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Instrumental Calibration, Standards, Quantitative Analysis, and ...

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Establishing <strong>Calibration</strong> of an Electron Microprobe<br />

• Wavelength spectrometer aligned vertically (baseplate) to coincide with<br />

optical microscope focal point in z-space<br />

• Diffracting crystal aligned to be on Rol<strong>and</strong> circle<br />

• All WDS should focus on same z-axis <strong>and</strong> coincident xy area ~ 50 um in<br />

diameter<br />

• Characteristics of correct alignment<br />

All WDS & EDS have identical X-ray takeoff angle<br />

Maximum X-ray intensity at z focus position, but also require:<br />

Measure identical k-ratio within counting statistics<br />

• Simultaneous k-ratio measurement is ultimate test of alignment<br />

• Initial CMAS st<strong>and</strong>ard set used on Caltech MAC <strong>and</strong> JEOL JXA-733<br />

• Exp<strong>and</strong>ed CMASTF st<strong>and</strong>ard set used for Wash U JXA-8200<br />

UO EPMA Workshop 2008

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