[ High Power Impulse Magnetron Sputtering (HIPIMS) – A New Tool ...
[ High Power Impulse Magnetron Sputtering (HIPIMS) – A New Tool ...
[ High Power Impulse Magnetron Sputtering (HIPIMS) – A New Tool ...
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[<br />
Motivation<br />
• Goal: Improvement of adhesion of PVD coatings<br />
• Objectives:<br />
<strong>–</strong> Local epitaxial growth <strong>–</strong> METAL ION SOURCE<br />
● efficient removal of surface oxides -> CLEAN<br />
INTERFACE<br />
● metal incorporation -> “DIFFUSION” BONDING<br />
<strong>–</strong> Avoid droplets -> DEFECT-FREE COATINGS<br />
<strong>–</strong> Avoid incorporation of Argon -> HIGH TOUGHNESS INTERFACE<br />
]
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