basic 

expertise for wet-chemical 

and AR-coating processes. 

This enhancement of 

the business model 

from single machines 

towards systems was 

also successful in the 

Optical Disc market 

some years ago. 

2 

Phosphorus Removal 

Edge Isolation 

SILEX/LINEA 

3 

SiN Deposition 

SINGULAR 

Screen Printing 

Partner 

SINGULUS 

Partner

05 

SINGULUS SYSTEM BUSINESS 

SOLARE System for Batch Production of Crystalline Silicon Solar Cells 

1 


3 

Phosphorus Diffusion 

4 SILEX 

PSG Removal 

5 SINGULAR 

AR Coating & Passivation 

6 

Printing 

SOLARE System for Inline Production of Crystalline Silicon Solar Cells 

1 


2 SILEX 

SDE and Texturing 

2 LINEA 

SDE and Texturing 

Crystalline Silicon Solar Technology – 

Transition from Machine Supplier 

to System Provider with the new 

SOLARE Production Line 

The company's target is to position itself 

at the forefront for the introduction of new 

technologies with respect to silicon solar 

technology. SINGULUS will offer a broad 

product range of new machines for the 

photovoltaics industry, which will offer 

manufacturers of silicon cells new 

production technologies and therefore 

particular cost advantages. Especially 

during times of cost pressures in the 

photovoltaics market the interest 

regarding new plant concepts increases. 

SINGULUS & SINGULUS STANGL SOLAR 

provide completely automated solutions 

for polysilicon etching as well as treatment 

of Si wafers & cells in standard and high- 

3 

Phosphorus Diffusion 

4 LINEA 

PSG Removal/Edge Isolation 

5 SINGULAR 

AR Coating & Passivation – 

2 Systems 

efficiency production lines as well as 

AR coating systems for both current and 

future PV cell production. SINGULUS 

entered strategic partner-ships to offer 

front-end technology for the production of 

silicon solar cells as a one-stop supplier 

as well as complete, integrated production 

systems. Such complete systems cover all 

individual production steps from the first 

cleaning process of the silicon wafer to 

the finished silicon solar cell. In the 

future SINGULUS will focus rigorously 

on the system activities with production 

equipment for solar cells and leverage, 

the know-how of coating and automation 

technology, wet-chemical processes as 

well as system concepts. 

Combined with STANGL's machines, 

SINGULUS TECHNOLOGIES offers the 

key-technology for a crystalline silicon 

solar cell production line with wet-chemical 

7 

Firing 

6 

Printing 

8 

Edge Isolation & Testing/Sorting 

7 

Firing 

8 

Testing/Sorting 

systems from STANGL for saw damage 

edge & texturisation as well as PSG 

removal and the SINGULUS vacuum 

coating and wafer handling technology. 

This enhancement of the business model 

from single machines towards systems 

was also successful in the Optical Disc 

market some years ago. 

SINGULUS TECHNOLOGIES is a 

_ Specialist for special metallization 

processes utilizing the PECVD and 

PVD technology 

_ Specialist for inline process technology 

_ Provider of worldwide sales and service 

_ World market leader for Blu-ray disc 

and DVD/CD replication lines 

_ Manufacturer of molding machines 

and mastering systems

Crystalline Silicon Solar 

06 

GERULUS 

Wafer Block Pre-Clean & Deglue System 

1 Transport cart 

2 Input buffer 

3 Pre clean-bath 

4 Deglue chamber 

5 Output buffer 

6 Installation area 

7 Waste water pump stations (optional) 

8 Hot DI water station (optional) 

9 Surfactant dosage 

10 Dirt and pure water tanks 

11 Centrifuge 

GERULUS 

1 2 3 4 5 

1 

Virtually all silicon based wafers are 

cutted by wire saw technology. The 

STANGL GERULUS Pre-clean & Deglue 

system processes the wafers after being 

cut. This includes removal of slurry as 

well as degluing the wafers from their 

carrier beam. 

The GERULUS system can be configured 

in a wide range to adapt to all kinds 

of slurry and glue types. To guarantee 

lowest possible water and surfactant 

consumption, the system can be 

equipped with a water & SiC recycling 

system. 

6 

8 

7 

9 

10 11 

Main Features 

_ Patented wafer block cleaning 

_ Proven, highly integrated design 

_ High throughput up to 7,200 wph 

_ Built for non-stop utilization: 24/7, 

360 days/year 

_ High availability (uptime > 95 %) 

_ Sophisticated pre-cleaning concept 

for best process results and minimal 

process times 

_ Compliance with international safety 

regulations

WB- 

PreCLEAN 

WB- 

ALTEX 

WB-SDE 

WB- 

ISOTEX 

WB- 

COMBI 

WB- 

PSG+ 

LOAD 

(SCALE) 

LOAD 

(SCALE) 

LOAD 

SCALE 

LOAD 

SCALE 

LOAD 

Today´s dominating solar cell concept 

bases on cells made from crystalline silicon. 

STANGL provides complete automated 

dry-in/dry-out solutions for wet treatment 

of Si-wafers in standard and high-efficiency 

cell lines. 

Batch-type working Wet Benches (WBseries) 

are the “workhorses” for cleaning 

and etching processes in Si-cell technology. 

07 

SILEX 

Batch-Type Wet Process Equipment for c-Si Solar Cell Production 

PRECLEAN RINSE 

DRY 

POST 

RINSE SDE+ALTEX RINSE 

CLEAN 

RINSE 

ISOTEX RINSE ISOTEX RINSE PorSi RINSE POST RINSE 

CLEAN 

ISOTEX 

PSG 

ECH 

LOAD 

(SCALE) 

SDE 

RINSE 

RINSE 

ISOTEX 

RINSE CLEAN 

RINSE 

RINSE 

POST 

CLEAN 

DRY 

UNLOAD 

RINSE 

UNLOAD 

Our machines are matched to the demands 

of solar cell mass production by 

_ lowest cost of ownership 

_ outstanding machine and process 

reliability 

_ state-of-the-art design and 

technology 

Main Features 

_ Proven, highly integrated design 

_ High throughput up to max. 1,500 or 

3,000 wph 

DRY UNLOAD 

SCALE 

DRY 

UNLOAD 

SCALE 

DRY 

RINSE ALTEX RINSE POST RINSE 

CLEAN 


UNLOAD 

SCALE 

DRY UNLOAD 

SCALE 


_ Low breakage rate (< 0,05 %) 

_ High flexibility in process sequence, 

wafer type, wafer size 

_ Wafer thickness down to 150 µm 

_ Internal automatic chemical bath 

management 

_ Reproducible process results by 

complex process parameter control 

_ Network communication support 

_ Carrier tracking and data logging 

_ Compliance with international safety 

regulations


08 

LINEA 

Inline Wet Process Equipment for c-Si Solar Cell Production 

WL-ISOTEX 

Acidic SDE / Isotexturing LOAD ISOTEX RINSE PorSi RINSE CLEAN RINSE DRY 

WL-PSG 

P-SiO2-Glass / Removal 

WL-PSG-EE 

P-SiO2-Glass / Removal / Edge Isolation 

WL-FC 

US-Clean / Alkaline / Acidic 

Manufacturing lines of multicrystalline solar 

cells preferably apply acidic texturing 

processes on inline-working machines. 

PSG Removal processes are running 

successfully in batch and inline-type 

equipment. 

Additionally inline equipment permits singleside 

etching, applicable for edge isolation 

or side-selective surface treatment. LINEA 

is a horizontally working inline wet process 

platform for cleaning and etching of crystalline 

solar wafers. STANGL’s LINEA inline 

etching system can be configured up to max. 

1,700 or 3,400 wafers per hour (156 mm) 

which equals a production capacity of 

LOAD 

EMITTER 

ETCH 

50 and 100 MW. LINEA completes the 

portfolio of STANGL’s integrated wet 

process solutions for solar cell manufacturing 

lines. 

RINSE 

LOAD 

The LINEA design is based on a newly 

developed sophisticated transport system 

and a special chemical flow system to 

process the wafers horizontally with a 

very low breakage rate and a high etching 

uniformity. STANGL’s new system LINEA 

follows the trend towards handling solar 

wafers down to 150 µm. 

PorSi RINSE 

US 

CLEAN 

LOAD 

RINSE 

PSG 

ETCH 

PSG 

ETCH 

US 

CLEAN 

RINSE DRY 

RINSE DRY 

RINSE DRY 

UNLOAD 

UNLOAD 

UNLOAD 

UNLOAD 

Main Features 

_ Strongly modular, highly integrated design 


_ Low breakage rate (< 0,1 %) 

_ Wafer thickness down to 150 μm 

_ Newly developed, sophisticated lowcontact 

wafer transport system 

_ No mechanical contact on top side 

_ Up to 6 lanes 156 mm/125 mm wafer 

_ Homogeneous reproducible etching 

process by high volume chemical 

up- and downstream distribution system 

_ High chemical exchange rate 

_ Automatic chemical bath management

Solar cell production is making the 

transition from the pioneering stage 

towards mass production. Innovative and 

flexible cell concepts demand a mass 

production concept which is equally 

innovative and flexible, as the leap there 

from the laboratory is the most expensive 

step in the development process. 

SINGULAR is a PECVD coating tool for 

anti reflection coatings (ARC) for cystalline 

silicon solar cells. The tool offers an 

innovative static inline concept, which 

combines the advantages of static 

processing and inline substrate transport. 

During static ICP-PECVD process the 

substrates are not moved, therefore layer 

stacks and gradient layers are easily 

possible. 

The SINGULAR PECVD coating system 

meets the demands for both current 

09 

SINGULAR 

Static Inline Tool for High Uptime ICP-PECVD Anti Reflection Coatings 

One SINGULAR Two SINGULAR Three SINGULAR 

_ Capacity up to 1,500 

wafers/h depending on 

technical equipment 

_ Up to 3,000 wafers/h as 

net output capacity 

and future PV cell production. The 

SINGULAR is a fully automated inline 

system consisting of independent modules. 

The essential benefit of the inline 

technology is the transport and process 

of small substrate production lots, which 

guarantees stable processes, continuous 

output, flexibility and a small footprint. 

In November 2009 SINGULUS delivered 

the first SINGULAR inline coating machine 

for anti-reflective coating of silicon solar 

cells as well as STANGL’s newly developed 

inline cleaning system LINEA with the 

corresponding fully-automated wafer 

handling system. 

The first SINGULAR inline coating 

machine for anti-reflective coating of silicon 

solar cells was successfully commissioned 

at a European customer in February 2010. 

The cells produced with a SINGULAR 

_ Up to 4,500 wafers/h as 

net output capacity 


machine achieve excellent efficiency. 

In addition, the cells are characterized 

by a very homogenous coloring. 

The SINGULUS inline coating machine is 

used in production lines for the 

manufacturing of silicon solar cells. 

Main Features 

For cells 125 x 125 mm and 156 x 156 mm 

_ Output 1,500 wafers/h, 3,000 wafers/h 

or 4,500 wafers/h 

_ High uptime due to inline chamber 

cleaning 

_ Efficient raw material consumption 

_ Optimized for lowest cost of ownership 

_ Integrated automatic loading/unloading 

system 

_ Modular, highly integrated design 

_ Short installation and ramp-up time 

_ Small footprint

Thin Film Solar on Glass 

10 

THIN FILM SOLAR TECHNOLOGY 

Overview Thin Film Cells 

Thin Film 

Thin Film Solar Technology 

Thin film solar panels offer specific 

advantages compared to the silicon 

solar technology. Amongst these are the 

retention of efficiency during periods of 

weak sun intensity and an easy integration 

into architectural design elements. 

SINGULUS is the market leader for the 

wet-chemical cleaning for CIS and CdTe 

processes. New production concepts as 

the spray ion layer gas reaction (ILGAR ® ) 

process expand the value-added chain 

in the area of thin film solar technology. 

The company’s target is to position itself 

at the forefront for the introduction of 

new technologies with respect to silicon 

as well as thin film solar technology. In 

addition SINGULUS will progress on the 

way to a system supplier in this solar 

segment as well. 

Thin Silicon Film 

Semiconductor 

Compound 

Based 

Amorphous 

(a-Si) 

Tandem 

(a-Si/c-Si) 

Thin Film 

(c-Si) 

Thin Film II-VI 

SINGULUS offers modern production 

systems for CIS/CIGS & CdTe thin film 

solar cells made on glass and flexible 

substrates: 

_ Chemical supply systems with 

automatic dosage equipment 

_ Systems for the deposition 

of cadmium-free buffer 

layers 

_ Equipment designed 

for spray ion layer gas 

reaction (ILGAR ® ) 

processes (AACVD) 

_ Metal free inline glass 

cleaning machines 

_ Inline etching and 

coating machines 

CIS/CIGS 

CdTE

Substrate Inspection 

Glass Washing 1 

Glass Washing 

Interconnect and Encapsulation 

PVD Back Contact 

Substrate Inspection 

1 

CdS or. alt. Buffer Deposition 

TCO Etching 

PVD TCO 

Scribing P3 

PVD Metal Back Contact 

Scribing P2 

Scribing P1 

Interconnect and Encapsulation 

Absorber Deposition CdTe 

2 

3 

CdTe 

CIS/CIGS 

Scribing P3 

4 5 

Back Side Cleaning CdTe 

10 

PVD Absorber 

Thin Film Solar on Flexible Materials 

11 

Thin Film - CdTe Manufacturing Process 

CdCI2 Deposition 

6 

Activation 

7 

CdCI2 Salt Removal 

8 

9 

Thin Film - CIS/CIGS Manufacturing Process 

Selenisation/Sulphurisation 

2 

KCN Etching or. 

NH3 Treatment 

Front Contact 

Laser Scribing P1 

Negative Photoresist 

Developer 

Primary Back Contact 

3 

4 

Glass Washing 

CdS or. alt. 

Buffer Deposition 

Scribing P2 

SINGULUS Product 

Portfolio: 

1. VITRUM Clean 

2. VITRUM TCO 

3. TENUIS altn. ILGAR ® 

or IMPEDIO 

4. COATER CdTe 

5. VITRUM Etch 

6. VITRUM Coating 

7. INDO 



10. VITRUM Developer 


Cooperation Partner 

SINGULUS Product 

Portfolio: 


2. INSE 

3. VITRUM KCN 

4. TENUIS altn. ILGAR ® 

or IMPEDIO 


Cooperation Partner


12 

TENUIS 

Wet Process Equipment for Thin Film Solar Cells on Glass 

1 Input Transport Unit 

2 Brush Off Machine 

3 Linear Transport System 

4 Process Module 

5 Final Rinse 

6 Output Transport Unit 

TENUIS 

6 

1 

With its TENUIS coating machines STANGL 

has reached an internationally leading 

position in the CIS/CIGS thin film 

technology. 

Low manufacturing costs of the CIS 

modules can only be achieved in mass 

production. STANGL designs and produces 

high-tech systems that are used for 

fully-automated application of the singlesided 

wet chemical CdS coating. 

The fully-automated "dry-in/dry-out" 

STANGL thin film coating systems, used 

for single-sided wet chemical CdS coating, 

offer the customer a safe and reliable 

production capacity of up to 40/85 MW 

per line. 

2 

5 

4 

3 

4 

4 

4 

Main Features 

_ Low cost of ownership 

_ High throughput (cycle time 40/42 s) 

_ Low process temperatures 


_ Lowest possible chemical consumption 

_ Single-side coating 

_ Easy upgrade for higher throughput 

_ Reproducible process results 

_ Automatic dosage and mixing systems 

_ Lowest possible DI water consumption 

_ Uniform spot-free glass plate drying 

(dry-in/dry-out) 

_ Waste and exhaust management 

system 

_ Networked communication supported

1 Input Transport Unit 

2 Process Modules 

3 Coarse Rinse 

4 Fine Rinse 

5 Ultra Fine Rinse 

6 Drying Unit 

7 Output Powered Roll Gears 

The VITRUM wet processing machine 

is available in different versions, e. g. 

cleaning, etching, brush off, CdCl2 or 

KCN. Thin film solar cells provide the 

chance to reduce manufacturing costs. 

This is based on the high costs of 

crystalline raw material and the better 

value chain for thin film solar cells. 

Besides the low cost of ownership, 

the main advantages of VITRUM are 

the exceptionally high throughput with 

13 

VITRUM 

Inline Wet Process Equipment for Thin Film Solar Cells on Glass 

VITRUM 1400 

1 2 4 6 

VITRUM 2200 

3 5 7 

1 2 3 4 5 

6 

a cycle time of only 30/60 seconds 

depending on glass size and process 

and the modular, highly integrated 

design. Furthermore, VITRUM offers 

inline systems for spraying or dipping 

and the standard and customer specific 

substrate sizes up to 2,600 mm. Moreover, 

high availability with an uptime of 

more than 98 % and the integration of 

automatic dosage and mixing systems 

are important features of STANGL's new 

wet processing cleaning machine. 


7 

Main Features 

_ Metal free 


_ High throughput 

_ Inline systems 

_ Modular design 


_ Standard and customer specific 

substrate sizes up to 2,200 mm 



_ Uniform spot-free glass plate drying 


_ Waste water & exhaust treatment 



14 

IMPEDIO 

Roll-to-Roll Wet Process Equipment for Thin Film Solar Cells on Flexible Materials 

1 Input Web 

2 Process Module 

3 Rinsing and Drying Module 

4 Output Web 

Thin film solar cells on flexible materials 

are on the advance due to their potential 

applications regarding low weight, high 

flexibility and low cost of manufacturing 

compared to silicon based solar cells. 

STANGL offers roll-to-roll production 

systems of the type IMPEDIO for the 

wet-chemical coating of solar cells based 

on CIS/CIGS technology. 

IMPEDIO 

1 

Roll-to-Roll – IMPEDIO product portfolio for 

thin film technology on foils (metal/plastic): 

_ Roll-to-Roll Chemical Bath Deposition 

(CBD) of CdS/alternative buffer layers 

for CIS, CIGS, CIGSSe technologies 

_ Roll-to-Roll Inline-Cleaning 

(DI-Water, Tensides) 

_ Roll to Roll Inline-Etching 

(KCN, HCl, H3PO4) 

STANGL also supplies the following facillity 

management systems e.g. chemical supply 

systems, chemical mixing systems and 

waste water treatment. 

2 3 4 

Main Features 


_ Low process temperatures 


_ Lowest possible chemical consumption 

_ Single-side coating of CdS or alt. 

buffer layers 

_ Both side etching with spray or dipping 

processes 

_ Both side cleaning with spray process 



_ Lowest possible DI water consumption 

_ Uniform spot-free foil drying 


_ Waste and exhaust management system 


ILGAR ® R&D system 

Buffer Layer for CIS-Cells 

_ CIS/CIGS cells are normally arranged in a “Substrate configuration” 

_ the layer stack is deposited on a glass substrate 

_ the cell structure starts with sputtering of the metal back contact (Mo) 

Transparent front 

contact 

Window layer 

Absorber 

Back contact 

The standard buffer layer in a chalcopyrite 

thin film solar cell is made by chemical 

bath deposition (CBD). This is a reliable 

and commercially accepted method. 

However it also has a number of 

disadvantages such as: long process 

times, large amounts of liquid waste, 

critical process parameters, an inherent 

batch type nature and difficulties with 

very large substrates. As the size of the 

substrates used in thin film production 

increases and the tact time decreases 

there is a request for new methods with 

the buffer layer deposition as one example. 

In a collaboration between Helmholtz- 

Zentrum Berlin für Materi a lien und Energie 

(HZB), formerly the Hahn-Meitner-Institut 

(HMI), and SINGULUS an alternative 

buffer layer deposition technique is 

Wet chemical 

bath deposition 

„Most commonly” or 

In 2 S 3 − new ILGAR ® 

process 

developed for thin film solar cell fabrication. 

The so-called Ion-Layer-Gas-Reaction 

Process (ILGAR ® ) offers a new, cost 

efficient, chemical method to manufacture 

a thin homogeneous In 2S 3 layer (20 nm), as 

an alternative to the common CdS-buffers. 

The Spray-ILGAR ® deposited indium 

sulfide buffer layers are capable to replace 

the cadmium sulfide buffers used in 

chalcopyrite cells in order to avoid the 

toxic cadmium. First 30x30 mini-modules 

on a Pilotline Cu(In,Ga)(S,Se) 2 absorbers 

achieved an efficiency of 13.0 % after light 

soaking. The nature of the spray technique 

ensures that the ILGAR ® process is 

reproducible, fast, cheap and suitable 

for scaling up into an in-line process on 

large area substrates. 


15 

SOLUTUS 

SINGULUS New Products for Thin Film Applications 

Inline production system SOLUTUS 

Buffer Layer for CdTe-Cells 

_ CdTe cells are normally arranged in a “Superstrate configuration” 

_ the layer stack is deposited on a glass substrate 

_ the cell structure starts with sputtering of the front contact (TCO) 

Transparent front contact 

Buffer layer 

Absorber 

Primary back contact 

Secondary back contact 

Wet chemical 

bath deposition 

„Most commonly” or 

In 2 S 3 − new ILGAR ® 

process 

Main Features 

_ AACVD atmospheric process (aerosol 

assisted chemical vapor deposition) 

_ No vacuum required 

_ Quasi-dry process 

_ In 2S 3-deposition technique 

_ Cadmium free 

_ High efficiency cells produced with 

potential for further improvement 

(certified efficiency of 14.7% measured 

at ISE Freiburg) 

_ Machine cycle 60 s 

_ Continuous substrate flow under the 

aerosol area 

_ Design for variable size of production 

substrates: 

substrate width up to 1,200 mm (Larger 

substrate size can be processed on 

request!) 

_ Inline, fast production speeds 

_ Flexible method: bilayers and mixed 

compositions possible

Headquarters 

SINGULUS TECHNOLOGIES AG 

Hanauer Landstrasse 103 

D - 63796 Kahl, Germany 

Tel. +49 6188 440-0 

Fax +49 6188 440-110 

sales@singulus.de 

www.singulus.de 

Affiliated Companies 

China 

SINGULUS MANUFACTURING 

GUANGZHOU LTD. 

Tel. +86 20 34518-830 

frank@singulus.com.cn 

France 

SINGULUS TECHNOLOGIES 

France S.A.R.L. 

Tel. +33 3 893111-29 

singulus@club-internet.fr 

Great Britain 

SINGULUS TECHNOLOGIES UK LTD. 

Tel. +44 1793 7842-00 

brian.walsh@singulusuk.com 

SINGULUS STANGL SOLAR GmbH 

Fraunhofer Strasse 9 

D - 82256 Fürstenfeldbruck, Germany 

Tel. +49 8141 3600-0 

Fax +49 8141 3600-100 

stangl@singulus.de 

www.stangl.de 

Italy 

SINGULUS TECHNOLOGIES ITALIA S.r.l. 

Tel. +39 071 79303-12 

info@singulus.it 

Latin America 


Latin America Ltda. 

Tel. +55 1121 6524-10 

rodolfo.mignone@singulus.com.br 

Netherlands 

SINGULUS MASTERING B.V. 

Tel. +31 407 5014-00 

info@singulus.nl 

Singapore 


ASIA PACIFIC PTE LTD. 

Tel. +65 674 119-12 

singulus@singnet.com.sg 

Spain 

SINGULUS TECHNOLOGIES IBERICA S.L. 

Tel. +34 936 7500-25 

singulus@singulusib.com 

Taiwan 


ASIA PACIFIC PTE LTD. 

TAIWAN REPRESENTATIVES OFFICE 

Tel. +886 2 274833-66 

sales@singulus.com.tw 

United States and Canada 

SINGULUS TECHNOLOGIES INC. 

Tel. +1 860 68380-00 

sales@singulus.com 

08/2010 – MetaCom Printed in Germany - Technical alterations reserved

SINGULUS & STANGL - Singulus Technologies AG

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