Texas Journal of Microscopy - Texas Society for Microscopy
Texas Journal of Microscopy - Texas Society for Microscopy
Texas Journal of Microscopy - Texas Society for Microscopy
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SUPRA TM<br />
C a r l Z e i s s S M T – N a n o T e c h n o l o g y S y s t e m s D i v i s i o n<br />
Enabling the Nano-Age World ®<br />
Carl Zeiss SMT Inc<br />
One Zeiss Drive<br />
Thornwood, New York 10594<br />
USA<br />
–<br />
Imaging beyond Expectations<br />
Tel. +1 914 / 747 7700<br />
Fax +1 914 / 681 7443<br />
info-usa@smt.zeiss.com<br />
www.smt.zeiss.com/nts<br />
The versatile ultra high<br />
resolution FESEM <strong>for</strong><br />
semiconductor applications,<br />
materials analysis, life science<br />
and variable pressure solutions.<br />
The new SUPRA combines<br />
four instruments in one:<br />
• Ultra high resolution FESEM<br />
over the complete voltage range:<br />
1.0 nm @ 15kV, 1.7nm @ 1kV,<br />
4.0 nm @ 0.1 kV.<br />
• FESEM <strong>for</strong> handling large<br />
shaped specimens.<br />
• Full analytical FESEM with probe<br />
currents up to 3nA achievable.<br />
• Variable pressure technology<br />
to investigate non-conducting<br />
specimens without prior<br />
preparation.<br />
Tex. J. Micros. 37:2, 2006<br />
87
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