Microsystem technology (MST) - Geert's pages
Microsystem technology (MST) - Geert's pages
Microsystem technology (MST) - Geert's pages
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RF Passive Integration on Si<br />
thin-film inductors & capacitors (Philips PASSI TM )<br />
IN3 : 5 µm Al<br />
IN1,2 : 0.5 µm Al<br />
425 nm PECVD silicon nitride<br />
= 145 pF/mm 2<br />
high-resitivity silicon, ρ > 4 kΩ.cm<br />
PECVD silicon oxide<br />
passivation<br />
35
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