Fundamentals of Ion-Solid Interaction - SPIRIT
Fundamentals of Ion-Solid Interaction - SPIRIT
Fundamentals of Ion-Solid Interaction - SPIRIT
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<strong>Ion</strong> Beam Mixing: Thermal and Chemical Effects<br />
Radiation-enhanced<br />
interdiffusion<br />
275 keV Si<br />
→ 144 nm Nb/Si[100]<br />
radiationenhanced<br />
interdiffusion<br />
purely<br />
collisional<br />
S. Matteson et al., Rad. Eff. 42(1979)217<br />
Chemical driving forces: Enthalpy<br />
<strong>of</strong> mixing and cohesive energy<br />
d<br />
d<br />
<br />
<br />
3<br />
2<br />
S <br />
n E Hmix<br />
<br />
1<br />
K<br />
2<br />
2<br />
H<br />
H<br />
2<br />
1<br />
m n<br />
K1, K2 K1<br />
Constants<br />
<br />
coh<br />
coh<br />
Institute <strong>of</strong> <strong>Ion</strong> Beam Physics and Materials Research Pr<strong>of</strong>. Wolfhard Möller<br />
<br />
T.W. Workman et al., Appl. Phys. Lett. 50(1987)1485
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