Temperature calibration - Laytec
Temperature calibration - Laytec
Temperature calibration - Laytec
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Solutions<br />
patent pending<br />
Reference light source<br />
800°C hot susceptor surface is<br />
mimicked by this handheld<br />
"cool" reference light source<br />
• 950nm light source<br />
• uniform emitting area of 1 cm²<br />
• equals a temperature of<br />
800°C (black body calibrated)<br />
• put below showerhead<br />
• can measure viewport-toviewport<br />
variations on-site<br />
(ring-to-ring and reactor-toreactor)<br />
• takes just a few minutes<br />
23 June 2009 <strong>Temperature</strong> <strong>calibration</strong><br />
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