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Teoria - LSI - USP

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Capacitor MOS<br />

V<br />

Al<br />

SiO 2<br />

P<br />

x ox<br />

Metal<br />

Oxido<br />

Semicondutor<br />

Largamente utilizado para a obtenção de características elétricas e<br />

físicas do processo de fabricação de circuitos integrados.

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