13.07.2015 Views

Effect of Polyimide Variation and its Curing Temperature on CMOS ...

Effect of Polyimide Variation and its Curing Temperature on CMOS ...

Effect of Polyimide Variation and its Curing Temperature on CMOS ...

SHOW MORE
SHOW LESS

Create successful ePaper yourself

Turn your PDF publications into a flip-book with our unique Google optimized e-Paper software.

Sensors & Transducers Journal, Vol. 103, Issue 4, April 2009, pp. 144-154[4]. A. Buchhold, A. Nakladal, G. Gerlach. P. Neumann, Design studies <strong>on</strong> piezoresistive humidity sensors,Sensors Actuators B, 53, 1998, pp. 1-7.[5]. D. Dokmeci, K. Najafi, A high sensitivity polyimide capacitive humidity relative humidity sensor form<strong>on</strong>itoring anodically b<strong>on</strong>ded hermetic micro packages, Journal <str<strong>on</strong>g>of</str<strong>on</strong>g> Micro-Electromechanical Systems, 10,2001, pp. 197-203.[6]. T. M. Berlicki, E. Murawski, M. Muszynski, S. J. Osadnik, E. L. Prociow, Thermoelement humiditysensor, Sensors Actuators A, 64, 1998, pp. 213-214.[7]. Z. M. Rittersma, Recent achievements in miniaturized humidity sensors-a review <str<strong>on</strong>g>of</str<strong>on</strong>g> transducti<strong>on</strong>techniques, Sensors <str<strong>on</strong>g>and</str<strong>on</strong>g> Actuators A, 96, 2002, pp. 196-210.[8]. T. Seiyama, N. Yamazoe, <str<strong>on</strong>g>and</str<strong>on</strong>g> H. Arai, Ceramic humidity sensors, Sensors <str<strong>on</strong>g>and</str<strong>on</strong>g> Actuators, Vol. 4, 1983,pp. 85-96.[9]. G. Harsanyi, Polymeric sensing films: New horiz<strong>on</strong>s in sensorics?, Sensors <str<strong>on</strong>g>and</str<strong>on</strong>g> Actuators, Vol. 24, 1995,pp. 85-88.[10]. T. Boltzhauser, L. Ch<str<strong>on</strong>g>and</str<strong>on</strong>g>ran, H. Baltes, <str<strong>on</strong>g>and</str<strong>on</strong>g> D. Steiner, Humidity sensing properties <str<strong>on</strong>g>and</str<strong>on</strong>g> electricalpermittivity <str<strong>on</strong>g>of</str<strong>on</strong>g> new photosensitive polyimide, Sensors <str<strong>on</strong>g>and</str<strong>on</strong>g> Actuators B, Vol. 5, 1991, pp 161-164.[11]. Y. Y. Qui, C. Azeredo-Leme, L. R. Alcacer, J. E. France, A <strong>CMOS</strong> humidity sensor with <strong>on</strong>-chipcalibrati<strong>on</strong>, Sensors <str<strong>on</strong>g>and</str<strong>on</strong>g> Actuators A, 92, 2001, pp. 80-87.[12]. Lei Gu, Qing-An Huang, Ming Qin, A novel capacitive-type humidity sensor using <strong>CMOS</strong> fabricati<strong>on</strong>technology, Sensors <str<strong>on</strong>g>and</str<strong>on</strong>g> Actuators B, 99, 2004, pp. 491-498.[13]. Uks<strong>on</strong>g Kang <str<strong>on</strong>g>and</str<strong>on</strong>g> Kensall D. Wise, A High-Speed Capacitive Humidity Sensor with On-Chip ThermalReset, IEEE Trans. <strong>on</strong> Electr<strong>on</strong> Devices, Vol. 47, No. 4, April 2000, pp. 702-710.[14]. D. Br<str<strong>on</strong>g>and</str<strong>on</strong>g>, A. Krauss et al, Design <str<strong>on</strong>g>and</str<strong>on</strong>g> Fabricati<strong>on</strong> <str<strong>on</strong>g>of</str<strong>on</strong>g> high-temperature micro hot-plates for drop-coated gassensors, Sensors <str<strong>on</strong>g>and</str<strong>on</strong>g> Actuators B, 68, 2000, pp. 223-233.[15]. C. Rossi, P. Temple-Boyer, D. Estive, Theoretical <str<strong>on</strong>g>and</str<strong>on</strong>g> experimental study <str<strong>on</strong>g>of</str<strong>on</strong>g> silic<strong>on</strong> micromachined microheater with dielectric stacked membranes, Sensors <str<strong>on</strong>g>and</str<strong>on</strong>g> Actuators A, 63, 1997, pp. 183-189.[16]. C. Rossi, P. Temple-Boyer, D. Estive, Realizati<strong>on</strong> <str<strong>on</strong>g>and</str<strong>on</strong>g> performance <str<strong>on</strong>g>of</str<strong>on</strong>g> thin SiO/SiN membrane for microheater applicati<strong>on</strong>s, Sensors <str<strong>on</strong>g>and</str<strong>on</strong>g> Actuators A, 64, 1998, pp. 241-245.[17]. M. Bar<strong>on</strong>cini, P. Placidi, G. C. Cardinali, A. Scorz<strong>on</strong>i, Thermal characterizati<strong>on</strong> <str<strong>on</strong>g>of</str<strong>on</strong>g> a micro heater formicro-machined gas sensors, Sensors <str<strong>on</strong>g>and</str<strong>on</strong>g> Actuators, A, 115, 2004, pp. 8-14.[18]. W. Chung, J. Lim, D. Lee, N. Miura, N. Yamazoe, Thermal <str<strong>on</strong>g>and</str<strong>on</strong>g> gas-sensing properties <str<strong>on</strong>g>of</str<strong>on</strong>g> planar-typemicro gas sensor, Sensors <str<strong>on</strong>g>and</str<strong>on</strong>g> Actuators B, 64 , 2000, pp. 118-123.[19]. A. Pike, J. W. Gardener, Thermal Modeling <str<strong>on</strong>g>and</str<strong>on</strong>g> characterizati<strong>on</strong> <str<strong>on</strong>g>of</str<strong>on</strong>g> micro power chemoresistive silic<strong>on</strong>sensors, Sensors <str<strong>on</strong>g>and</str<strong>on</strong>g> Actuators B, 45, 1997, pp. 19-26.[20]. P. R. Story, D. W. Galipeau, R. D. Mileham, A study <str<strong>on</strong>g>of</str<strong>on</strong>g> low-cost sensors for measuring low relativehumidity, Sensors <str<strong>on</strong>g>and</str<strong>on</strong>g> Actuators B, 24-25, 1995, pp. 681-685.[21]. Le Hoang Mai, Pham Thi Mai Hoa et al, Some investigati<strong>on</strong> results <str<strong>on</strong>g>of</str<strong>on</strong>g> the instability <str<strong>on</strong>g>of</str<strong>on</strong>g> humidity sensorsbased <strong>on</strong> alumina <str<strong>on</strong>g>and</str<strong>on</strong>g> porous silic<strong>on</strong> materials, Sensors <str<strong>on</strong>g>and</str<strong>on</strong>g> Actuators B, 66, 2000, pp. 63-65.[22]. M. Guenthur, G. Gerlach, G. Suchaneck, K. Sahre et al, I<strong>on</strong>-beam induced chemical <str<strong>on</strong>g>and</str<strong>on</strong>g> structuralmodificati<strong>on</strong>s in Polymers, Surface <str<strong>on</strong>g>and</str<strong>on</strong>g> Coatings Technology, 2002, pp 108-113.[23]. Mare Madou, Fundamentals <str<strong>on</strong>g>of</str<strong>on</strong>g> Micro fabricati<strong>on</strong>, CRC Press.[24]. Dup<strong>on</strong>t Company Pyralin, Data sheet.___________________2009 Copyright ©, Internati<strong>on</strong>al Frequency Sensor Associati<strong>on</strong> (IFSA). All rights reserved.(http://www.sensorsportal.com)154

Hooray! Your file is uploaded and ready to be published.

Saved successfully!

Ooh no, something went wrong!