Fundamentals of Ion-Solid Interaction - SPIRIT
Fundamentals of Ion-Solid Interaction - SPIRIT
Fundamentals of Ion-Solid Interaction - SPIRIT
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Sputtering – Energy and Angle Distributions<br />
Thompson energy distribution <strong>of</strong> sputtered atoms<br />
f<br />
s<br />
E <br />
s<br />
~<br />
3 E U<br />
s<br />
E<br />
s<br />
s<br />
Mean energy <strong>of</strong> sputtered atoms<br />
E0<br />
E 2 ln 3<br />
U<br />
, <br />
s<br />
Dependence on angles <strong>of</strong> incidence<br />
and emission (amorphous substance)<br />
f<br />
<br />
cos <br />
~<br />
cos <br />
10-3 1 103 0<br />
Institute <strong>of</strong> <strong>Ion</strong> Beam Physics and Materials Research Pr<strong>of</strong>. Wolfhard Möller<br />
f s(E s) (arb. Units)<br />
1<br />
<br />
0.5<br />
<br />
E s / U s
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