ELECTRON SPECTROMETER SCIENTA R3000 HP - VG Scienta

home lab high pressure pes
The Scienta R3000 HP analyser has been especially designed
to allow for ambient pressure photoelectron spectroscopy
(APPES). The analyser, shown in Figure 1, is equipped with an
interchangeable front cone with a small aperture to efficiently
separate the analyser from the high pressure at the sample position.
The analyser also features efficient differential pumping.
Figure 1. Scienta R3000 HP spectrometer.
The Scienta R3000 HP is built for use together with the MX
650 HP monochromator x-ray source in a home lab ambient
pressure XPS system. An example of a system based on these
components is shown in Figure 2.
The key to fast, well-resolved measurements under APPES
conditions is high transmission and low noice. For Scienta
R3000 HP this is acheived by the novel design in combination
with the Scienta MCP/CCD detection system. Figure
3 shows Ag 3d 5/2 XPS recorded under different pressure of
N 2 . As the gas pressure increase, the intensity decrease due
to inelastic scattering of photoelectrons. However, even at 1
mbar high quality spectra can be recorded in seconds, with
high signal-to-noice ratio.
ELECTRON SPECTROMETER
SCIENTA R3000 HP
Figure. 2. Home lab system built by Prevac based on the Scienta
R3000 HP and the Scienta MX 650 HP.
Intensity (arb. units)
1115
1116
1117
1118
1119
Figure 4 illustrates the differential pumping of the Scienta
R3000 HP analyser. The differential pumping zones and the
interchangeable front cone are shown. With the fornt cone
mounted, the working distance of the analyser is 0.5 - 2 mm.
With proper pumping this analyser allows APPES with good
signal up to 1.0 mbar using the MX650 HP as excitation source.
1120
Kinetic Energy (eV)
1121
(mbar)
6 x 10-8
1 x 10-3
0.01
0.08
0.2
0.6
0.8
1
Figure 3: Ag 3d 5/2 XPS recorded under different pressure of N 2 .
scienta r3000 hp pumping zones
3 - analyser
2 - lens, stage 2
1 - lens, stage 1
Figure 4. The Scienta R3000 HP has three differential pumping
stages allowing ambient pressures up to 1.0 mbar in the analysis
chamber.
1122

TECHNOLOGY OVERVIEW
property specification
Energy resolving power > 1 000 (1 350 theoretical)
Angular acceptance ±15º (transmission mode)
Lateral resolution 300 µm
Vacuum tank µ-metal
Magnetic shielding 5 mm µ-metal
Pressure < 2x10 -10 mbar (UHV)
up to 1 mbar (HP)
Baking temperature 120 ºC
Working distance 45 mm *
Lens clearance 35º
Mounting flange NW 100 CF
Slits 6
Detector type MCP/CCD camera
Detector interface Ø 40 mm MCP
Energy channels > 500 simultaneous
Angular channels > 400 simultaneous
Energy window 12% of pass energy
Lens modes: Angular, transmission
Acquisition modes: Swept, fixed
Detector modes: Pulsed, ADC
Intensity deflectors Yes, x, y
ISS Option
Analyser pump ports 3
* with front cone mounted: 0.5-2 mm
sWeDeN oFFiCe
VG Scienta AB
PO Box 15120,
SE-750 15 Uppsala,
Sweden
Phone: +46 (0)18 480 58 00
usa oFFiCe
VG Scienta Inc
235 Main Street,
Pleasanton,
CA 94566, USA
Phone: +1-800-482-2485
ELECTRON SPECTROMETER
SCIENTA R3000 HP
high VolTage eleCTroNiCs
property specification
Temperature stability < 2 ppm/ºC (R-version)
(typical 0.5 ppm/ºC)
Noise (AV at analyser) < 1 ppm + < 500 µV
(typical 0.5 ppm + < 200 µV)
Drift < 20 ppm/year
(typical 10 ppm/year)
Electric isolation 6 kV
Min. step size HV100 1.6 mV
Min. step size DAC 200 µV
DAC Bits 16
Modular Yes
Communication USB
moDels
info@vgscienta.com - www.vgscienta.com
R3000 HP XPS/UPS
Energy resolution 3 meV
Kinetic energy range 0.5 - 1 500 eV
Pass Energy 2 - 200 eV
R3000 HP XPS
Energy resolution 20 meV
Kinetic energy range 10 - 1 500 eV
Pass Energy 20 - 200 eV
uK oFFiCe
VG Scienta Ltd
Maunsell Rd, Castleham Ind Est,
Hastings, East Sussex,
TN38 9NN, UK
Phone: +44 (0)1424 851 291
JapaN oFFiCe
VG Scienta KK
Blue Bldg, 4F
2-19-7 Hongo, Bunkyo-Ku,
Tokyo, 113-0033, Japan
Phone: +81 (0)3 5842 5885
© VG Scienta, 2012-05-10, v4.2