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<strong>Control</strong> <strong>of</strong> <strong>nanoparticle</strong> <strong>size</strong> <strong>in</strong> <strong>RF</strong> <strong>thermal</strong> <strong>plasma</strong> <strong>synthesis</strong><strong>of</strong> silicon oxide start<strong>in</strong>g from solid and liquid precursorsM. Boselli 2 , V. Colombo 1,2 , E. Ghed<strong>in</strong>i 1,2 , M. Gherardi 1 , F. Lo Iacono 1 , F. Rotundo 2 , P. Sanibondi 1 , E. Traldi 1Alma Mater Studiorum-Università di Bologna1 Department <strong>of</strong> Industrial Eng<strong>in</strong>eer<strong>in</strong>g (D.I.N.)2 Industrial Research Centre for Advanced Mechanics and Materials (C.I.R.I.-M.A.M.)Via Saragozza 8, 40123 Bologna, ItalyAbstract: An <strong>in</strong>ductively coupled <strong>plasma</strong> torch (ICPT) system was used to synthe<strong>size</strong>nanosilica particles start<strong>in</strong>g both from glass powders from fluorescent lamps and tetraethylorthosilicate (TEOS) as precursors. The effect <strong>of</strong> the curta<strong>in</strong> gas on <strong>nanoparticle</strong>s <strong>size</strong>,morphology and composition was studied by the use <strong>of</strong> BET, SEM and EDS analysis.Keywords: <strong>RF</strong> Plasma <strong>synthesis</strong>, fluorescent lamps, TEOS, nanosilica, quench<strong>in</strong>g gas.1. IntroductionNanomaterials, i.e. materials that show nanoscalemorphology, have become <strong>in</strong>creas<strong>in</strong>gly important <strong>in</strong>the last decades due to their particular characteristics <strong>in</strong>comparison with bulk materials. Nanoparticles haveshowed to be the start<strong>in</strong>g po<strong>in</strong>t <strong>of</strong> many “bottom-up”processes to realize nanomaterials for severalapplications s<strong>in</strong>ce their addition can strongly improvethe physical properties <strong>of</strong> almost all bulk materialstypes. This improvement is given primarily by thenanometric <strong>size</strong>, which leads to a surface to mass ratio(order <strong>of</strong> several tens <strong>of</strong> m 2 /g) much higher than that <strong>of</strong>micro-<strong>size</strong>d materials. For example, the improvement<strong>of</strong> mechanical properties has been proved to be afunction <strong>of</strong> particle <strong>size</strong> [1]. Furthermore <strong>in</strong> thenanoscale range the physical properties <strong>of</strong><strong>nanoparticle</strong>s are changed, with respect to the bulkmaterial properties, due to quantum effects such as theSurface Quantum Effect and Quantum conf<strong>in</strong>ement<strong>size</strong> effect [2] that makes them very promis<strong>in</strong>g forelectronic and magnetic applications. In particular,ceramic nanopowders like nanosilica and nanoalum<strong>in</strong>a(nano SiO₂, nano Al₂ ) have be<strong>in</strong>g studied and used<strong>in</strong> many applications as medic<strong>in</strong>e, concrete science,nano-re<strong>in</strong>forcement, fuel cells [3-6]. As a consequence<strong>of</strong> the grow<strong>in</strong>g request for these materials, the <strong>in</strong>terestfor large-scale <strong>in</strong>dustrial systems for their <strong>synthesis</strong> isstrongly <strong>in</strong>creased <strong>in</strong> the last years.Between the different <strong>nanoparticle</strong>s productionmethods, <strong>thermal</strong> <strong>plasma</strong> <strong>synthesis</strong> is one <strong>of</strong> the mostpromis<strong>in</strong>g, hav<strong>in</strong>g potential for high production rates(more than 1 kg/h) [7]. Moreover, <strong>in</strong> a <strong>plasma</strong> systemlow valuable material can be used as precursors whileother processes, like flame pyrolysis and sol-gel, needmore expensive precursors. However <strong>plasma</strong> <strong>synthesis</strong>shows a poor control <strong>of</strong> the <strong>nanoparticle</strong>s compositionand <strong>size</strong>. Among all the <strong>plasma</strong> sources, the radi<strong>of</strong>requency <strong>in</strong>ductively coupled <strong>plasma</strong> torches arecharacterized by higher operat<strong>in</strong>g conditions flexibility,higher discharge stability and higher precursorresidence time <strong>in</strong>to the core <strong>of</strong> the <strong>plasma</strong> discharge ifcompared with the most widespread DC torches.In this work, the <strong>synthesis</strong> <strong>of</strong> nanosilica powders hasbeen carried out us<strong>in</strong>g an <strong>in</strong>ductively coupled <strong>plasma</strong>torch (ICPT) system, start<strong>in</strong>g from two differentprecursors. In particular, micrometric glass powdersobta<strong>in</strong>ed from milled fluorescent lamps and a solution<strong>of</strong> tetraethyl orthosilicate (TEOS) has been tested assolid and liquid precursors, respectively. S<strong>in</strong>ce glassfrom fluorescent lamps is categorized as waste, itstreatment <strong>in</strong> an ICPT would be <strong>of</strong> great economic<strong>in</strong>terest, go<strong>in</strong>g <strong>in</strong> the direction <strong>of</strong> produc<strong>in</strong>g high valuematerial from waste. On the other hand TEOS has beenchosen as precursor s<strong>in</strong>ce it’s easier to vaporize andcan provide higher purity with respect to the previousglass precursor.The aim <strong>of</strong> this work is to identify the ma<strong>in</strong> processparameters that <strong>in</strong>fluence the <strong>synthesis</strong> and thecharacteristics <strong>of</strong> SiO 2 nanopowders.2. Experimental setupAs reported <strong>in</strong> Figure 1, the <strong>plasma</strong> system consists <strong>of</strong>an <strong>in</strong>ductively coupled <strong>plasma</strong> torch (Tekna PL-35)powered by a 35 kW generator work<strong>in</strong>g at 3 MHz,equipped with a reaction chamber designed for theproduction <strong>of</strong> metallic <strong>nanoparticle</strong>s and metallicoxides with low deposition on chamber walls. Thechamber is composed <strong>of</strong> a conical part with two curta<strong>in</strong>gas <strong>in</strong>jectors, the first at 5 mm and the second at 50mm downstream the torch nozzle and a cyl<strong>in</strong>drical partwith a lateral outlet connected to a sampl<strong>in</strong>g filter,where <strong>nanoparticle</strong>s can be collected.


Table 1. Process parameters and filter yield for differenttests with solid precursor.Name <strong>of</strong>the test1A 2B 3A 4A 5A 6APrecursortypeA B A A A AUppercurta<strong>in</strong> gas 0 3 3 10 0 0(m³/h)Lowercurta<strong>in</strong> gas 0 0 0 0 0 12(m³/h)Feed rate(g/m<strong>in</strong>)6 6.5 2.3 1 N.A. N.A.Filter yield(g/h)N.A. 21 25 25 5 21N.A. = Not AvailableFigure 1. Schematic <strong>of</strong> the <strong>plasma</strong> <strong>nanoparticle</strong>s <strong>synthesis</strong>system.A Tekna Plasma Systems powder feeder PF400 hasbeen used for the <strong>synthesis</strong> <strong>of</strong> silica nanopowdersstart<strong>in</strong>g from a solid glass precursor, <strong>in</strong>ject<strong>in</strong>g powders<strong>in</strong> the <strong>plasma</strong> torch trough an <strong>in</strong>jection probe. Anelectrical oven has been used to pre-heat precursorsbefore <strong>in</strong>jection.A Tekna Plasma Systems suspension feeder SF-300has been used for the liquid precursor <strong>in</strong>jection us<strong>in</strong>gan atomization probe send<strong>in</strong>g atomized precursordroplets <strong>in</strong> the core <strong>of</strong> the <strong>plasma</strong> discharge by means<strong>of</strong> a carrier gas (Ar).3. Nanoparticle and precursor characterizationSize, morphology and composition <strong>of</strong> synthetizedpowders have been analysed. Specific surface area(SSA) analysis was carried out us<strong>in</strong>g a NOVA 2200eanalyser (Quantachrome Instruments), based on BETtheory [8]. Before nitrogen adsorption, samples weredried at 300°C and degassed. A mean diameter <strong>of</strong><strong>nanoparticle</strong>s can be evaluated specific surface areaassum<strong>in</strong>g spherical and dense particles and us<strong>in</strong>g thefollow<strong>in</strong>g relation:where D is the mean diameter and ρ is the density(≈2300 kg/m³ for the glass <strong>of</strong> fluorescent lamps, ≈2650kg/m³ for pure silica). A scann<strong>in</strong>g electron microscope(EVO 50 from ZEISS) was used to study the <strong>size</strong> andmorphology <strong>of</strong> precursor particles and <strong>of</strong> the produced<strong>nanoparticle</strong>s; analysis <strong>of</strong> the chemical composition <strong>of</strong>the particles was carried out us<strong>in</strong>g Energy-DispersiveX-ray Spectroscopy (EDS).(1)4. Nanosilica <strong>synthesis</strong> from solid precursorsMicrometric glass powders used as precursor wereobta<strong>in</strong>ed from gr<strong>in</strong>ded fluorescent lamps with differentmeshes (average diameter: precursor A = 38-75 μmprecursor B = 75-125 μm). The mercury content hasbeen removed from the glass powders before the<strong>plasma</strong> treatment, for safety reasons. EDS analysis <strong>of</strong>powders showed that they are ma<strong>in</strong>ly composed bySiO₂ and Na₂O with small fraction <strong>of</strong> other elements asmetallic oxides (O 52.40%, Na 10.87%, Mg 1.50%, Al1.14%, Si 30.19%, K 0.90%, Ca 2.99% by weight, withonly slight variations <strong>in</strong> different samples). Thesamples were heated at a temperature <strong>of</strong> 180°C for onehour <strong>in</strong> an oven to <strong>in</strong>crease the powder flowabilitydur<strong>in</strong>g <strong>in</strong>jection. Different tests for the production <strong>of</strong>silica <strong>nanoparticle</strong>s have been performed keep<strong>in</strong>g fixed<strong>plasma</strong> operat<strong>in</strong>g conditions and chang<strong>in</strong>g the curta<strong>in</strong>gas flow conditions, precursor feed rate and precursortype, as reported <strong>in</strong> Table 1. As a comparison betweendifferent tests, the amount <strong>of</strong> <strong>nanoparticle</strong>s collected <strong>in</strong>the sampl<strong>in</strong>g filter has been measured and normalizedwith respect to the duration <strong>of</strong> the test, thus obta<strong>in</strong><strong>in</strong>g amean collection rate <strong>in</strong> the sampl<strong>in</strong>g filter that will becalled “filter yield” <strong>in</strong> the next sections. Argon hasbeen used as carrier gas and <strong>plasma</strong> gas with a flowrate <strong>of</strong> 6 slpm and 13 slpm, respectively. Air was usedfor sheath gas, <strong>in</strong>jected with a flow rate <strong>of</strong> 60 slpm. Airhas also been used as curta<strong>in</strong> gas <strong>in</strong> the reactionchamber, with conditions reported <strong>in</strong> Table 1. Totalpower <strong>of</strong> the <strong>RF</strong> system was set to 30 kW and thereaction chamber operat<strong>in</strong>g pressure was set to 70 kPa.Only one test has been done with precursor B s<strong>in</strong>ce itslow vaporization efficiency <strong>in</strong>duced the formation <strong>of</strong>millimetric SiO₂ crystals <strong>in</strong> the chamber and near thetorch outlet.Tests with precursor A have been carried out fordifferent conditions <strong>of</strong> the curta<strong>in</strong> gas. As can be seen<strong>in</strong> Table 1 compar<strong>in</strong>g test 5A with other ones, an


Table 2. Results <strong>of</strong> BET analysisName <strong>of</strong>the testSpecific SurfaceArea (m 2 /g)Mean Diameter(nm)1A 9.4 2782B 17.8 1463A 18.6 140Table 3. Composition (w%) <strong>of</strong> samples collected <strong>in</strong> the filterTest O Na Mg Al Si K Ca2B 51 22 0 0.6 24.2 1.4 0.63A 51 18 0.6 0 27.9 1.2 0.7Table 4. Operat<strong>in</strong>g parameters for different tests with liquidprecursorTestSheath Gas(slpm)Curta<strong>in</strong> Gas(m 3 /h)Feed rate(g/m<strong>in</strong>)T1 60 air 6 U/D 2.5T2 60 air 3 U/D 2.5T3 60 air 6 U/D 5Figure 2. SEM image <strong>of</strong> nanosilica powders synthe<strong>size</strong>d <strong>in</strong>test 3AFigure 3. Crystall<strong>in</strong>e particle <strong>in</strong> the sample <strong>of</strong> test 3A<strong>in</strong>crease <strong>in</strong> curta<strong>in</strong> gas flow rate results <strong>in</strong> a higheramount <strong>of</strong> powders collected <strong>in</strong> the filter per unit time.High precursor feed rates don’t ensure greatimprovements on filter yield (test 2B and 3A) Nosignificant variation <strong>of</strong> filter yield has been obta<strong>in</strong>ed<strong>in</strong>creas<strong>in</strong>g the upper curta<strong>in</strong> gas flow rate from 3 to 10m 3 /h while reduc<strong>in</strong>g the precursor feed rate from 2.3 to1 g/m<strong>in</strong> (tests 3A and 4A). The use <strong>of</strong> the lower curta<strong>in</strong>gas <strong>in</strong>let is less effective than the upper one, as shownfrom filter yield obta<strong>in</strong>ed <strong>in</strong> tests 4A and 6A. Resultsfrom specific surface area (SSA) analysis and thecorrespond<strong>in</strong>g mean diameter have been reported <strong>in</strong>Table 2. The use <strong>of</strong> curta<strong>in</strong> gas <strong>in</strong>duces an <strong>in</strong>crease <strong>of</strong>SSA and a reduction <strong>of</strong> the mean diameter <strong>of</strong> particlescollected <strong>in</strong> the sampl<strong>in</strong>g filter (see Table 2).SEM images <strong>of</strong> the test 3A are reported <strong>in</strong> Figure 2 and3, respectively. Though most <strong>of</strong> the particles werespheroidized and nanometric, even with diametersmaller than 40 nm (Figure 2), some crystall<strong>in</strong>eparticles reached the filter (Figure 3). These crystall<strong>in</strong>eparticles are micrometric and they reduce the value <strong>of</strong>the specific surface area. Their presence could be theeffect <strong>of</strong> a not completed vaporization <strong>of</strong> the precursor<strong>in</strong> the <strong>plasma</strong> torch. An excess or an <strong>in</strong>homogeneousfeed rate could be the reasons lead<strong>in</strong>g to unevaporatedprecursor. The EDS analysis <strong>of</strong> samples collected <strong>in</strong>the filter from tests 2B and 3A (see Table 3) shows thedecrease <strong>of</strong> Si weight fraction and the <strong>in</strong>crease <strong>of</strong> Naand K after <strong>plasma</strong> treatment. The different boil<strong>in</strong>gpo<strong>in</strong>ts <strong>of</strong> Na and Si oxides (1950°C and 2230°Crespectively) lead to an easier nucleation <strong>of</strong> Na₂O<strong>nanoparticle</strong>s, penaliz<strong>in</strong>g the formation <strong>of</strong> SiO₂ andthen the quality <strong>of</strong> the f<strong>in</strong>al product. Also the presence<strong>of</strong> N₂ may lead to this effect, reduc<strong>in</strong>g the partialpressure <strong>of</strong> gaseous SiO and the nucleation <strong>of</strong> nanoSiO 2 [9].5. Nanosilica <strong>synthesis</strong> from liquid precursorSynthesis tests have been carried out with liquidprecursor. The <strong>in</strong>fluence on the process <strong>of</strong> the liquidfeed<strong>in</strong>g rate (regulated directly on the suspensionfeeder) and <strong>of</strong> the curta<strong>in</strong> gas (<strong>in</strong>jected from twopositions <strong>in</strong> the reaction chamber) has been evaluated.Process parameters for different tests have beenreported <strong>in</strong> Table 4, whereas results for filter yield andspecific surface area are shown <strong>in</strong> Table 5. An <strong>in</strong>crease<strong>of</strong> the process yield can be observed for the cases withhigher <strong>in</strong>jection <strong>of</strong> curta<strong>in</strong> gas (cases T1 and T3). CaseT1 reaches 130% <strong>of</strong> improvement <strong>of</strong> filter yield withrespect to case T2. As can be seen <strong>in</strong> Table 5,synthetized powders collected <strong>in</strong> the filter have a lowerdiameter with respect to that <strong>of</strong> powders obta<strong>in</strong>ed withsolid precursors, with BET values <strong>of</strong> 70-90 m 2 /g.


Table 5. Results <strong>of</strong> tests with liquid precursorTest Filteryield (g/h)SSA(m 2 /g)Meandiameter(nm)T1 3.8 90 29T2 1.44 70 37T3 3.89 60 43Figure 4. SEM image <strong>of</strong> nanosilica powders from filterTable 6. Composition (w%) <strong>of</strong> samples collected <strong>in</strong> the filterTest C O Si AuT2 5.35 50.96 35.32 8.36T3 3.74 48.95 37.78 9.52In Figure 4, a SEM picture shows that all particlescollected are nanometric and that they show a tendencyto form agglomerates. It can be noticed from EDS thata higher purity <strong>of</strong> product can be obta<strong>in</strong>ed from TEOSwith respect to that <strong>of</strong> powders obta<strong>in</strong>ed from solidprecursors (see Table 6). Comparison <strong>of</strong> results <strong>of</strong> testT1 and test T3 (see Table 5) show that <strong>in</strong>creas<strong>in</strong>g thefeed rate the filter yield slightly changes and sampled<strong>nanoparticle</strong>s are characterized by slightly lower SSA.6. ConclusionResults show that the ratio between the filter yield andthe precursor feed rate is higher for solid than for liquidprecursors. However, non-vaporized precursor powdershave been collected <strong>in</strong> the filter <strong>in</strong> case <strong>of</strong> solidprecursor, whereas with liquid precursor only nano<strong>size</strong>dparticles have been obta<strong>in</strong>ed. Furthersimulative/experimental studies will be conducted todeterm<strong>in</strong>e operat<strong>in</strong>g conditions for the silica <strong>synthesis</strong>process that guarantee optimal evaporation rate <strong>of</strong> solidprecursors as dependent from their dimension and massflow rate, also tak<strong>in</strong>g <strong>in</strong>to account load<strong>in</strong>g effects.Moreover, it has been shown that the use <strong>of</strong> curta<strong>in</strong>gases generally gives the possibility to collect a higheramount <strong>of</strong> powders <strong>in</strong> the filter and at the same timeleads to a reduction <strong>of</strong> their mean diameters.To better understand the effects <strong>of</strong> the curta<strong>in</strong> gasescomposition on the chemical-physical process <strong>of</strong>nanosilica <strong>synthesis</strong> further studies on the use <strong>of</strong> aquench<strong>in</strong>g gas need to be conducted.References[1] S. Y. Fu, X. Q. Feng, B. Lauke, Y. W. Mai, Effects<strong>of</strong> particle <strong>size</strong>, particle/matrix <strong>in</strong>terface adhesion andparticle load<strong>in</strong>g on mechanical properties <strong>of</strong>particulate–polymer composites, Composites: Part B39 (2008) 933-961.[2] J. A. Smyder, T. D. Krauss, Com<strong>in</strong>g attractions forsemiconductor quantum dots, Materials Today 14(2011) 382-396.[3] T. K. Barik, B. Sahu, V. Swa<strong>in</strong>, Nanosilica frommedic<strong>in</strong>e to pest control, Parasitology Research 103(2008) 253-258.[4] B. W. Jo, C. H. Kim, G. H. Tae, J. B. Park,Characteristics <strong>of</strong> cement mortar with nano-SiO2particles, Construction and Build<strong>in</strong>g Materials 21(2007) 1351-1355.[5] C. Borgonovo, D. Apelian, Manufacture <strong>of</strong>Alum<strong>in</strong>um Nanocomposites: A Critical Review,Advances <strong>in</strong> Metal Matrix Composites - MaterialsScience Forum 678 (2011) 1-22.[6] D. Kim, M. A. Scibioh, S. Kwak, I. H. Oh, H. Y.Ha, Nano-silica layered composite membranesprepared by PECVD for direct methanol fuel cells,Electrochemistry Communications 6 (2004) 1069-1074.[7] D. Vollath, Plasma <strong>synthesis</strong> <strong>of</strong> nanopowders,Journal <strong>of</strong> Nanoparticle Research 10 (2008) 39-57.[8] S. Brunauer, P. H. Emmett, E. Teller, Adsorption<strong>of</strong> Gases <strong>in</strong> Multimolecular Layers, Journal <strong>of</strong> theAmerican Chemical Society 60 (1938) 309-319.[9] D. Harbec, F. Gitzh<strong>of</strong>er, A. Tagnit-Hamou,Induction <strong>plasma</strong> <strong>synthesis</strong> <strong>of</strong> nanometric spheroidizedglass powder for use <strong>in</strong> cementitious materials, PowderTechnology 214 (2011) 356-364.

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