Fundamentals of Ion-Solid Interaction - SPIRIT

Preferential Sputtering
Partial sputtering yields
Y
p
k
Y
Y
p
A
p
B
c
c
c
s
k
s
A
s
B
Y
c
k
are generally different
Preferential sputtering if
Irradiation of two-component
substance A nB m
k = A,B
Y k c "component" sputter
yields
c k s surface atomic fractions
Mass conservation requires
Y
Y
p
A
p
B
t
cA
t
cB
c(x)
c A
c B
0
Example: B is preferentially sputtered
A
B
Institute of Ion Beam Physics and Materials Research Prof. Wolfhard Möller
Y p (t)
t 0
0
x
A
c(x)
B
c A
c B
0
t
A
B
t
x