IrO 2
IrO 2
IrO 2
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Schematic diagram of home-made HV RF<br />
magnetron sputtering system<br />
Target<br />
Substrate [Al 2O 3 - sapphire (SA)]<br />
RF power<br />
Background pressure<br />
Sputtering pressure<br />
Substrate temperature<br />
O 2 / Ar flows<br />
1- inch Ir (99.95%)<br />
(001); (100); (012); (110)<br />
65 W<br />
3×10 -5 mBar<br />
~ 6.5×10 -2 mBar<br />
300-400°C<br />
2.5 / 5.0 sccm
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