Fascination Blu. - stangl.de

Fascination Blu.
Successful Market Launch of the new BLULINE II
On February 27 and 28, 2008 SINGULUS
TECHNOLOGIES staged an inhouse fair at the
headquarters in Kahl to introduce the BLULINE II
to the industry. The invitation to see the new
replication line for Blu-ray Dual Layer Discs
was followed by almost 300 top visitors from
34 different countries.
Day one of the event opened with a welcome
message by SINGULUS’ CEO Stefan A. Baustert.
He commented that the end of the format war
is a strong signal for the optical disc industry
towards a brighter future. The following
Also in this Issue: ■ CRYSTALLINE ■ SKYLINE II ■ Solar Technology ■ MaskTrack ® ■ Service News
■ SPACELINE II ■ New STREAMLINE III ■ TADERIS ■ BLU-X
[news]
NEWS MAGAZINE FOR OUR BUSINESS FRIENDS
ISSUE 35 MAY 2008
presentation by Sylvia Hitzel, Vice President
Marketing & Sales, gave an overview and
update of the activities of SINGULUS, which
is moving into new business areas but still
keeps optical disc as the core business.

page 2 [news Optical Disc] | ISSUE 35 | MAY 2008
The speakers included Dieter Daum, CEO
of Sony DADC, Austria, and Frank Simonis
from the Blu-ray Disc Association, as well as
representatives of GfK and the British market
research institute Understanding & Solutions.
In his keynote speech Dieter Daum drew an
optimistic outlook that Blu-ray will stimulate
the worldwide optical disc market, e.g. Sony
itself had mastered over 2000 BD titles until
February 2008. To ensure the long-term growth
of the Blu-ray format and to meet the increasing
market demand, establishing a broad replication
base would be important. He also stated
that Sony DADC is committed to continue to
support the replication industry in building up
Blu-ray capacities. Jim Bottoms, Understanding
and Solutions, briefed the audience about his
projections regarding BD. He believes the
format has got clear advantages and is heading
towards a similar future as the DVD at its
time. Downloads will be only a small niche
market, especially with in view of than the next
4-5 years. Another important comment from
Jim was, that during the next years DVD
players would be replaced completely by BD
players in a similar price range. Frank Simonis,
Senior Director Communications of Philips
Intellectual Property & Standards and Head
of BDA Europe, declared that BD is a facing
new challenge after the end of the format
war and pointed out how important it is to
educate the consumers about the advantages
of BD. Osamu Kawakubo from Sony took the
participants on a voyage into a future beyond
BD with holography, multi-layer discs and near
field recording issues providing BD technology
with storage capacities with about 100 GB and
up to 400 GB.
In the afternoon of the first day presentations
by Guido Dalessi and Stephan Hotz from
SINGULUS about their new products for the
Blu-ray Disc, the BLULINE II and the BD
mastering system CRYSTALLINE concluded
the insight into the production of Dual layer
Blu-ray Discs.
In the evening of day one SINGULUS
invited to a Fascination Blu Dinner starting
with Blu cocktails continued by a Blu-ray
presentation from Sony. After the screening
of a BLULINE II movie, the new BLULINE II
was presented to the audience live on stage
as the highlight of the evening. The following
party started off with a 007 Casino Royal
trailer which opened a casino with blackjack
and roulette and lots of possibilities to
socialise with people from other companies.
On the second day hardware demonstrations
gave the opportunity to see SINGULUS’ latest
technologies. The guests were able to have
a look at BD 50 production and at the
CRYSTALLINE mastering system as well as to
get an overview of all the products of the
SINGULUS delivery program. The concluding
presentations about new businesses and
especially the new business Solar offered first
hand information about SINGULUS’ near future.

Fascination Blu with BLULINE II –
Replication of Dual Layer Blu-ray Disc
At the MEDIA-TECH Expo in Frankfurt/Main,
Germany (May 6-8) SINGULUS TECHNOLOGIES
will be presenting its new BD production system,
the BLULINE II for Dual Layer Blu-ray Discs.
The SINGULUS Blu-ray Disc production system
BLULINE II is designed for the economical
production of Blu-ray Discs (BD ROM Single
Layer and Dual Layer (BD ROM SL/DL)), according
to the specifications issued by the BDA.
The following features characterize
the BLULINE II concept:
_ Dedicated to production of BD ROM SL/DL
_ Cycle time BD SL < 4.0 s / BD DL < 6.0 s
BD 50 – Production Steps
1 Molding = on
2 Cooling = on
3 Metallization Layer 0 = on
4 Base-Resin = on
5 Pit-Resin = on
6 Pre-Curing = on
7 Wet-Embossing = on
8 Metallization Layer 1 = on
9 Cover-Resin = on
10 Hardcoat-Resin = on
11 Barrier Layer = on
12 Final Inspection = on
_ Highly integrated design
_ All production steps included
_ Thickness Measurement Device (TMD)
for metallized layers with close loop
control for the cathode
_ Spectrometer for spacer-layer and
cover-layer measuring with close loop
control for spin process
_ High productivity, high uptime
_ Clear structured disc flow
_ Automated handling of BD through
all production steps
_ Minimum space required
| ISSUE 35 | MAY 2008 [news Optical Disc]
BD 25 – Production Steps
1 Molding = on
2 Cooling = on
3 Metallization Layer 0 = on
4 Base-Resin = off
5 Pit-Resin = off
6 Pre-Curing = off
All production steps from molding, cooling,
metallizing, wet-embossing, lacquering
and UV curing to quality inspection are
incorporated in the BLULINE II. Its functionality,
speed and design will again set a new
benchmark for the industry. The BLULINE II
operates with one molding machine and
comprises all the advanced features required
for production of high end Dual Layer
Blu-ray Discs.
Every single BLULINE in the field can be
upgraded with the embossing technology to
produce 50 GB Blu-ray Discs.
7 Wet-Embossing = off
8 Metallization Layer 1 = off
9 Cover-Resin = on
10 Hardcoat-Resin = on
11 Barrier Layer = on
12 Final Inspection = on
3
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page 4 [news Optical Disc] | ISSUE 35 | MAY 2008
CRYSTALLINE
For Mastering of Single
and Dual Layer BD
With BD becoming the single High Density
disc format, focus shifted completely to
optimizing the CRYSTALLINE mastering system
for Blu-ray Disc. No longer were the efforts
divided between the two competing formats.
BD Single Layer
For 6 months, the BD Single Layer masters
have been produced with the CRYSTALLINE
well in spec, both at SINGULUS MASTERING
and in real production environments in the
field. Obviously, further process optimizations
are ongoing to maximize the process window,
and there is still significant room to further
lowering the Jitter, e.g. with sophisticated
waveshaping technologies. Once a Jitter of
around 5 % for BD Single Layer was achieved,
the next challenge became Dual Layer BD, as
it is expected that the vast majority – over 90 %
– of the BD titles will be the 50 GB format.
BD-ROM 25
BD-ROM 50, Layer 1
BD Dual Layer
Layer 0 of a Dual Layer BD disc is replicated
in the same manner as a Single Layer disc
and is moulded in a 1.1 mm thick substrate.
Mastering layer 0 is therefore identical to
mastering a Single Layer BD. Layer 1 of the
Dual Layer BD disc is, however, replicated
through embossing. For mastering the
difference lies in the different shrink factor to
anticipate for: 0 instead of 0.7 %. The fact
that the maximum allowed Jitter for Layer 1
is higher than for Layer 0 (8.5 % instead of
6.5 %) does not mean that mastering is easier.
Defining the Industry Standard
for BD Stampers
Obviously, the mastering process contributes
highly to the quality of the BD stamper.
However, it has been identified that all phases
of the stamper making process are critical and
require utmost attention. This includes stamper
cleaning, plating, polishing and punching.
Each individual process has an influence on
the stamper quality – and thus on the final
replica quality.
For these reasons, SINGULUS MASTERING
has taken the initiative to gather a task force
in which important partner companies are
represented. The goal is to define the industry
standard for the BD stamper. The result will
be a clear definition of the interface between
mastering and plating on one side, and
replication on the other side.
Higher Recording Speeds
Another goal is the introduction of higher
mastering speeds, increasing the CRYSTALLINE’s
production capacity. Currently recording takes
almost 90 minutes per layer, being the slowest
process in the production chain once the title
enters the factory. Note that preparing content
for mastering does take significantly longer
when looking at authoring.
SINGULUS MASTERING aims at launching
2R speed for BD by the end of 2008. Already
from the start of the CRYSTALLINE platform
development, the optics, mechanics and
electronics have been designed to cope with
this speed. The challenge is with the PTM
process itself and its thermal behaviour under
higher recording speeds.

SPACELINE II
for all SL & DL DVD – The best gets better again!
With a market share of more than 65 %,
SINGULUS TECHNOLOGIES is offering its latest
version of the replication line SPACELINE II.
This system is capable of producing all Single
and Dual Layer DVD (9, 5, 10) formats.
Based on the experience of 1,200 systems
in the market, the SPACELINE II offers a
process cycle time faster than 2.3 sec.
The SPACELINE II achieves the most costefficient
disc production and highest product
SKYLINE II
for CD & DVD 5 – The Industry Benchmark
The SKYLINE II Replication Line from SINGULUS
TECHNOLOGIES covers the production of CD.
With the installation of over 1,900 systems to
date, the SKYLINE is the industry benchmark.
The upgraded SKYLINE II DUPLEX combines
CD and DVD 5. A built-in pushbutton function
to switch from CD to DVD 5 and back is standard.
This machine achieves the most cost-efficient
disc production and highest product quality
and yield available in the market.
quality and yield available in the market,
making it the industry benchmark for DVD.
The SPACELINE II is available with EMOULD
or MoldPro molding machines.
With the new MoldPro all-electric molding
machine from SINGULUS MOLDING, the
SPACELINE II provides the smallest footprint
worldwide. Other qualified molding machines
may be integrated on request.
The SKYLINE II is equipped with one molding
machine, one SINGULUS V metallizer, one
spin-bowl (two for DUPLEX), a UV-curing
device and an inspection system for quality
assurance of the finished discs.
The SINGULUS V is our latest optical disc
metallizer and has been part of our product
line for several years. The high performance
of this metallizer significantly contributes
to the increased reliability, maximum uptime
and easy maintenance of the SKYLINE II.
| ISSUE 35 | MAY 2008 [news Optical Disc]
The SPACELINE II, with many patented
original parts (SMART CATHODE ® , TMD, Spin
Cooler, etc.), ensures a high daily production
rate for DVD.
With its worldwide sales and service network,
SINGULUS TECHNOLOGIES is able to provide
exceptional support together with technological
synergies to benefit our customers.
With many patented original parts, the
SKYLINE II ensures a high daily production
of CD & DVD 5. With the worldwide sales and
service network of SINGULUS TECHNOLOGIES,
we are able to offer exceptional support
and technological synergies to benefit
our customers.
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page 6 [news Optical Disc] | ISSUE 35 | MAY 2008
STREAMLINE III
High Performance Replication System for DVD R
The STREAMLINE III is a replication system
dedicated to the economical mass production
of high performance DVD R.
The STREAMLINE III replication line is designed
for a dry cycle time of the downstream
equipment of less than 2.5 s. A production
cycle time of better than 2.8 s can be achieved
for 4.7 GB media depending on the dye
process and the cycle time of the injection
molding machines. Reproducible and stable
in operation, the new, fast STREAMLINE III
is again a result of our R&D activities in all
multiply interacting process areas from
mastering via molding and dye technology
towards metallization and bonding.
The STREAMLINE III is now available with the
SPACELINE II finishing module. The new system
combines the advantage of an economical
designed system with the proven SPACELINE II
DVD replication line based on a market base
of over 1,100 systems. The final processing of
recordable DVDs is performed using a SMART
CATHODE ® sputtering unit and the reliable
SPACELINE II bonding module.
SINGULUS TECHNOLOGIES is well prepared
to provide all process know-how necessary
to start up the production of recordable DVD
media (optional also for DVD 5 and CD).

Main Characteristics
_ Downstream cycle time well below 2.8 seconds
(Options: 2.50 seconds for DVD 5 with clear top disc
and 3.40 seconds for CD)
_ Modular, highly integrated design incl. all production
steps from cooling, metallizing, edge cleaning,
bonding, UV curing to quality inspection
_ High productivity, high uptime
_ Entire machine including electric rack mounted on a
base frame
7
2
1 Injection Molding
2 Cooling System
3 Dye Coating Unit
4 Take-out
5 Drying Unit
1
3
_ Clear structured disc flow, avoiding any mismatch
between discs halves
_ Automated handling of DVD and DVD R through all
production steps
_ Minimum space required
_ Excellent maintenance and service accessibility
_ Machine system components and automation modules
proven and representing the state of the art
13
6 Sputtering Unit
7 Substrate Conditioning
8 Edge Cleaning Stations
9 Transfer Conveyor
4
5
| ISSUE 35 | MAY 2008 [news Optical Disc]
2
_ Nearly all handling movements are driven by
AC-servo-motors
_ DVD / DVD R handling by mechanical 3-finger
grippers via center hole of disc
_ Transportable to the production site with
fork lift truck
9
6
1
8
10
12
11
10 Bonding Unit
11 UV-Curing Station
12 Final Cooling Conveyor
13 Inline Quality
Inspection System
13
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page 8 [news Solar Technology] | ISSUE 35 | MAY 2008
SINGULUS AND STANGL
A Strong Team in Solar Technology
The capacity of the global forecast for new
installations for photovoltaic systems are
set to nearly grow five times from 2.6 GW
(gigawatt) in 2007 to 13 GW in 2010.
With the acquisition of 51 % of the shares in
the STANGL Semiconductor Equipment AG
(STANGL) SINGULUS TECHNOLOGIES achieved
the direct market entry into the rapidly
growing solar market in the summer of 2007.
STANGL is one of the worldwide leading
suppliers for equipment for wet-chemical processes
and manufactures machines for the
production of silicon as well as thin-film solar
cells. STANGL has established customer
relationships with all major solar cell producers
and is participating in many projects in Europe
and Asia. STANGL works as a partner for
suppliers for turnkey lines as well as a direct
supplier of renowned solar cell producers.
SINGULUS TECHNOLOGIES itself will present
its own vacuum coating machine for the coating
of anti-reflective layers in the silicon solar
technology in Kahl am Main by the end of 2008.
In March 2008 SINGULUS TECHNOLOGIES
partnered up with Q-Cells, the most important
solar cell producer worldwide, for the development
of this new machine and won the
company as a key customer. Q-Cells will
significantly contribute its know-how into the
development of this machine and put it into

TENUIS
Wet Process Equipment
for Thin-Film Solar Cells on Glass
Economic processing of CdS/alternative
buffer layers for CIS/CIGS/CIGSSe Solar Cells
operation after qualification. SINGULUS
TECHNOLOGIES’ machine integration know-how
for the automation of CD and DVD production
machines is an optimal starting point for the
development of highly profitable, fully automated
production lines for silicon solar cells. Combined
with the equipment from STANGL, SINGULUS
TECHNOLOGIES will then be able to offer two
important machine groups with wet-chemical
and vacuum coating processes for a production
line for crystalline silicon solar cells. The goal
is to further expand the globally leading
position for production equipment for crystalline
solar cells in the next couple of years.
STANGL and SINGULUS TECHNOLOGIES will
consistently expand the solar activities. Both
companies perfectly complement each other
in order to be able to offer a broad product
range of machines and equipment for the
| ISSUE 35 | MAY 2008 [news Solar Technology]
SILEX
Wet Process Equipment
for Photovoltaic Si-Cells
Economic processing of
multi/mono crystalline solar-wafers
photovoltaics industry in the next couple of
years. While STANGL focuses on wet-chemical
processes, SINGULUS TECHNOLOGIES’ core
competence is physical coating technology
and the integration of different processing
steps in complete, predominantly automated,
production lines.
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page 10 [news Nano Deposition Technologies] | ISSUE 35 | MAY 2008
SINGULUS Nano Deposition Technologies
Offers a New Thick Alumina PVD Tool for the
Magnetic Storage Industry
According to TrendFocus, the Magnetic
Storage Industry’s market review, over the
next five years this market will grow with a
CAGR of 12.5 %. The shipment of HGA’s
(Head Gimbal Assemblies, that carry the
heads) grew from 2006 to 2007 by 175.5 %
up to 1,669.6 million units. Along with the
transition from GMR to AT/PMR hard disk drive
technology new deposition techniques have
been developed and are under development.
The companies in the field are at present in a
decision phase to switch their wafer production
from 6” (150 mm) to 8” (200 mm) wafer
production to achieve further cost reductions.
All these factors result in a strong demand for
new and more capable production equipment.
To participate in this promising market
SINGULUS NDT decided already a year ago to
develop and manufacture a completely new
Contact:
SINGULUS Nano Deposition Technologies GmbH
Dr. Wolfram Maass
Hanauer Landstrasse 103
D - 63796 Kahl, Germany
deposition tool addressing the deposition of
thick alumina films, which is another core
technology in the magnetic storage industry.
The first of these tools named TADERIS is now
in its process test phase. The results achieved
so far are very encouraging. In particular the
demonstrated high deposition rate results in
a much higher throughput in comparison with
tools of the competitors.
Phone: +49 - 6188 - 440-417
Fax: +49 - 6188 - 440-480
info@singulus-ndt.de

MaskTrack ®
Achieves Successful Completion
for EUV Mask Blank Cleaning
The advanced modular processing platform
MaskTrack ® successfully achieved all critical
SEMATECH roadmap milestones for cleaning of
extreme ultraviolet (EUV) lithography mask blanks.
As a part of SEMATECH’s EUV technology
program at the College of Nanoscale Science
and Engineering (CNSE) of the University at
Albany, HamaTech was selected as the key
partner for the development of cleaning
technology for 30 nm soft defect removal on
EUV mask blanks. With the use of HamaTech’s
MaskTrack ® system, scientists at SEMATECH
Highest first pass
cleaning yield –
Zero soft defects
• 100% Particle Removal
Efficiency
• 0 adders/re-deposition
No residual ions
(no haze)
| ISSUE 35 | MAY 2008 [news HamaTech APE’s MaskTrack ® Equipment]
• Removal of pre-existing ions
• No ions added through cleaning
process or environment
not only demonstrated the successful
removal of all particles at 30 nm and greater,
but also further demonstrated a technical
achievement by removing a number of 10 nm
defects. Complete removal of 10 nm soft
defects is considered to be imperative for
the development and implementation of
EUV at the 22 nm device node. HamaTech
is continuing the partnership with SEMATECH
and other industrial and scientific partners
on the development of EUV and other critical
technology areas such as 193 nm immersion
and imprint lithography.
MaskTrack ® Cleaning System
Contact:
HamaTech APE GmbH & Co. KG
Ferdinand-von-Steinbeis Ring 10
D-75447 Sternenfels, Germany
Phone: +49 - 7045 - 41-8
Fax: +49 - 7045 - 41-239
www.hamatech-ape.de
HamaTech actually has an installed base of
over 30 MaskTrack ® systems in the field at
leading edge maskshops and wafer fabs, the
majority being in final cleaning and stripping
applications for the 65, 45 and 32 nm
technology nodes.
HamaTech APE, Sternenfels, Germany, is an
established market leader of semiconductor
equipment and a wholly owned subsidiary of
SINGULUS TECHNOLOGIES AG, Kahl am Main.
Pattern integrity
(no damage)
• No pattern damage
incl. SRAF
• Minimum phase/
transmission change
Throughput/Versatility
• Multi-mask processing
of different mask types
• Dynamic process control
• Mask Buffering
Thomas Gairing
Vice President Sales & Marketing
Phone: +49 (0) 70 45 / 41 - 232
E-Mail: thomas.gairing@hamatech.de
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NEWS NEWS NEWS NEWS NEWS NEWS NEWS NEWS NEWS NEWS NEWS NEWS NEWS NEWS NEWS NEWS NEWS NEWS NEWS NEWS NEWS NEWS
A Service Package is Always a Good Idea
Why waiting for a production shut down
and running the risk of long lead times for
the necessary spare part?
Better be prepared with a service package
containing especially those parts, which
compulsory wear out with use – even when
they are high quality SINGULUS spare parts.
According to customer order patterns, we
configured packages which contain all
essential fits for:
_ SKYLINE and SKYLINE II
_ SPACELINE and SPACELINE II
_ STREAMLINE and STREAMLINE II
_ STREAMLINE III
_ BLULINE and BLULINE II
Packages for other systems on request.
Why Order a Service Package?
Because of the most obvious advantages:
_ Lower overall package price compared to
the accumulated individual item prices
_ No delay by delivery time
_ Minimum system downtimes
But there are further, less obvious aspects.
The contents of the service packages are
based on long experience and consumption
data gathered over many years of supplying
service to customers worldwide. Save time
and money and use the experience we gained
for you.
Just ask your account manager for your
service package or send your request online!
SINGULUS TECHNOLOGIES started a cooperation
with Williams Advanced Materials and offers
the new Blu-X Target for all DVD formats
and Blu-ray disc manufacturing. Blu-X is a
patented alloy of Williams Advanced Materials
and the latest in its line of Ag alloys for the
Optical Media Industry. Blu-X is the most
recent Ag alloy product since Williams created
SIL-X, the initial alloy that has been used
in production for over five years. When using
Headquarters
Affiliated Companies
Germany:
HamaTech APE
GmbH & Co. KG
Phone: +49 7045 41-8
info@hamatech-ape.com
SINGULUS Nano Deposition
Technologies GmbH
Phone.: +49 6188 440-417
info@singulus-ndt.de
STANGL Semiconductor
Equipment AG
Phone: +49 8141 3600-0
sales@stangl.de
Introduction of the Blu-X
SINGULUS TECHNOLOGIES AG
Hanauer Landstrasse 103,
D-63796 Kahl, Germany
Phone: +49 - 61 88 - 440 - 0
Fax: +49 - 61 88 - 440 - 110
E-mail: sales@singulus.de
Internet: www.singulus.de
Netherlands:
SINGULUS MASTERING B.V.
Phone: +31 407 5014-00
info@singulus.nl
Switzerland:
SINGULUS MOLDING AG
Phone.: +41 52 63262-00
sales@singulus-molding.ch
SINGULUS TECHNOLOGIES AG Subsidiaries
France SINGULUS TECHNOLOGIES France S.A.R.L.
Phone: +33 3 893111-29
E-mail: singulus@club-internet.fr
Great Britain/ SINGULUS TECHNOLOGIES UK LTD.
Ireland Phone: +44 1793 7842-00
E-mail: brian.walsh@singulusuk.com
Italy SINGULUS TECHNOLOGIES Italia s.r.l.
Phone: +39 0717 9303-12
E-mail: singulus.italia@fastnet.it
Latin America SINGULUS TECHNOLOGIES Ltda. Latin America
Phone: +55 1136 4301-13
E-mail: latinamerica@singulus.com.br
Singapore SINGULUS TECHNOLOGIES Asia Pacific
Phone: +65 674 119-12
E-mail: singulus@singnet.com.sg
Spain SINGULUS TECHNOLOGIES Iberica
Phone: +34 936 7500-25
E-mail: singulus@singulusib.com
Taiwan SINGULUS TECHNOLOGIES Taiwan Ltd.
Phone: +886 2 274833-66
E-mail: sales@singulus.com.tw
USA/Canada SINGULUS TECHNOLOGIES Inc.
Phone: +1 860 68380-00
E-mail: sales@singulus.com
Blu-X, our customers will experience
improved electrical conductivity, increased
reflectivity, an overall wider process window
than other Ag alloys, and favorable environmental
stability. Initial comprehensive testing
has shown favorable results and a high yield
as well as support full launch proceedings.
Blu-X will be the standard Ag alloy product
in the SINGULUS delivery program.
3.0/05-2008-MetaCom Printed in Germany, Technical alterations reserved