Vacuum Components Catalog

28
Vacuum Pump (Oil Rotary Vacuum Pumps)
Oil Rotary Vacuum Pump EC Series
The EC series oil rotary pumps are designed for use with reactive
gases.
EC403
Pumping speed
L/min m
1500 90
3 /h
1400
1300
1200
1100
1000
900
800
700
600
500
400
300
200
100
0
80
70
60
50
40
30
20
10
Pumping Speed (JIS B8316/1985)
Type : EC403, EC603, EC803
Power: 50/60 Hz AC200V phane
Oil : ULVOIL ® R-7
Gauge: Pirani Gauge
CCM Gauge
Gas ballast closed
Gas ballast opened
VACUUM COMPONENTS
EC603
EC803
Pumping Speed Curve
Components Division ULVAC, Inc.
EC803 60Hz
EC803 50Hz
EC603 60Hz
EC603 50Hz
EC403 60Hz
EC403 50Hz
0
10-1 102 103 104 105 1 10
Pa
Pressure
* These are representative curves based on actual measurement data.
Atmospheric pressure

• Springless Vanes
Severe problems caused by spring
breakage are eliminated.
• Self-cleaning oil level gauge
Contaminants that form on the inner
walls of the oil level gauge are
washed off with a stream of the circulating
oil.
Oil level checks are easy and problems
caused by lack of oil are prevented.
• Excellent Corrosion Resistance
Many corrosion resistant materials
are used. (Seal material: Fluoride
rubber, Bearings: Ceramic, Vane:
Proprietary plastic, Other small
parts: Stainless Steel)
• Forced oil Circulation
Few clogs occur in the oil supply
routes and pumping performance is
consistent even over wide ranges of
inlet pressures.
EC403
N2 purge port G3/8 (PF 3/8)
of gas ballast system
N2 purge port G3/8 (PF 3/8)
of gas ballast system
4-dia. 10
285
270
230
Suction port; JIS B 2290,
corresponds to VG50
257
150
dia. 162
Drip-proof protected flange motor;
3 phase, AC200 V 50/60 Hz, 220 V 60 Hz
EC603
270
230
4-dia. 10
Suction port; JIS B 2290,
corresponds to VG50
Features
390
360
180
175
657
40 120 225
60 115
390
360
180
210
Oil pressure gauge port
G1/4 (PF 1/4)
N2 exhaust port G1/4 (PF 1/4)
of pump case
328
370
Exhaust port; JIS B2290, corresponds to VG40
Oil supply port G1 (PF1)
328
165
Drain valve
65
65
22
Oil pressure gauge
port G1/4 (PF 1/4)
262
80 65
N2 exhaust port G1/4
(PF 1/4) of pump case
Exhaust port; JIS B2290,
corresponds to VG40
Oil supply port G1 (PF1)
External filter
port IN,
G 3/8 (PF 3/8)
3.2
65
100
External filter
port OUT,
G 3/8 (PF 3/8)
dia. 182
286 40
721
120 260
60 150
Drip-proof protected flange motor;
3 phase, AC200V 50/60Hz, 220V 60Hz
Components Division ULVAC, Inc.
Specifications
Item Model EC403 EC603 EC803
Designed pumping speed 50 Hz 40 (670) 60 (1000) 80 (1340)
m3 /h (L/min) 60 Hz 48 (800) 72 (1200) 96 (1600)
Ultimate pressure * 1 Pa 6.7 x 10 –1
Motor * 2
(number of poles)
kW 1.5 (4) 2.2 (4) 3.7 (4)
Oil capacity L 2.3-3.6 2.5-4.0 2.7-4.4
Pump oil * 3 ULVOIL ® Super R-7000
Cooling method Air cooled
Suction port diameter, JIS B2290 Corresponds to VG50
Exhaust port diameter, JIS B2290 Corresponds to VG40
Weight (with motor) kg 65 76 93
Dimensions L x W x H * 4 mm 657 x 270 x 370 721 x 285 x 370 775 x 296 x 370
Standard accessories Directly coupled motor, oil for 1 unit
TMX40 TMX60 TMX80
oil mist trap oil mist trap oil mist trap
Options
Pump oil: ULVOIL ® Super R-7500, R-8000
ULVOIL ® R-7, ULVOIL ® R-96* 3 ,
suction tube with KF exhaust tube with KF,
gas ballast valve (manual)
Note: SI units are used in this catalog. The following conversion can be used for non-SI units:
Ultimate pressure: 6.7 x 10 –1 Pa = 5 x 10 –3 Torr
* 1 Measured with a Pirani gauge (Approx. 6.7 x 10 –2 Pa when measured with a McLeod vacuum gauge)
* 2 Standard motor: Drip-proof protected flange motor, 3 phase, AC200/220 V, 50/60 Hz
Options: The pump is also compatible with a fully sealed external fan motor, increased safety explosionresistant
motor, and pressure resistant explosion-resistant flange motor.
* 3 Fluoride type pump oil
* 4 L=length, W=width, and H=height
External Dimension Diagram (unit: mm)
N2 purge port G3/8 (PF 3/8)
of gas ballast system
296
161
270
dia. 203
4-dia. 12
200
570
540
Suction port; JIS B 2290,
corresponds to VG50 775
Drip-proof protected flange motor
3-phase, AC200V 50/60Hz, 220V 60Hz
328
370
270
245
305 40 120 295
60 185
328
165
65
328
22
262
Drain valve 80 65
Oil pressure gauge
port G1/4 (PF 1/4)
N2 exhaust port
G1/4 (PF 1/4)
of pump case
Exhaust port; JIS B2290,
corresponds to VG40
Oil supply port G1 (PF1)
328
370
165
65
22
262
Drain valve 80 65
External filter port IN,
G 3/8 (PF 3/8)
3.2
65
100
EC803
External filter
port IN
G3/8 (PF 3/8)
3.2
65
100
External filter
port OUT
G3/8 (PF 3/8)
External filter port OUT,
G 3/8 (PF 3/8)
VACUUM COMPONENTS 29