PDF Datasheet - PZT & Piezo Actuators: Sub Nanometer Resolution ...

Piezo • Nano • PositioningP-611.1 Piezo NanopositionerCost-Effective, Compact Linear Positioning System© Physik Instrumente (PI) GmbH & Co. KG 2008. Subject to change without notice. All data are superseded by any new release.The newest release for data sheets is available for download at www.pi.ws. Cat120E Inspirations2009 08/10.18P-611.1 piezo stages are flexure-guidednanopositioningsys tems featuring a compactfootprint of only 44 x 44 mm.The linear stages describedhere are part of the P-611 familyof positioners available in1 to 3 axis configurations. De -s pi te their small dimensions,the systems provide up to120 µm travel with sub-nano -meter resolution. They areideally suited for positioningtasks such as optical-pathlength correction in interfero -metry, sample positioning inmicroscopy or scanning applications.Equipped withceramic-encapsulated pie zodrives and a stiff zero-stiction,zero-friction flexure guidingApplication Examples Micromachining Microscopy Micromanipulation Semiconductor testing2-20P-611.1 linear nanopositioning system,100 µm travel, resolution of 0.2 nm Compact Design: Footprint 44 x 44 mm Travel Range to 120 µm Resolution to 0.2 nm Cost-Effective Mechanics/Electronics System Configurations Outstanding Lifetime Due to PICMA ® Piezo Actuators Z Stage, XY, XZ and XYZ Versions Availablesystem, all P-611 piezo stagescombine millisecond responsivenesswith nanometric precisionand extreme reliability.Closed-Loop and Open-LoopVersionsHigh-resolution, fast-responding,strain gauge sensors(SGS) are applied to appropriatelocations on the drive trainand provide a high-bandwidth,nano meter-precision positionfeedback signal to the controller.The sensors are connectedin a full-bridge configurationto eliminate thermaldrift, and assure optimal positionstability in the nanometerrange.The open-loop models areideal for applications wherefast response and very highresolution are essential, butabsolute positioning is notimportant. They can also beused when the position is controlledby an external feedbacksystem such as an interferometer,a PSD (position sensitivediode), CCD chip / image processingsystem, or the eyesand hands of an operator.Versatility & Combinationwith Motorized StagesThe P-611 family of piezo sta -ges comprises a variety of single-and multi-axis versions(X, XY, Z, XZ and XYZ) that canbe easily combined with anumber of very compact manualor motorized micropositioningsystems to formcoarse/fine positioners withlonger travel ranges (see p.2-36, 2-50 ff ).Ordering InformationP-611.10Linear Nanopositioning System,120 µm, No SensorP-611.1SLinear Nanopositioning System,100 µm, SGS-SensorHigh Reliability and LongLifetimeThe compact P-611 systemsare equipped with preloadedPICMA ® high-performancepie zo actuators which are integratedinto a sophisticated,FEA-modeled, flexure guidingsystem. The PICMA ® actuatorsfeature cofired ceramic encapsulationand thus offer betterperformance and reliabilitythan conventional piezo actuators.Actuators, guidance andsensors are maintenance-freeand not subject to wear, andthus offer an extraordinary re -lia bility.P-611.1S dimensions in mm

Piezo • Nano • PositioningLinear Actuators & MotorsNanopositioning / PiezoelectricsPiezo Flexure Stages /High-Speed Scanning SystemsLinearVertical & Tip/Tilt2- and 3-Axis6-AxisFast Steering Mirrors /Active OpticsThe whole P-611 family: X, Z, XY, XZ and XYZ stagesPiezo Drivers /Servo ControllersSystem propertiesSystem configurationClosed-loop amplifier bandwidth, 45 Hzsmall signalSettling time (10 % step width) 18 msTechnical DataP-611.1S and E-665.SRcontroller, 30 g loadModel P-611.1S P-611.10 Unit ToleranceActive axes X XMotion and positioningIntegrated sensor SGS –Open-loop travel, -20 to 120 V 120 120 µm min. (+20 %/0 %)Closed-loop travel 100 – µm calibratedOpen-loop resolution 0.2 0.2 nm typ.Closed-loop resolution 2 – nm typ.Linearity, closed-loop 0.1 – % typ.Repeatability