Linear Drives - VG Scienta
Linear Drives - VG Scienta
Linear Drives - VG Scienta
You also want an ePaper? Increase the reach of your titles
YUMPU automatically turns print PDFs into web optimized ePapers that Google loves.
<strong>Linear</strong> <strong>Drives</strong><br />
Item Page<br />
Introduction to <strong>Linear</strong> <strong>Drives</strong>........................................................244<br />
Push Pull <strong>Drives</strong> LDP Series ...........................................................245<br />
Screw <strong>Drives</strong> LDS Series ................................................................248<br />
LDM Micrometer Series .................................................................251<br />
<strong>Linear</strong> Motion Thimble LM Series ................................................253<br />
<strong>Linear</strong> Transfer Mechanism LTM Series ......................................254<br />
Z Only Translators TR Series .......................................................255<br />
<strong>Linear</strong> Translator Shift LTS Series ................................................257<br />
243
<strong>Linear</strong><br />
<strong>Drives</strong><br />
<strong>Linear</strong> <strong>Drives</strong><br />
Introduction to <strong>Linear</strong> <strong>Drives</strong><br />
• Wide range of travels as standard<br />
• Fully bakeable to 250 ºC as standard (400 ºC<br />
if dismantled)<br />
• Different versions allow greater flexibility<br />
• Interchangeable between versions<br />
• 1x10 -11 mbar to 1 bar pressure range<br />
• Motorised types<br />
• Micrometer types<br />
• Pneumatic types<br />
• Push/pull types<br />
• Manual screw types<br />
There are many requirements to linearly move<br />
items inside vacuum. This movement is normally<br />
small in distance and can be of high or<br />
low accuracy. It can range from the opening and<br />
closing of a shutter to moving electron optics<br />
nearer to a loaded sample.<br />
<strong>VG</strong> <strong>Scienta</strong> has a wide range of products<br />
designed to overcome the problems associated<br />
with such simple translations.<br />
The devices in the LD series consist of a linear<br />
motion probe that can be moved in relation<br />
to its mounting flange from 25 mm to 150<br />
mm with a smooth and reliable operation. The<br />
method of actuation used differs between the<br />
three ranges, each allows different accuracies<br />
and speeds of movement to be achieved. Edge<br />
welded high quality UHV bellows are used in the<br />
construction of the drives.<br />
There is a choice of either light or heavy duty<br />
probe mounts across the LD linear drive series<br />
which is determined by the choice of mounting<br />
flange, either 34 mm or 70 mm Conflat. All of<br />
the versions are bakeable up to 250 ºC as standard,<br />
but can be baked to a maximum of 400 ºC<br />
if further dismantling is undertaken.<br />
In addition, <strong>VG</strong> <strong>Scienta</strong> supply a range of other<br />
linear drive components for more specialist<br />
applications. These include longer precision<br />
linear travels, or the capability of moving large<br />
diameter objects into a vacuum chamber. These<br />
devices are also described in this section.<br />
244 www.vgscienta.com
Introduction to the LPD Series Push Pull<br />
<strong>Drives</strong><br />
• Manual knob actuator<br />
• <strong>Linear</strong> non-rotating probe<br />
• Position lock<br />
• Pneumatic versions available<br />
• Manual versions bakeable to 250 ºC<br />
standard, 400 ºC with some components<br />
removed<br />
• Pneumatic versions bakeable to 150 ºC<br />
• Limit switch kit (reed switches) available for<br />
pneumatic versions<br />
www.vgscienta.com<br />
Push Pull <strong>Drives</strong> - LDP Series<br />
LDP Series Push Pull <strong>Drives</strong><br />
Flange OD Dimensions Shipping<br />
mm inch Travel Operation Position Scale L R E Weight kg Order Code<br />
34 1.33 25 Manual YES 264 90 116 2.0 ZLDP925<br />
34 1.33 50 Manual YES 323 90 141 2.5 ZLDP950<br />
34 1.33 100 Manual YES 441 90 192 3.0 ZLDP910<br />
34 1.33 150 Manual YES 559 90 242 3.5 ZLDP915<br />
70 2.75 25 Manual NO 140 33 58 2.5 ZLDP225<br />
70 2.75 50 Manual NO 174 41 92 3.0 ZLDP250<br />
70 2.75 100 Manual NO 241 58 160 3.5 ZLDP210<br />
70 2.75 150 Manual NO 308 74 226 4.0 ZLDP215<br />
34 1.33 25 Pneumatic NO 269 90 116 3.0 ZLDP925P<br />
34 1.33 50 Pneumatic NO 327 90 141 3.5 ZLDP950P<br />
34 1.33 100 Pneumatic NO 445 90 192 4.0 ZLDP910P<br />
70 2.75 25 Pneumatic NO 268 33 58 3.5 ZLDP225P<br />
70 2.75 50 Pneumatic NO 326 41 92 4.0 ZLDP250P<br />
70 2.75 100 Pneumatic NO 444 58 160 4.5 ZLDP210P<br />
Limit switch kit for all pneumatic versions (2 reed switches) ZLDPRSK2<br />
All dimensions in mm unless otherwise stated.<br />
Please note that pneumatic versions over 100 mm in travel are not available.<br />
Dimensions are shown in the drawings on page 246 and 247.<br />
<strong>Linear</strong><br />
<strong>Drives</strong><br />
245
<strong>Linear</strong><br />
<strong>Drives</strong><br />
Push Pull <strong>Drives</strong> - LDP Series<br />
All dimensions in mm.<br />
ZLDP9xx series manual push pull drive on 34 mm OD flange.<br />
ZLDP2xx series manual push pull drive on 70 mm OD flange.<br />
LDP Series - Accessories<br />
Lubrication Kit Order Code<br />
ZLDP9 series ZLUBEK<br />
ZLDP2 series ZLUBEK<br />
246 www.vgscienta.com
All dimensions in mm.<br />
ZLDP9xxP series pneumatic push pull drive on 34 mm OD flange.<br />
ZLDP2xxP series pneumatic push pull drive on 70 mm OD flange.<br />
www.vgscienta.com<br />
Push Pull <strong>Drives</strong> - LDP Series<br />
LDP Series - Accessories<br />
Lubrication Kit Order Code<br />
ZLDP9 series ZLUBEK<br />
ZLDP2 series ZLUBEK<br />
Limit Switch Kit (1)<br />
Fits all pneumatic version - 2 reed switches ZLDPRSK2<br />
(1) Reed switches are supplied with flying leads. They are bakeable to 150 ºC.<br />
<strong>Linear</strong><br />
<strong>Drives</strong><br />
247
<strong>Linear</strong><br />
<strong>Drives</strong><br />
Screw <strong>Drives</strong> - LDS Series<br />
LDS9 Series Screw <strong>Drives</strong> on 34 mm OD Flange<br />
Introduction to the LDS Series Screw<br />
<strong>Drives</strong><br />
• Manual hand wheel actuator<br />
• <strong>Linear</strong> non-rotating probe<br />
• Stepper motor driven versions available<br />
• Resolution of 0.02 mm<br />
• Motorised versions bakeable to 230 ºC<br />
with some components removed<br />
• Position lock<br />
• Manual versions bakeable to 250 ºC<br />
standard, 400 ºC with some components<br />
removed<br />
• Microswitch upgrade kits are available for<br />
the stepper motor drive options<br />
Flange OD Dimensions Shipping<br />
mm inch Travel Operation Scale L R E Weight kg Order Code<br />
34 1.33 25 Manual 0.02 139 90 116 2.0 ZLDS925<br />
34 1.33 50 Manual 0.02 172 90 141 2.5 ZLDS950<br />
34 1.33 100 Manual 0.02 240 90 192 3.0 ZLDS910<br />
34 1.33 150 Manual 0.02 307 90 242 3.5 ZLDS915<br />
34 1.33 25 Stepper Motor None 234 90 116 3.0 ZLDS925M (1)(3)<br />
34 1.33 50 Stepper Motor None 267 90 141 3.5 ZLDS950M (1)(3)<br />
34 1.33 100 Stepper Motor None 334 90 192 4.0 ZLDS910M (1)(3)<br />
34 1.33 150 Stepper Motor None 399 90 242 4.5 ZLDS915M (1)(3)<br />
34 1.33 25 DC Motor None 296 90 116 3.0 ZLDS925D (2)<br />
34 1.33 50 DC Motor None 329 90 141 3.5 ZLDS950D (2)<br />
34 1.33 100 DC Motor None 396 90 192 4.0 ZLDS910D (2)<br />
34 1.33 150 DC Motor None 461 90 242 4.5 ZLDS915D (2)<br />
All dimensions in mm unless otherwise stated.<br />
LDS2 Series Screw <strong>Drives</strong> on 70 mm OD Flange<br />
Flange OD Dimensions Shipping<br />
mm inch Travel Operation Scale L R E Weight kg Order Code<br />
70 2.75 25 Manual 0.02 139 33 58 2.5 ZLDS225<br />
70 2.75 50 Manual 0.02 172 41 92 3.0 ZLDS250<br />
70 2.75 100 Manual 0.02 240 58 160 3.5 ZLDS210<br />
70 2.75 150 Manual 0.02 307 74 226 4.0 ZLDS215<br />
70 2.75 25 Stepper Motor None 234 33 58 3.5 ZLDS225M (1)(3)<br />
70 2.75 50 Stepper Motor None 267 41 92 4.0 ZLDS250M (1)(3)<br />
70 2.75 100 Stepper Motor None 334 58 160 4.5 ZLDS210M (1)(3)<br />
70 2.75 150 Stepper Motor None 399 74 226 5.0 ZLDS215M (1)(3)<br />
70 2.75 25 DC Motor None 296 33 58 3.5 ZLDS225D (2)<br />
70 2.75 50 DC Motor None 329 41 92 4.0 ZLDS250D (2)<br />
70 2.75 100 DC Motor None 396 58 160 4.5 ZLDS210D (2)<br />
70 2.75 150 DC Motor None 461 74 226 5.0 ZLDS215D (2)<br />
All dimensions in mm unless otherwise stated.<br />
(1) Drive is assembled to stepper motor and is supplied with a wired connector to suit <strong>VG</strong> <strong>Scienta</strong>'s stepper motor control system. A separate<br />
mating connector is available. See pages 376 to 379.<br />
(2) DC Motor supplied with power supply - see page 375.<br />
(3) Microswitch upgrade kits are available - refer to pages 249 and 250.<br />
248 www.vgscienta.com
All dimensions in mm.<br />
Screw <strong>Drives</strong> - LDS Series 34 mm OD Flanges<br />
ZLDS9xx manual linear drive, 34 mm OD flange.<br />
ZLDS9xxM stepper motor drive, 34 mm OD flange.<br />
ZLDS9xxD DC motor drive, 34 mm OD flange.<br />
www.vgscienta.com<br />
LDS Microswitch Upgrade Kits<br />
Drive Order Code<br />
ZLDS925M ZLD925RM<br />
ZLDS950M ZLD950RM<br />
ZLDS910M ZLD910RM<br />
ZLDS915M ZLD915RM<br />
<strong>Linear</strong><br />
<strong>Drives</strong><br />
249
<strong>Linear</strong><br />
<strong>Drives</strong><br />
Screw <strong>Drives</strong> - LDS Series 70 mm OD Flanges<br />
All dimensions in mm.<br />
ZLDS2xx manual linear drive, 70 mm OD flange.<br />
ZLDS2xxM stepper motor drive, 70 mm OD flange.<br />
ZLDS2xxD DC motor drive, 70 mm OD flange.<br />
LDS Microswitch Upgrade Kits<br />
Drive Order Code<br />
ZLDS225M ZLD225RM<br />
ZLDS250M ZLD250RM<br />
ZLDS210M ZLD210RM<br />
ZLDS215M ZLD215RM<br />
250 www.vgscienta.com
Introduction to the LDM Micrometer<br />
Series<br />
• Micrometer driven drives<br />
• 230 ºC bakeout assembled<br />
• 400 ºC bakeout with some components<br />
removed<br />
• Axial load 25 N<br />
• Available in 25 mm or 50 mm stroke<br />
www.vgscienta.com<br />
Micrometer <strong>Drives</strong> - LDM Series<br />
LDM Series Micrometer <strong>Drives</strong><br />
Flange OD Micrometer Shipping<br />
mm inch Travel Operation Resolution, mm Weight kg Order Code<br />
34 1.33 25 Micrometer 0.01 3.0 ZLDM925<br />
34 1.33 50 Micrometer 0.005 3.5 ZLDM950<br />
70 2.75 25 Micrometer 0.01 4.0 ZLDM225<br />
70 2.75 50 Micrometer 0.005 4.5 ZLDM250<br />
Drive Lubrication Kit<br />
ZLDM9 Series ZLUBEK<br />
ZLDM2 Series ZLUBEK<br />
All dimensions in mm.<br />
ZLDM925 micrometer drive on 34 mm OD flange.<br />
<strong>Linear</strong><br />
<strong>Drives</strong><br />
251
<strong>Linear</strong><br />
<strong>Drives</strong><br />
Micrometer <strong>Drives</strong> - LDM Series<br />
All dimensions in mm.<br />
ZLDM950 micrometer drive on 34 mm OD flange.<br />
ZLDM225 micrometer drive on 70 mm OD flange.<br />
ZLDM250 micrometer drive on 70 mm OD flange.<br />
252 www.vgscienta.com
LM <strong>Linear</strong> Motion Thimble<br />
• 34 mm OD mounting flanges<br />
• 25 mm travel<br />
• Fully bakeable to 350 ºC as standard<br />
• 10 -11 mbar to 1 bar pressure range<br />
• LM925 has 0.05 mm thimble graduation<br />
• Flanges tapped to reduce overall length<br />
All dimensions in mm.<br />
www.vgscienta.com<br />
<strong>Linear</strong> Motion Thimble - LM Series<br />
LM Series <strong>Linear</strong> Motion Thimble<br />
Flange OD Travel Graduation A B C D E Shipping<br />
mm inch mm mm Extended Compressed ID OD Thread Weight kg Order Code<br />
34T 1.33 25 0.05 70 45 15.6 48 M4 2.5 ZLM925<br />
All dimensions in mm unless otherwise stated.<br />
Drive Lubrication Kit<br />
ZLM925 ZLUBEK<br />
<strong>Linear</strong><br />
<strong>Drives</strong><br />
253
<strong>Linear</strong><br />
<strong>Drives</strong><br />
<strong>Linear</strong> Transfer Mechanism - LTM Series<br />
All dimensions in mm.<br />
LTM Series <strong>Linear</strong> Transfer Mechanism<br />
<strong>Linear</strong> Transfer Mechanism LTM<br />
• Range of travel 25 to 100 mm<br />
• Easy adjustment<br />
• Graduated scale in 1mm increments<br />
• Fully bakeable to 250 ºC<br />
• Operating temperature range -20 ºC to<br />
+200 ºC<br />
• Fitted with tapped flanges at both ends<br />
• Positive stops at extremes of movement<br />
• Motorised resolution is 0.25 μm per half<br />
step<br />
Specifications<br />
Clear bore through bellows 38.0 mm<br />
Parallelism of flange faces Within<br />
0.04 mm/cm<br />
Concentricity of flange bores Within 0.5 mm<br />
Approximate torque required to elevate 1.2 Nm<br />
Maximum applied axial load 200 N<br />
Maximum applied radial load (to small pillar) 50 N<br />
Operating pressure range 1 bar to 10-11 254 www.vgscienta.com<br />
mbar<br />
(1) 70T mounting flanges have M6 tapped bolt holes.<br />
(2) Drive is assembled to stepper motor and is supplied with a wired<br />
connector to suit <strong>VG</strong> <strong>Scienta</strong>'s stepper motor control system. A<br />
separate mating connector is available. See pages 376 to 379.<br />
(3) Motor must be removed for bakeout.<br />
(4) DC Motor is supplied with power supply - see page 375.<br />
A A B B Bake Shipping<br />
Flange OD (1) Exten- Com- Exten- Com- Temp Weight<br />
mm inch Travel Operation ded pressed ded pressed °C kg Order Code<br />
70T 2.75 25 Manual 63 38 159 134 250 3.2 ZLTM25<br />
70T 2.75 50 Manual 92 42 215 165 250 3.4 ZLTM50<br />
70T 2.75 75 Manual 125 50 258 183 250 3.8 ZLTM75<br />
70T 2.75 100 Manual 163 63 310 210 250 4.2 ZLTM100<br />
70T 2.75 150 Manual 215 65 434 284 250 (3) 4.6 ZLTM150<br />
70T 2.75 25 Motorised 63 38 162 137 250 (3) 4.4 ZLTM25M (2)<br />
70T 2.75 50 Motorised 92 42 218 168 250 (3) 4.6 ZLTM50M (2)<br />
70T 2.75 75 Motorised 125 50 261 186 250 (3) 5.0 ZLTM75M (2)<br />
70T 2.75 100 Motorised 163 63 313 213 250 (3) 5.4 ZLTM100M (2)<br />
70T 2.75 150 Motorised 215 65 437 287 250 (3) 5.8 ZLTM150M (2)<br />
70T 2.75 25 DC Motor (4) 63 38 162 137 250 (3) 4.4 ZLTM25DC<br />
70T 2.75 50 DC Motor (4) 92 42 218 168 250 (3) 4.6 ZLTM50DC<br />
70T 2.75 75 DC Motor (4) 125 50 261 186 250 (3) 5.0 ZLTM75DC<br />
70T 2.75 100 DC Motor (4) 163 63 313 213 250 (3) 5.4 ZLTM10DC<br />
70T 2.75 150 DC Motor (4) 215 65 437 287 250 (3) 5.8 ZLTM15DC<br />
All dimensions in mm unless otherwise stated.<br />
Drive Lubrication Kit<br />
ZLTM Series ZLUBEK
Introduction to Z-only Translators<br />
• Z travel ranges are 150, 300, 450 and 600 mm<br />
• Screw drive for all Z ranges (optional worm<br />
drive for longer travels, recommended for 450<br />
and 600 mm translators)<br />
• Z resolution 0.01 mm manual, 0.005 mm<br />
motorised<br />
• <strong>Linear</strong> motion per turn is 2 mm (wormwheel<br />
drive 4 turns)<br />
• Clear bore of 33 mm (without support tube)<br />
for larger bore Z only translations (up to 50<br />
mm clear bore) see Omniax translator<br />
modules<br />
• Mounting flange is 70 mm OD Conflat<br />
• Top flange is 70 mm OD Conflat tapped<br />
(clearance hole option at time of order)<br />
• Bakeout temperature to 230 ºC fully<br />
assembled (motors and switches removed)<br />
• Any mounting orientation<br />
www.vgscienta.com<br />
Z-only Translators - TR Series<br />
TR Series Dimensions<br />
Z Travel<br />
Model Extended Retracted B<br />
ZTR1570 279 129 314<br />
ZTR3070 466 166 499<br />
ZTR4570 652 202 685<br />
ZTR6070 815 215 849<br />
All dimensions in mm.<br />
TR Series Z-only Translators<br />
Flange OD Z Travel<br />
mm inch Extent Resolution Order Codes<br />
70 2.75 150 0.01 mm (1) ZTR1570<br />
70 2.75 300 0.01 mm (1) ZTR3070<br />
70 2.75 450 0.01 mm (1) ZTR4570<br />
70 2.75 600 0.01 mm (1) ZTR6070<br />
(1) Resolution of motorised drive is 0.005 mm.<br />
All dimensions in mm.<br />
<strong>Linear</strong><br />
<strong>Drives</strong><br />
255
<strong>Linear</strong><br />
<strong>Drives</strong><br />
Z-only Translators - TR Series<br />
TR Series Options and Accessories<br />
• Support tube:<br />
31.7 mm OD and 28.5 mm ID<br />
• Feedthrough Chamber:<br />
70 mm OD top and bottom flanges with 3<br />
mini flanges for services. This is necessary<br />
with an RD1/2 using support tube.<br />
• Support Bearing:<br />
housing with bearings for 9.52 mm (3/8”)<br />
diameter rotary shaft support, with outlet<br />
ducts for cabling/cooling<br />
Z-only Translators - Options and Accessories<br />
• Motorised Z travel:<br />
stepper and limit switches option<br />
• Optional Support Stand:<br />
for horizontal mounting<br />
• Worm Drive:<br />
for longer travel translators and vertical<br />
operation (excluding ZTR1570).<br />
Description Order Code (1)<br />
Feedthrough chamber with 3 mini ports ZTRFC<br />
Support tube ZTRST<br />
Support bearing ZTRRB<br />
Support stand for horizontal mounting ZTRS<br />
Worm drive kit ZTRWD<br />
Stepper motor kit for factory fit and retrofit ZTRSMK (2)<br />
DC motor kit for factory fit and retrofit ZTRDCMK (3)<br />
ZTR series lubrication kit ZLUBEK<br />
(1) If ordered together, the different items will be supplied fitted and configured.<br />
(2) Drive is assembled to stepper motor and is supplied with a wired connector to suit <strong>VG</strong> <strong>Scienta</strong>'s stepper motor control system. A separate<br />
mating connector is available. See pages 376 to 379.<br />
(3) DC motor is supplied with power supply - see page 375.<br />
256 www.vgscienta.com
Introduction to the <strong>Linear</strong> Translator<br />
Shift LTS Series<br />
• High load capacity<br />
• Z travel 50 to 250 mm<br />
• Fully bakeable to 230 °C<br />
• Adjustable travel stops<br />
• Coarse or fine manual drive<br />
• Mounting flange 114 mm, 150 mm and 200<br />
mm OD<br />
• Large clear bore diameters<br />
• 0.4 mm travel/turn fine drive with handwheel<br />
• 4 mm travel/turn coarse drive via drive nut<br />
and socket<br />
<strong>Linear</strong> translator shifts are heavy duty translators<br />
designed to move large objects accurately in and<br />
out of a vacuum system. Three sizes of bellows<br />
and a variety of Z stroke lengths are available.<br />
The unit is intended primarily for vertical operation<br />
with the load supported load on the Z axis.<br />
The <strong>VG</strong> <strong>Scienta</strong> technical department should be<br />
consulted for alternative orientations.<br />
www.vgscienta.com<br />
<strong>Linear</strong> Translator Shift - LTS Series<br />
The Z motion is provided through three equispaced<br />
lead screws which are synchronously<br />
driven by a drive chain. Manual operation is<br />
provided by a nut attached to the chain tensioner,<br />
or alternatively by an optional handwheel<br />
assembly operating through a wormdrive reduction<br />
system.<br />
The lead screws are firmly mounted to the fixed<br />
base flange to provide cantilever and strut support<br />
as well as providing Z motion. All translators<br />
have additional stainless steel precision<br />
guide rods running in bronze bushings.<br />
<strong>Linear</strong><br />
<strong>Drives</strong><br />
257
<strong>Linear</strong><br />
<strong>Drives</strong><br />
<strong>Linear</strong> Translator Shift - LTS Series<br />
Spares and Accessories<br />
LTS Series <strong>Linear</strong> Translator Shift<br />
Max Loading<br />
Flange OD Vertical Horizontal Shipping<br />
mm inch Travel A B C D Bore kg (1) Nm (2) Weight kg Order Code<br />
114 4.50 50 175 125 220 17.5 68 300 25 6.0 ZLTS0405<br />
114 4.50 100 240 140 220 17.5 68 300 25 7.0 ZLTS0410<br />
152 6.00 50 175 125 257 15.0 101 260 38 8.0 ZLTS0605<br />
152 6.00 100 240 140 257 15.0 101 260 38 9.0 ZLTS0610<br />
152 6.00 150 305 155 257 15.0 101 260 38 10.0 ZLTS0615<br />
152 6.00 200 365 165 257 15.0 101 260 38 11.0 ZLTS0620<br />
152 6.00 250 430 180 257 15.0 101 260 38 12.0 ZLTS0625<br />
203 8.00 50 175 125 308 13.0 152 130 50 10.0 ZLTS0805<br />
203 8.00 100 240 140 308 13.0 152 130 50 11.0 ZLTS0810<br />
203 8.00 150 305 155 308 13.0 152 130 50 12.0 ZLTS0815<br />
203 8.00 200 365 165 308 13.0 152 130 50 13.0 ZLTS0820<br />
203 8.00 250 430 180 308 13.0 152 130 50 14.0 ZLTS0825<br />
Optional handwheel kit see below ZLTSHWK<br />
All dimensions in mm unless otherwise stated.<br />
(1) For off centre loads, please contact <strong>VG</strong> <strong>Scienta</strong> technical support department.<br />
(2) Horizontal moment is from the system mating flange.<br />
LTS Spares and Accessories<br />
LTS Drive Order Code Lubrication Kit Hand Wheel Kit<br />
LTS04 series ZLUBEK ZLTSHWK<br />
LTS06 series ZLUBEK ZLTSHWK<br />
LTS08 series ZLUBEK ZLTSHWK<br />
258 www.vgscienta.com