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ULVAC , Inc.<br />
Customers’ <strong>Support</strong> <strong>News</strong><br />
Thank you very much for using ULVAC products.<br />
Please refer to the following Technical bulletin from ULVAC Semiconductor Division:<br />
Information:<br />
��For further information regarding the CS-<strong>News</strong> part change, please contact the following address.�<br />
ULVAC, Inc. Semiconductor Equipment Div. Production Engineering Dept.<br />
1220-14 Suyama Susono city Shizuoka �410-1231 Japan Tel: +81-55-998-2118<br />
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Page�1/2<br />
Doc. NO���������������<br />
Date of issue������������<br />
Title Replacement of Shutter motor due to RoHS initiative�<br />
QA<br />
Approved<br />
by�<br />
Issuer [Product<br />
Engineering Dept.]�<br />
Verified<br />
Issued by<br />
by�<br />
Applicable<br />
system<br />
Applicable<br />
unit<br />
ENTRON-EX and ENTRON T6 (T5)<br />
XU-MVP0300A (Motor) / AK-BX240M-YE4 (Driver)/<br />
BC9310618 (Cable)�<br />
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Document form �Safety Info.�Technical Info.��Maintenance �Retrofit��CIP Info.��Discon. Product Info.�ECO��Others�<br />
1) Applicable system : Multi chamber sputtering equipment “ENTRON-EX” and “ENTRON T6 (T5)”<br />
2) Applicable unit : Shutter motor<br />
Manufacturer : Yasukawa Electric Corp.<br />
<br />
Model : XU-MVP0300A (Motor) XU-MSV0002-B00-E1 (Motor)<br />
: AK-BX240M-YE4 (Driver) HU0380997-A (Driver)<br />
: BC9310618 (Cable) HU0481625 (Cable)<br />
(Cable is connected by terminator) (Cable is connected by connector)<br />
3) Reason for replacement:<br />
ULVAC has a RoHS initiative. See a comparison table on the next page for details.<br />
4) Going forward:<br />
a. New systems:<br />
RoHS-approved model will be installed.<br />
b. <strong>Support</strong> summary for current model:<br />
<br />
Either current model or RoHS-approved model can be installed.<br />
(The current model is not product discontinuation.)<br />
<br />
We offer repair the current model driver. The connector of RoHS-approved model interferes the equipment<br />
with the current model driver even though the dimensions are compatible.<br />
[Contact] Please contact your local ULVAC customer service center for further information.�
ULVAC , Inc.<br />
Comparison table of shutter motor<br />
Motor<br />
Driver<br />
��For further information regarding the CS-<strong>News</strong> part change, please contact the following address.�<br />
ULVAC, Inc. Semiconductor Equipment Div. Production Engineering Dept.<br />
1220-14 Suyama Susono city Shizuoka �410-1231 Japan Tel: +81-55-998-2118<br />
��������������<br />
Page�2/2<br />
Doc. NO���������������<br />
Date of issue������������<br />
Current model RoHS-approved<br />
Model XU-MVP0300A XU�MVS0002-B00-E1<br />
RoHS Not approved Approved<br />
Dimension 362L�100 360L�100<br />
Setting dimension Common �<br />
Common<br />
Electric property Common Common<br />
Connector Common Common<br />
Future supplies Repair only<br />
Mass production<br />
� � � � �<br />
Model AK-BX240M-YE4 HU0380997-A<br />
RoHS Not approved Approved<br />
Dimension Common Common<br />
Setting dimension Common Common<br />
Electric property Common �<br />
Common<br />
Power Terminal Connector<br />
Motor output Terminal Connector<br />
Pulse input Terminal Connector<br />
Future supplies Possible<br />
Mass production<br />
� � � � �<br />
Power cable<br />
Model BC9310618 HU0481625<br />
Length<br />
Terminal<br />
7�<br />
Round terminal<br />
�<br />
7�<br />
Connector<br />
Future supplies Possible<br />
Possible
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