[ High Power Impulse Magnetron Sputtering (HIPIMS) – A New Tool ...
[ High Power Impulse Magnetron Sputtering (HIPIMS) – A New Tool ...
[ High Power Impulse Magnetron Sputtering (HIPIMS) – A New Tool ...
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[<br />
Plasma Composition <strong>–</strong>OES-Titanium<br />
<strong>HIPIMS</strong><br />
Emission<br />
from<br />
Ti 1+ and<br />
Ti 2+ metal ions<br />
]<br />
Cathode area = 1200 cm 2
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