Temperature calibration - Laytec
Temperature calibration - Laytec
Temperature calibration - Laytec
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Motivation: temperature effects<br />
Vertical temperature profile of a III-N reactor<br />
2...20K<br />
20...50K<br />
>300K<br />
temperature<br />
vertical position in reactor<br />
reactor upper boundary<br />
gas<br />
wafer<br />
satellite susceptor<br />
main susceptor<br />
heater<br />
23 June 2009 <strong>Temperature</strong> <strong>calibration</strong><br />
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