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[ High Power Impulse Magnetron Sputtering (HIPIMS) – A New Tool ...

[ High Power Impulse Magnetron Sputtering (HIPIMS) – A New Tool ...

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[<br />

Interface Chemistry-STEM-EDS and<br />

Coating Adhesion-<strong>HIPIMS</strong> CrN<br />

Scratch Test Critical Load on HSS = 85 N<br />

(Ehiasarian et al, Surf Coat Technol 163-164 (2003) 267)<br />

]

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