Surface Science and UHV Systems - VG Scienta

Surface Science and UHV Systems 

Item Page 

Introduction to Systems ................................................................ 462 

Surface Science Systems ................................................................ 462 

UHV Cluster Tools ........................................................................ 466 

Growth Systems .............................................................................. 467 

Deposition Systems ...................................................................... 468 

OLED Systems ................................................................................. 468 

Vacuum Furnaces ............................................................................ 468 

Synchrotrons and High Energy Physics ..................................... 469 

Special Systems and Custom Fabrications ................................ 470 

Environmental Monitoring ............................................................ 471 

461

Systems 

Introduction to VG Scienta Systems 

General 

VG Scienta has over forty years’ experience in 

the conception, design and manufacturing of 

standard and special vacuum systems for scientific 

use We have extensive expertise in ultra 

high vacuum seals, sample handling, sample 

preparation, heating and cooling, gas handling 

and growth techniques. This makes VG Scienta 

uniquely positioned to help you from the concept 

stage of your system through design, 

manufacturing and installation of the system on 

your site. 

VG Scienta has in-house technical and design 

skills that will work with you to design your system 

on advanced a 3D CAD which will model 

your system to ensure that the design meets your 

requirements. We will help you design the electronic 

controls to allow anything from a complete 

manual system to a fully automatic one. 

Once the design has been signed off, VG Scienta 

will manufacture the chambers, components and 

all key parts of the system in house and control 

the process at all stages of the system build. In 

our systems area we will assemble and test you 

system to vacuum specifications, ensure sample 

handling and control work and test for any other 

agreed test criteria. 

Surface Science Systems 

VG Scienta is the leading supplier of state-ofthe-art 

electron spectroscopy equipment. We 

offer ultra high resolution electron spectrometers 

for XPS, UPS and ARPES, high intensity 

UV and X-ray sources as well as tailor made mumetal 

chambers and dedicated sample manipulation 

solutions for electron spectroscopy. VG 

Scienta can integrate all these components into 

advanced surface science systems customised to 

your requirements. In 1989 we introduced our 

first ESCA 300 system and VG Scienta has since 

then worked with customers to put together 

some of the most advanced systems for synchrotron 

and lab research. 

462 www.vgscienta.com

Customized XPS Systems for 

Laboratories and Synchrotrons 

VG Scienta is uniquely positioned to provide 

customised solutions for surface analysis systems. 

With in-house expertise and control of the 

design and manufacturing of sources, analysers 

and vacuum system, VG Scienta can meet the 

most challenging customer requirements. We 

cooperate closely with our customer in specifying 

and designing the system to ensure that 

it meets the final requirements. VG Scienta’s 

expertise in sample transfer ensures that we can 

integrate surface science solutions to existing 

systems. 

www.vgscienta.com 


UPS Systems for Laboratories and 

Synchrotrons 

UPS is one of the most useful tools to study the 

valence band structure. Photons from VG 

Scienta’s high power UV source are used to 

bombard a surface. Emitted electrons from the 

surface are analysed in a hemispherical analyser 

which provides an energy spectrum which gives 

information about the states of electrons in 

atoms and chemical bondings. 

Along with the high-powered UV source, VG 

Scienta provides an easy-to-use UV monochromator 

enabling the user to tune between He I 

and He II radiation. 

VG Scienta can provide a custom designed surface 

science system and maximise the performance 

through careful design and consideration 

of the sample handling and chamber. During the 

design process VG Scienta consider the magnetic 

shielding and vacuum requirements for all 

electron spectroscopy applications. 


463



ARPES Systems for Laboratories and 

Synchrotrons 

From the late 1980s, angle resolved photo emission 

spectroscopy (ARPES) has been intensively 

applied to probe the quasi particle and anisotropic 

superconducting gap below the Fermi 

level for high Tc superconductors. 

ARPES has proved to be a powerful technique 

to reveal Fermi surface details. It is used for 

studies of materials such as superconductors 

(SC), colossal magnetoresistive (CMR) oxides, 

non-linear optical (NLO) crystals, charge density 

wave (CDW) compounds and metal-insulator 

transition (MIT) systems. 

In the summer of 1993, Scienta delivered the 

first SES 200 electron analyser to Stanford 

University. Due to its capability of measuring 

kinetic energy and momentum of photoelectrons 

with high energy and angular resolutions, 

this analyser simplified ARPES experiments 

dramatically. 

Since then, Scienta has developed the SES 

100, SES 2002 and SCIENTA R4000 electron 

spectrometers. For the SCIENTA R4000, a 

wide-angle lens has been specifically designed 

for angular-resolved measurements, reaching 

angular resolution within ± 15 degrees simultaneously. 

Material researchers of electronic structures and 

magnetic properties could use an ARPES system. 

ARPES makes band mapping possible as 

another experimental parameter is introduced, 

that is the momentum vector of the photoelectron. 

When the photoelectrons are emitted 

from the sample surface, not only energy can be 

measured but also the angles relative to crystal 

axis of the sample. From the angle and energy 

the momentum of the electrons can be determined. 

If the energy distribution and momentum 

distribution of the electrons are known, the 

band structure of the crystal can be determined. 

A VG Scienta system with a high resolution 

Scienta R3000 or R4000 analyser is ideally suited 

for this kind of research. 


HEXPS Systems 

In resent years the interest in high-energy XPS 

(HEXPS) has grown significantly. The R4000 

analyzer from VG Scienta has the ability for 

High Energy XPS (HEXPS). The R4000 can be 

specified on request to work up to 10 keV. This 

extended energy range allows scientists to probe 

deeper into the sample and allows work to be 

extended to the Fe 1s levels, facilitating unique 

research of steel metals. 

High Pressure XPS Systems 

All hemispherical analyzers from VG Scienta 

have the ability to be set up for higher pressure 

applications. X-ray photoemission spectroscopy 

(XPS) can be powerful method to 

study gas-solid interaction, catalysis reaction on 

the solids and biological samples, especially in 

environmental research. VG Scienta is working 

closely with the research community to improve 

techniques and develop systems that enable near 

ambient pressure, or high-pressure, XPS/UPS 

studies to be made. 




465


UHV Cluster Tools 

Introduction to R2P2 Cluster Tools 

The R2P2 cluster tool is a development of the 

linear rack and pinion transporter, where a single 

ended rack and pinion can be rotated within a 

circular vessel until it is aligned in a preset position 

at a radial port on the housing chamber by 

a rotary drive. 

Once locked in position, the same rotary drive 

moves the rack out through the port. R2P2s are 

normally mounted at the centre of a series of 

chambers and form a central hub from which 

all of the transfer takes place; they can be also 

used to join one or more systems together. The 

R2P2 chamber is normally connected by isolation 

valves to each of the connecting chambers 

allowing it to be sealed off as required. Careful 

design can allow storage carousels to be placed 

inside the chamber to allow sample storage as 

well as transfer to and from vessels. 

A port mounted at the base of the R2P2 allows 

a pump to maintain the chamber at a pressure 

lower than 10 -10 mbar if required. 

The XLTL series of linear transfer devices are 

rack and pinion drives based on the RLRP transfer 

arm. This has an NW35CF (70 mm OD) 

mounting flange and is available in a range of 

travels from 305 mm to 914 mm. The secondary 

motion of the RLRP is used to disengage the 

carrier from the transfer arm. 

The basic transfer arm, the XLTLB, can be supplied 

with an extension sleeve to bring the secondary 

movement close to the mounting port. 

This is recommended for long travels. A spring 

release extension sleeve with limit stops can be 

supplied for additional security. 

The XLTR radial transfer mechanism is based 

on the innovative R2P3 device. This is positioned 

as the hub of the system chambers which 

are located around the XLTR. Samples can then 

be distributed radially from the entry lock into 

the process, preparation and analysis chambers 

and so on. This has the advantage that a single 

device can be used for all sample transfer 

requirements. 

The XLRD series of linear transfer devices are 

magnetically coupled and based on our MLRD 

range of drives. This is a lower cost option than 

the XLTL version but does not offer the same 

sample security as the XLTL and XLTLSS combination. 


Growth Systems 

Compact growth and analysis facility installed 

at the Japanese photon factory at Tskuba city. 

The analysis chamber is connected to an x-ray 

beam line and is fitted with a five axis manipulator 

for RVLEED and fluorescent EXAFS 

studies using a solid state multi-detector array 

with a UHV chamber. This detector is also used 

in conjunction with a high resolution six axis 

goniometer for fluorescent SEXAFS. Surface 

x-ray diffraction experiments use a channelplate 

detector which rotates on the six axis goniometer. 

Cassettes of samples are entered through 

the loadlock and into the transfer, preparation 

and storage chamber. The deposition chamber 

is fitted with an e-gun and two K-cells to allow 

epitaxial growth of semiconductors. 

Deposition chamber. 

Phocathode preparation system. 


Growth and analysis facility. 

UHV high TC growth system. 

Growth Systems 

Thin Film Growth 

True UHV, 5 x 10 -11 mbar, high Tc superconductor 

thin film growth facility supplied to the 

University of Delft featuring two 40cc e-guns, 

three x 40cc PBN K-cells and oxygen resistant 

sample heating. The system is equipped with 

quadrupole rate controllers and a five specimen 

cassette entry lock system. It has since been 

upgraded to include a surface analysis facility. 

Sample Growth 

Substrate manipulators for large samples, (50- 

150 mm diameter), available with or without 

continuous sample rotation. 

The tantalum foil radiant elements are capable 

of heating wafers up to 850 ºC without a sample 

shutter, and 1200 ºC with a shutter. Also available 

with Z shift, and oxygen resistant versions. 


467


Deposition Systems and Vacuum Furnaces 

Sputter deposition system. 

OLED Edge system. 

Internal hot zone 

Deposition Systems 

We can produce a range of deposition systems 

for development through to small scale productions 

units, with sputter sources, electron beam 

sources and thermal evaporation cells. We have 

extensive expertise in producing systems from 

single chamber deposition systems to combine 

deposition thermal treatment and surface analysis 

units where we can look after all the transportation, 

vacuum, and interface issues. The range 

of systems available include small scale MBE, 

OLED, sputtering and electron beam systems, 

these can be delivered as complete turn key 

units to components for self assembly to fit the 

budgets available. 

OLED Systems 

VG Scienta offer the OLED Edge research and 

development system. This system has a proven 

track record in the development field of OLED 

production, and is a fully flexible unit configured 

around a central distribution system. 

The whole OLED Edge system is completely 

modular allowing initial purchase of basic deposition 

units through to multi chamber systems 

with characterisation and analysis units included. 

The OLED Edge can be supplied as either a 

turnkey system mated to glove boxes, or as a self 

build unit, with the assurance that it will function 

from day one. 

Ultra High Vacuum Furnaces 

Ultra high vacuum furnaces are controlled to 

give complete thermal/vacuum cycling from a 

single push button operation. The furnaces can 

be supplied with gas quench facility. By applying 

our knowledge at VG Scienta we can guarantee 

clean, hydrocarbon-free environments at pressures 

better than 10-6 mbar at 1400 ºC. Standard 

configurations offer hot zones up to 600 mm 

in diameter x 800 mm high and temperature 

ranges up to 1850 ºC (105 mm diameter x 140 

mm high). 


The vacuum chambers illustrated here are the 

dipole/crotch assemblies that form a major part 

of the diamond storage ring at the Rutherford 

Appleton Laboratory in the UK. The storage 

ring dipole bending magnets bend the trajectory 

of the electrons and force them to circulate 

in a closed orbit inside the vacuum chambers. 

The crotch vessels allow the electron beam to 

continue in a straight trajectory after the dipole 

magnet whilst at the same time allowing the 

synchrotron radiation, from either the dipoles or 

insertion devices, to pass down the beamline to 

the experimental station. 

The vessels had to be manufactured to very 

tight tolerances to ensure correct positioning of 

the electron and x-ray beams, and to allow the 

chambers to fit into the polepieces of the dipole 

bending magnets and the quadrupole and sextupole 

focussing and correction magnets. 

The high intensity radiation produced by both 

the bending magnets and insertion devices does 

not all end up being directed down the beamline 

and so water cooled absorbers are required 

to safely absorb the heat that is generated. A 

mixture of fixed and distributed absorbers are 

employed to remove excess heat and to protect 

the vessel walls and internal structures. 

In a number of areas explosion-bonded copper-stainless 

steel materials have been used to 

ensure efficient heat removal; using explosionbonded 

material means that the internal copper 

absorbers can be provided whilst maintaining 

the external vacuum envelope as a fully stainless 

steel structure. 

VG Scienta has extensive experience of producing 

specialist thermal absorbers for synchrotron 

and other applications. Materials used include 

OFHC copper, GlidcopTM, and explosion 

bonded copper-stainless steel materials. 

The example shown here is of the main absorber 

for an insertion device front end component 

employing tapered, water cooled, Glidcop 

plates. 

The vessel shown in the lower photograph is 

the 3m long Vertex chamber for the HERA-B 


Synchrotrons and High Energy Physics 

Diamond dipole crotch vessel assembly. 

Cooled taper assembly for in-vacuum undulator system. 

Hera-B chamber. 

experiment at DESY, Hamburg. Protons from 

the HERA storage ring are brought into collision 

with target wires inside the Vertex chamber. 

Moveable silicon strip detectors, mounted on 

the many orthogonal ports on the vessel measure 

particles generated in the collisions with the 

target wires. 


469


Special Systems and Custom Fabrications 

Also Available 

• Growth and analysis of semiconductors, 

superconductors, opto-electronic thin films 

and nano-crystalline materials 

• LPCVD and PECVD 

• Support equipment for surface analysis 

systems 

• Support equipment for molecular beam 

epitaxy 

• Systems to link multi-discipline work 

stations using unique specimen transport 

and manipulation 

• Ultra-clean and ultra-high vacuum 

deposition systems with a wide variety of 

compatible deposition sources and 

associated control modules 

• Manual, semi-automatic and computer 

controlled processing systems for the 

production of night vision tubes, klystrons 

and a wide range of specialised electron 

tubes and lasers 

• Transporters and manipulators 

• Substrate heating and cooling from 10K to 

2270K 

• Shutters and mask holders 

• Chambers in stainless steel, mu metal, 

aluminium and incoloy 

• UHV pumping systems 

• Heat treatment and brazing in the electron 

tube and atomic energy industries. 

Operation at temperatures up to 2000 ºC 

and vacuum of 5 x 10 -9 mbar, laboratory 

and production scale 

• Thermal vacuum chambers for the testing 

of components to be incorporated into 

both earth orbit and deep spaces satellites. 

Operation in the temperature range -150 ºC 

to + 200 ºC at vacuum of better than 5 x 

10 -9 mbar 


The PGA Mass Spectrometer System 

• Complete mass spectrometer system 

• Compact, portable, complete 

• Weather-reistant rugged enclosure 

• Highly specified powerful software 

• Built in industrial PC and touchscreen 

InToto Benchtop Mass Spectrometer 

System 

• High performance option for 50, 100, 200 

AMU operation 

• Dual filament source 

• Dual detector option 

• Compact, reliable electronics 

• Wide range of I/O as standard 

• Choice of connectivity 

• Full networking as standard 

• Stand alone capability PC and touch screen 

The PGA benchtop system represents the next 

generation in benchtop instrument design. It 

uses the latest electronics and surface mount 

techniques; the entire system fits in a 550 x 280 

x 360 mm enclosure and is a complete system 

in a box. 

Reliability, specification and performance are key 

features in the designs of this instrument. Power 

consumption is remarkably low, and the system 

can be run from the mains supply or an external 

+24 V source such as a vehicle battery. 

Battery back-up (UPS) and self powered options 

are also available. 

The benchtop system has been mounted inside a 

climate controlled outdoor enclosure producing 

a mass spectrometry system specifically designed 

for outdoor operation. We offer a variety of 

options including fully wether-resistant and vandal-proof 

enclosures. A remote telemetry option 

is available allow the instrument to be monitored, 

and data to be downloaded. 

The PGA portable gas analysis system will 

change your expectations of gas analysis instrumentation 


Environmental Monitoring 

PGA Specifications 

Quadrupole Analyser 

Single filter analyser 

Dual filament 

Single (Faraday) or dual detector (Faraday/electron 

multiplier) options 

True UHV and standard source options 

Choice of filament material 

Standard PGA System Enclosure 

Length 550 mm 

Height 360 mm 

Width 280 mm 

Power - Universal mains input or +24 VDC 

Stand-alone operation 

Connection Options 

RS232 

RS485 

USB 

Ethernet (10/100 Base T) 

Remote wireless operation is possible 

Windows Software 

All standard scan types 

Multi-head, network operation 

Remote operation over intranet, internet etc. 

Firebird database server for storage 

Stand alone data review 

Powerful templates to customise scan 

presentation 

Extensive scheduling capability 


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Surface Science and UHV Systems - VG Scienta

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