The Red Brick Wall of Traditional Semiconductor Electronics The ...
The Red Brick Wall of Traditional Semiconductor Electronics The ...
The Red Brick Wall of Traditional Semiconductor Electronics The ...
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CMOS Technology Breakthrough Takes Time…<br />
Tool or Technology<br />
Silicon epitaxy<br />
APCVD silicon nitride<br />
Ion implantation<br />
TiW metallization<br />
Charge-coupled devices (CCD)<br />
Reactive ion etch (RIE)<br />
Poly-Si emitter<br />
Refractory gate<br />
SIMOX (SOI via implantation)<br />
Trench capacitors<br />
Silicide (self-aligned)<br />
Lightly-doped drain (LDD)<br />
developed<br />
1960<br />
1965<br />
1969<br />
1970<br />
1970<br />
1975<br />
1976<br />
1976<br />
1978<br />
1979<br />
1978<br />
1980<br />
In production<br />
1964<br />
1968<br />
1973<br />
1976<br />
1981<br />
1980<br />
1984<br />
1983<br />
1989<br />
1986<br />
1985<br />
1986<br />
∆<br />
4<br />
4<br />
4<br />
6<br />
11<br />
5<br />
8<br />
7<br />
11<br />
7<br />
7<br />
6
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