The Red Brick Wall of Traditional Semiconductor Electronics The ...
The Red Brick Wall of Traditional Semiconductor Electronics The ...
The Red Brick Wall of Traditional Semiconductor Electronics The ...
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Modular Integration <strong>of</strong> SiGe:C HBTs in into<br />
to CMOS<br />
CMOS<br />
digital<br />
+<br />
HBT<br />
=<br />
BiCMOS<br />
• IHP module can be integrated into nearly any CMOS process<br />
• No changes in CMOS flow (modular integration)<br />
• CMOS libraries can be re-used<br />
• Adds only 4 additional masks to the process<br />
• Requires only epi-SiGe:C CVD as a new step
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