ELECTRON SPECTROMETER SCIENTA R3000 HP - VG Scienta

home lab high pressure pes
The Scienta R3000 HP is built for use together with the Scienta
MX650 monochromator x-ray source to realize lab-based high
pressure XPS. An illustration of the R3000 HP showing the
geometry of the pump ports is seen in Figure 1. The figure
also shows that the sample position is close, approximately 1
mm, from the front high pressure cone of the analyzer.
Fig 1. Scienta R3000 HP spectrometer.
Figure 2 shows a transmission test of an R3000 HP + MX650
system. The Ag 3d 5/2 signal attenuation is studied as a function
of nitrogen pressure in the analysis chamber. The high transmission,
low noise Scienta MCP/CCD detection system proves
very important in AP-PES (Ambient Pressure PhotoElectron
Spectroscopy). Figure 3 exemplifies the short acquisition time
needed to build statistics at high pressure conditions.
Figure 4 illustrates the pump zones of the Scienta R3000 HP
spectrometer set-up. With proper pumping this set-up allows
AP-PES (with good signal) up to 0.1 mbar using the Scienta
VUV5k UV lamp or the Scienta MX650 as excitation source
(see Figure 5 on page 2).
Intensity (Arb. Units)
ELECTRON SPECTROMETER
SCIENTA R3000 HP
1400
1200
1000
800
600
400
200
0
1116
Base Pressure
0.001 mbar
0,004 mbar
0.007 mbar
0.011 mbar
0.015 mbar
0.02 mbar
0.03 mbar
0.06 mbar
0.08 mbar
0.10 mbar
1117
0.1 mbar 7 sweeps
0.1 mbar 1 sweep
both spectra are normalized
1118 1119
Kinetic Energy (eV)
Ag 3d 5/2
R3000 XPS HP and
MX650 from UHV
up to 0.1 mbar N 2
1120
1121
Fig 2. Transmission test of the R3000 HP + Scienta MX650 system.
The aquisition time of each spectum was 31 seconds.
Ag 3d 5/2
R3000 XPS HP and
MX650 at 0.1 mbar N 2
1116 1117 1118 1119 1120 1121
Kinetic Energy (eV)
Fig 3. (R3000 HP + MX650) The figure illustrates the low noise of the
Scienta MCP/CCD detection system. The signal to noise ratio is very
good already after one sweep even at 0.1 mbar.
Scienta R3000 HP pumping zones
3 - analyzer
2 - lens, stage 2
1 - lens, stage 1
Fig 4. The Scienta R3000 HP has three differential pumping stages
allowing ambient pressures up to 0.1 mbar in the analysis chamber
using the Scienta MX650 or Scienta VUV5k as the excitation source.

TECHNOLOGY OVERVIEW
Property Specification
Energy resolving power > 1000 (1350 theoretical)
Angular acceptance ±15º (transmission mode)
Angular range 0.5 - 20 × E P
Lateral resolution 300 µm
Vacuum tank µ-metal
Magnetic shielding 5 mm µ-metal
Pressure < 2x10 -10 mbar
Baking temperature 150 ºC
Working distance 45 mm
Lens clearance 35º
Mounting flange NW 100 CF
Slits 6
Circular holes Not required with CCD
Detector type MCP/CCD camera
Detector interface Ø 40 mm MCP
Energy channels > 500 simultaneous
Angular channels > 400 simultaneous
Energy window 12% of pass energy
Scanned mode Yes
Quick mode Yes
FAT mode Yes
Intensity deflectors Yes, x, y
ISS Option
Analyser pump port Option
HIGH VOLTAGE ELECTRONICS
Property Specification
Temperature stability < 2 ppm/ºC (R-version)
(typical 0.5 ppm/ºC)
Noise (AV at analyser) < 1 ppm + < 500 µV
(typical 0.5 ppm + < 200 µV)
Drift < 20 ppm/year
(typical 10 ppm/year)
Electric isolation 6 kV
Min. step size HV100 1.6 mV
Min. step size DAC 200 µV
DAC Bits 16
Modular Yes
Communication USB
SWEDEN OFFICE
VG Scienta AB
PO Box 15120,
SE-750 15 Uppsala,
Sweden
Phone: +46 (0)18 480 58 00
USA OFFICE
VG Scienta Inc
235 Main Street,
Pleasanton,
CA 94566, USA
Phone: +1-800-482-2485
ELECTRON SPECTROMETER
SCIENTA R3000 HP
MODELS
info@vgscienta.com - www.vgscienta.com
R3000 XPS HP
Energy resolution 20 meV
Kinetic energy range 10 - 1500 eV
Pass Energy 20 - 200 eV
HP front aperture * Yes
* HP denotes High Pressure. The spectrometer can be used for standard
XPS measurements but is prepared for efficient differential pumping on
the lens and hemisphere to allow ambient pressure measurements up to
0.1 mbar. In high pressure mode the use of a front aperture is necessary.
Fig. 5. The picture shows the R3000 HP and high pressure MX650
set-up at the Univestity of Pennsylvania. Good signal in ambient
pressure up to 0.1 mbar is supported by the spectrometer and
monochromatic x-ray source. Photo courtesy: Prof. R. Carpick,
University of Pennsylvania.
UK OFFICE
VG Scienta Ltd
Maunsell Rd, Castleham Ind Est,
Hastings, East Sussex,
TN38 9NN, UK
Phone: +44 (0)1424 851 291
JAPAN OFFICE
VG Scienta KK
Blue Bldg, 4F
2-19-7 Hongo, Bunkyo-Ku,
Tokyo, 113-0033, Japan
Phone: +81 (0)3 5842 5885
© VG Scienta, 2009-09-23, v1.0