PDF Datasheet - PZT & Piezo Actuators: Sub Nanometer Resolution ...

Piezo • Nano • PositioningLinear Actuators & MotorsNanopositioning / PiezoelectricsPiezo Flexure Stages /High-Speed Scanning SystemsLinearVertical & Tip/Tilt2- and 3-Axis6-AxisFast Steering Mirrors /Active OpticsThe whole P-611 family: X, Z, XY, XZ and XYZ stagesPiezo Drivers /Servo ControllersSystem propertiesSystem configurationClosed-loop amplifier bandwidth, 45 Hzsmall signalSettling time (10 % step width) 18 msTechnical DataP-611.1S and E-665.SRcontroller, 30 g loadModel P-611.1S P-611.10 Unit ToleranceActive axes X XMotion and positioningIntegrated sensor SGS –Open-loop travel, -20 to 120 V 120 120 µm min. (+20 %/0 %)Closed-loop travel 100 – µm calibratedOpen-loop resolution 0.2 0.2 nm typ.Closed-loop resolution 2 – nm typ.Linearity, closed-loop 0.1 – % typ.Repeatability